Miniature network of light obturators

• US 5,579,149 A
• Filed: 09/12/1994
• Issued: 11/26/1996
• Est. Priority Date: 09/13/1993
• Status: Expired due to Term

• Current Assignee: Colibrys Incorporated (Safran Sensing Technologies Switzerland SA)
• Original Assignee: CSEM Centre Suisse D'Electronique et de Microtechnique SA
• Inventors: Renaud, Philippe, Rudolf, Felix, Vuilleumier, Raymond, Moret, Jean-Marc
• Primary Examiner(s): Dzierzynski, Paul M.
• Assistant Examiner(s): Schuberg, Darren E.
• Application Number:
  US08/304,689
• Time in Patent Office: 806 Days
• Field of Search: 359/223-226, 359/230, 359/290, 359/291, 359/317-319, 359/850, 359/855, 359/856, 359/298, 345/55, 345/84, 345/85, 345/108, 345/109, 348/203, 348/205, 348/740, 348/750, 348/755, 348/771, 250/229, 250/232, 250/233
• US Class Current: 359/223.1
• CPC Class Codes: G02B 26/0833 the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD G02B26/0825 takes precedence; micromechanical devices in general B81B
• CPC Class Codes: G09F 9/372 the positions of the elements being controlled by the application of an electric field

Abstract

The obturators can be actuated in order to modulate an incident beam (L). Microshutters (5) are attached to a substrate by means of fastenings opposing resistance to their rotation away from a rest position. The microshutters (5) are placed on optical paths (X--X) so as to be able to interrupt them or establish them. They are fitted out with reflecting surfaces (7) so as to deflect the light when they are in the blocking position. On each optical path (X--X) a supplementary reflecting surface (8), a diaphragm (6) and a focusing means (4) are placed. Thus, in line with its position, each microshutter can focus the light on the diaphragm (6) so as to allow it to pass or to deflect it in order to block it. The application thereof is in the transformation of a beam (L) into a modulated beam (Lm).

Claims

1. A network of miniature light obturators for transforming the light of a luminous beam into modulated light in the form of a matricial or linear set of points of light, each of said obturators being capable of selective activation or deactivation in order to allow passage of, or to block, the light of the luminous beam, said network comprising:

a substrate to which microshutters, respectively forming said obturators, are attached by means of elastic fastenings resisting rotation of said microshutters away from a predetermined rest position;

control means for selectively controlling rotation of the microshutters away from said rest position to a second position, said microshutters being respectively placed in optical paths of the light of said luminous beam in order to be able to block or to enable passage of the light of the luminous beam along said paths in accordance with the position of each microshutter, each microshutter further being fitted with a reflecting surface for deflecting said luminous beam light when the microshutter is in its light-blocking position; and

a supplementary reflecting surface, a diaphragm and a focusing means which are placed in the optical path associated with each microshutter in a manner such that, when said each microshutter is in one of its positions, the luminous light beam is focused on said diaphragm in order to allow the luminous light beam to pass, and, when said each microshutter is in the other of its positions, the luminous light beam is deflected relative to said diaphragm and consequently blocked,

said supplementary reflecting surface being provided at the center of said focusing means, and said diaphragm being in said each microshutter.

2. The network of obturators as set forth in claim 1, wherein said focusing means is a converging lens.

3. A network of obturators as set forth in claim 2, wherein said lens is a Fresnel type lens.

4. A network of obturators as set forth in claim 2, wherein said lens is a diffracting optical element.

5. The network of obturators as set forth in claim 1, said microshutters and said control means being micromachined on a single silicon wafer extending perpendicularly to said optical paths.

6. The network of obturators as set forth in claim 5, said wafer being assembled between two transparent plates parallel thereto, with interposition of a spacer frame, said plates respectively forming an input plate and an output plate for said network, and said focusing means being micromachined in said input plate.

7. The network of obturators as set forth in claim 1, said each microshutter being placed in the center of said focusing means, and said diaphragm being located in the center of said supplementary reflecting surface.

8. A network of miniature light obturators for transforming the light of a luminous beam into modulated light in the form of a matricial or linear set of points of light, each of said obturators being capable of selective activation or deactivation in order to allow passage of, or to block, the light of the luminous beam, said network comprising:

a substrate to which microshutters, respectively forming said obturators, are attached by means of elastic fastenings resisting rotation of said microshutters away from a predetermined rest position;

control means for selectively controlling rotation of the microshutters away from said rest position to a second position, said microshutters being respectively placed in optical paths of the light of said luminous beam in order to be able to block or to enable passage of the light of the luminous beam along said paths in accordance with the position of each microshutter, each microshutter further being fitted with a reflecting surface for deflecting said luminous beam light when the microshutter is in its light-blocking position; and

a supplementary reflecting surface, a diaphragm and a focusing means which are placed in the optical path associated with each microshutter in a manner such that, when said each microshutter is in one of its positions, the luminous light beam is focused on said diaphragm in order to allow the luminous light beam to pass, and, when said each microshutter is in the other of its positions, the luminous light beam is deflected relative to said diaphragm and consequently blocked,

said each microshutter being placed in the center of said focusing means, and said diaphragm being located in the center of said supplementary reflecting surface.

9. A network of miniature light obturators for transforming the light of a luminous beam into modulated light in the form of a matricial or linear set of points of light, each of said obturators being capable of selective activation or deactivation in order to allow passage of, or to block, the light of the luminous beam, said network comprising:

a substrate to which microshutters, respectively forming said obturators, are attached by means of elastic fastenings resisting rotation of said microshutters away from a predetermined rest position;

control means for selectively controlling rotation of the microshutters away from said rest position to a second position, said microshutters being respectively placed in optical paths of the light of said luminous beam in order to be able to block or to enable passage of the light of the luminous beam along said paths in accordance with the position of each microshutter, each microshutter further being fitted with a reflecting surface for deflecting said luminous beam light when the microshutter is in its light-blocking position; and

a supplementary reflecting surface, a diaphragm and a focusing means which are placed in the optical path associated with each microshutter in a manner such that, when said each microshutter is in one of its positions, the luminous light beam is focused on said diaphragm in order to allow the luminous light beam to pass, and, when said each microshutter is in the other of its positions, the luminous light beam is deflected relative to said diaphragm and consequently blocked,

wherein said supplementary reflecting surface is formed by a specular layer deposited at the center of said focusing means.

10. A network of miniature light obturators for transforming the light of a luminous beam into modulated light in the form of a matricial or linear set of points of light, each of said obturators being capable of selective activation or deactivation in order to allow passage of, or to block, the light of the luminous beam, said network comprising:

a substrate to which microshutters, respectively forming said obturators, are attached by means of elastic fastenings resisting rotation of said microshutters away from a predetermined rest position;

control means for selectively controlling rotation of the microshutters away from said rest position to a second position, said microshutters being respectively placed in optical paths of the light of said luminous beam in order to be able to block or to enable passage of the light of the luminous beam along said paths in accordance with the position of each microshutter, each microshutter further being fitted with a reflecting surface for deflecting said luminous beam light when the microshutter is in its light-blocking position; and

a supplementary reflecting surface, a diaphragm and a focusing means which are placed in the optical path associated with each microshutter in a manner such that, when said each microshutter is in one of its positions, the luminous light beam is focused on said diaphragm in order to allow the luminous light beam to pass, and, when said each microshutter is in the other of its positions, the luminous light beam is deflected relative to said diaphragm and consequently blocked,

wherein said microshutters and said control means are directly micromachined on a transparent plate forming an output plate for the network, said transparent output plate being arranged parallel to a transparent input plate for the network, with interposition of a spacer frame, and said input plate being micromachined in said focusing means.