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Micromechanical sensor with a guard band electrode

  • US 5,581,035 A
  • Filed: 08/29/1994
  • Issued: 12/03/1996
  • Est. Priority Date: 08/29/1994
  • Status: Expired due to Term
First Claim
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1. A micromechanical sensor device comprising:

  • a dielectric substrate having a surface;

    a proof mass suspended over said surface of said dielectric substrate and having a surface oriented in a reference plane, said proof mass being responsive to an input and forming a first capacitor plate;

    a first electrode disposed over said surface of said dielectric substrate for coupling an excitation signal to said proof mass and forming a second capacitor plate;

    a second electrode for sensing out-of-plane deflection of said proof mass;

    an insulating layer disposed over said surface of said dielectric substrate in overlapping relationship with a portion of said first electrode and said second electrode; and

    a guard band electrode disposed over said insulating layer so as to overlap said portion of said first electrode and said portion of said second electrode, said guard band electrode receiving a reference potential for shielding said proof mass from spurious charge on said surface of the dielectric substrate.

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