Optical multilayer thin film and beam splitter

• US 5,579,159 A
• Filed: 12/08/1994
• Issued: 11/26/1996
• Est. Priority Date: 02/18/1992
• Status: Expired due to Term

• Current Assignee: Asahi Kogaku Kogyo Kabushiki Kaisha
• Original Assignee: Asahi Kogaku Kogyo Kabushiki Kaisha
• Inventors: Ito, Taku
• Primary Examiner(s): Dzierzynski, Paul M.
• Assistant Examiner(s): Juba, Jr., John
• Application Number:
  US08/355,200
• Time in Patent Office: 719 Days
• Field of Search: 359/483, 359/487, 359/485, 359/497, 359/498, 359/499, 359/583, 359/588, 359/586, 359/584
• US Class Current: 359/485.03
• CPC Class Codes: G02B 27/1073 characterized by manufacturing or alignment methods
• CPC Class Codes: G02B 27/142 Coating structures, e.g. thin films multilayers
• CPC Class Codes: G02B 27/283 used for beam splitting or combining
• CPC Class Codes: G02B 5/0825 the reflecting layers comprising dielectric materials only
• CPC Class Codes: G02B 5/26 Reflecting filters G02B5/28 takes precedence
• CPC Class Codes: G02B 5/3041 comprising multiple thin layers, e.g. multilayer stacks

Abstract

A beam splitter having an optical multilayer thin film is disclosed. The optical multilayer thin film is formed by laminating six layers in sequence. The laminated six layers comprise: a first layer, a third layer and a fifth layer each having a refractive index from 1.63 to 1.64; a second layer and a sixth layer each having a refractive index from 1.37 to 1.38, a fourth layer having a refractive index from 1.9 to 2.3; in which light is allowed to be incident upon the first layer of the optical multilayer thin film at the angle of incidence equal to or greater than 40°. The reflectances of S and P polarized components of reflected light are substantially equal to each other over a wide wavelength range and substantially no phase difference exists between the S and P polarized components. The beam splitter having a multilayer polarizing light separating film formed between an incoming side prism and an outgoing side prism is extremely high in the reflectance of the P polarized component of reflected light, in comparison with that of the S polarized component of the same reflected light.

Claims

1. A beam splitter, comprising:

a first prism having a predetermined refractive index;

a second prism having a predetermined refractive index; and

a multilayer polarizing light separating film interposed between said first and second prisms, said multilayer polarizing light separating film comprising a first layer having a predetermined refractive index and formed on said incoming side prism, and a plurality of lamination layers each composed of at least four sublayers each having different refractive indices, wherein each of the refractive indices is determined such that reflectance of a P polarized component of reflected light becomes equal to or greater than 80% when light is incident upon said film with an angle of incidence more than a predetermined angle.

2. The beam splitter as claimed in claim 1, further comprising a, b, c, and d layers formed in sequence beginning from the side of said lamination layers and provided between said lamination layers and said second prism, each of said a, b, c and d layers having a predetermined refractive index.

3. The beam splitter as claimed in claim 2, wherein the refractive index of said first prism is from 1.89 to 1.91, the refractive index of the second prism is from 1.50 to 1.55, the refractive index of said first layer is from 2.0 to 2.1, refractive indices of said lamination layers are from 1.63 to 1.68 in the first sublayer beginning from said first layer, from 1.37 to 1.38 in the second sublayer, from 1.44 to 1.48 in the third sublayer, and from 2.2 to 2.4 in the fourth sublayer, respectively, the refractive indices of said a and d layers are from 1.63 to 1.68, the refractive index of said b layer is from 1.37 to 1.38, and the refractive index of said c layer is from 1.44 to 1.48, respectively.

4. A beam splitter, comprising:

an incoming side prism;

an outgoing side prism; and

a multilayer polarizing light separating film interposed between said incoming and outgoing side prisms, wherein said multilayer polarizing light separating film comprises;

a first layer formed on said incoming side prism;

at least one lamination layer composed of at least four sublayers; and

a, b, c, and d layers formed in sequence beginning from a side of said lamination layer and provided between said lamination layer and said outgoing side prism; and

wherein a refractive index of said incoming side prism is from 1.89 to 1.91, a refractive index of said outgoing side prism is from 1.50 to 1.55, a refractive index of said first layer is from 2.0 to 2.1, refractive indices of said lamination layers are from 1.63 to 1.68 in said first sublayer beginning from said first layer, from 1.37 to 1.38 in said second sublayer, from 1.44 to 1.48 in said third sublayer, and from 2.2 to 2.4 in said fourth sublayer, respectively, refractive indices of said a and d layers are from 1.63 to 1.68, a refractive index of said b layer is from 1.37 to 1.38, and a refractive index of said c layer is from 1.44 to 1.48, respectively.

5. The beam splitter as claimed in claim 4, wherein each of said first layer, said lamination layer, and said a, b, c and d layers do not substantially absorb light.

6. The beam splitter of claim 4, wherein each of said incoming and outgoing side prisms do not substantially absorb light.

7. The beam splitter of claim 4, wherein reflectance of P polarized component of reflected light is at least 80%.

8. The beam splitter of claim 4, wherein reflectance of P polarized component of reflected light is at least 95%.