Optical element, production method of optical element, optical system, and optical apparatus
First Claim
1. An optical element comprising:
- a substrate having a plurality of concave surfaces or convex surfaces with a substantially same curvature; and
multilayer films for reflecting X-rays, formed on the concave surfaces or convex surfaces of said substrate and composed of thin films;
wherein when X-rays are incident into the multilayer films on said concave surfaces or convex surfaces, the X-rays are reflected with a predetermined diverging angle on the multilayer films and as a result a plurality of secondary X-ray sources having the diverging angle are formed on a same plane located a predetermined distance apart from said concave surfaces or convex surfaces.
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Accused Products
Abstract
An optical element for X-ray reflection according to the present invention is provided with a number of fine convex surfaces or concave surfaces regularly arranged on a substrate. Multilayer films reflecting X-rays are formed over the convex surfaces or concave surfaces. The convex surfaces or concave surfaces have such a shape that when X-rays enter each concave surface or convex surface, they are reflected with a certain diverging angle by the multilayer films and as a result that a plurality of secondary X-ray sources having the diverging angle are formed on a same plane located a certain distance apart from the concave surfaces or convex surfaces. By this, a number of secondary X-ray sources are formed to enable uniform irradiation of X-rays in a wide region.
125 Citations
31 Claims
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1. An optical element comprising:
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a substrate having a plurality of concave surfaces or convex surfaces with a substantially same curvature; and multilayer films for reflecting X-rays, formed on the concave surfaces or convex surfaces of said substrate and composed of thin films; wherein when X-rays are incident into the multilayer films on said concave surfaces or convex surfaces, the X-rays are reflected with a predetermined diverging angle on the multilayer films and as a result a plurality of secondary X-ray sources having the diverging angle are formed on a same plane located a predetermined distance apart from said concave surfaces or convex surfaces. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. An optical system for illuminating an illuminated surface in an arc shape, comprising:
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an optical reflector having an X-ray reflecting surface forming a part of a parabola of revolution obtained by revolving an arbitrary parabola about a base axis passing through a vertex and a focus of the parabola and inclined at a predetermined angle relative to a normal line to said illuminated surface, said optical reflector reflecting X-rays by said X-ray reflecting surface to irradiate said illuminated surface; and an optical element for reflecting X-rays incident thereinto substantially in parallel with said base axis to irradiate said X-rays onto the X-ray reflecting surface of said optical reflector; wherein said optical reflector and said optical element are rotated in a united manner about a rotation axis passing through said optical element and being parallel to the normal line to said illuminated surface; wherein said optical element comprises; a substrate having a plurality of concave surfaces or convex surfaces with a substantially same curvature; and multilayer films for reflecting X-rays, formed on the concave surfaces or convex surfaces of said substrate and composed of thin films; wherein when X-rays are incident into the multilayer films on said concave surfaces or convex surfaces, the X-rays are reflected with a predetermined diverging angle on the multilayer films and as a result a plurality of secondary X-ray sources having the diverging angle are formed on a same plane located a predetermined distance apart from said concave surfaces or convex surfaces. - View Dependent Claims (9, 10, 11, 12, 13)
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14. An optical apparatus for illuminating a predetermined area, comprising:
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an optical reflector having an X-ray reflecting surface forming a part of a parabola of revolution obtained by revolving an arbitrary parabola about a base axis passing through a vertex and a focus of the parabola and inclined at a predetermined angle relative to a normal line to said illuminated surface, said optical reflector reflecting X-rays by said X-ray reflecting surface to irradiate said illuminated surface; an optical element for reflecting X-rays incident thereinto substantially in parallel with said base axis to irradiate said X-rays onto the X-ray reflecting surface of said optical reflector; an X-ray source for emitting X-rays toward said optical element; and rotation driving means for rotating said optical reflector and said optical element in a united manner about a rotation axis passing through said optical element and being parallel to the normal line to said illuminated surface; wherein said optical reflector and said optical element are rotated in a united manner by said rotation driving means to irradiate the X-rays emitted from said X-ray source onto said illuminated surface in an arc shape; wherein said optical element comprises; a substrate having a plurality of concave surfaces or convex surfaces with a substantially same curvature; and multilayer films for reflecting X-rays, formed on the concave surfaces or convex surfaces of said substrate and composed of thin films; wherein when X-rays are incident into the multilayer films on said concave surfaces or convex surfaces, the X-rays are reflected with a predetermined diverging angle on the multilayer films and as a result a plurality of secondary X-ray sources having the diverging angle are formed on a same plane located a predetermined distance apart from said concave surfaces or convex surfaces. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31)
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Specification