Micromechanical sensor with a guard band electrode

• US 5,581,035 A
• Filed: 08/29/1994
• Issued: 12/03/1996
• Est. Priority Date: 08/29/1994
• Status: Expired due to Term

• Current Assignee: Charles Stark Draper Laboratory Incorporated
• Original Assignee: Charles Stark Draper Laboratory Incorporated
• Inventors: Greiff, Paul
• Primary Examiner(s): Williams, Hezron E.
• Assistant Examiner(s): MOLLER, RICHARD ALAN
• Application Number:
  US08/297,655
• Time in Patent Office: 827 Days
• Field of Search: 73/514.17, 73/514.18, 73/514.23, 73/514.32, 310/309, 324/687, 324/688, 361/280, 361/283.1, 361/283.2, 361/283.3, 361/283.4, 361/290, 361/291, 437/228 SEN, 437/901, 437/921, 437/927, 437/148, 437/DIG. 159
• US Class Current: 73/514.32
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 15/131 with electrostatic counterbalancing means
• CPC Class Codes: G01P 2015/0831 the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration

Abstract

An electrostatically actuated micromechanical sensor having a guard band electrode for reducing the effect of transients associated with a dielectric substrate of the sensor. A proof mass, responsive to an input, is suspended over the substrate and one or more electrodes are disposed on the substrate in electrostatic communication with the proof mass to sense the input acceleration and/or to torque the proof mass back to a null position. A guard band electrode is disposed over the dielectric substrate in overlapping relationship with the electrodes and maintains the surface of the substrate at a reference potential, thereby shielding the proof mass from transients and enhancing the accuracy of the sensor.

Claims

1. A micromechanical sensor device comprising:

a dielectric substrate having a surface;

a proof mass suspended over said surface of said dielectric substrate and having a surface oriented in a reference plane, said proof mass being responsive to an input and forming a first capacitor plate;

a first electrode disposed over said surface of said dielectric substrate for coupling an excitation signal to said proof mass and forming a second capacitor plate;

a second electrode for sensing out-of-plane deflection of said proof mass;

an insulating layer disposed over said surface of said dielectric substrate in overlapping relationship with a portion of said first electrode and said second electrode; and

a guard band electrode disposed over said insulating layer so as to overlap said portion of said first electrode and said portion of said second electrode, said guard band electrode receiving a reference potential for shielding said proof mass from spurious charge on said surface of the dielectric substrate.

2. The micromechanical sensor device recited in claim 1 further comprising a rebalance electrode disposed over said surface of said dielectric substrate and in electrostatic communication with said proof mass for applying a force to said proof mass in response to a rebalance voltage applied to said rebalance electrode, said force causing said proof mass to return to said reference plane.

3. The micromechanical sensor device recited in claim 2 wherein said insulating layer is disposed over said surface of said dielectric substrate in overlapping relationship with a portion of said rebalance electrode, wherein said guard band electrode is disposed over said insulating layer so as to overlap said portion of said rebalance electrode.

4. The micromechanical sensor device recited in claim 2 further comprising a signal processor responsive to a sense signal from said second electrode for providing a sensor output signal proportional to said input and for providing said rebalance voltage.

5. The micromechanical sensor device recited in claim 1 further comprising a pair of posts and a pair of flexures coupled between said dielectric substrate and said proof mass for suspending said proof mass over said surface of said dielectric substrate.

6. The micromechanical sensor device recited in claim 1 wherein said guard band electrode extends over said surface of said dielectric substrate beyond said proof mass.