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Optical element, production method of optical element, optical system, and optical apparatus

  • US 5,581,605 A
  • Filed: 03/07/1995
  • Issued: 12/03/1996
  • Est. Priority Date: 02/10/1993
  • Status: Expired due to Term
First Claim
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1. An optical element comprising:

  • a substrate having a plurality of concave surfaces or convex surfaces with a substantially same curvature; and

    multilayer films for reflecting X-rays, formed on the concave surfaces or convex surfaces of said substrate and composed of thin films;

    wherein when X-rays are incident into the multilayer films on said concave surfaces or convex surfaces, the X-rays are reflected with a predetermined diverging angle on the multilayer films and as a result a plurality of secondary X-ray sources having the diverging angle are formed on a same plane located a predetermined distance apart from said concave surfaces or convex surfaces.

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