Brush cleaning apparatus and cleaning system for disk-shaped objects using same

• US 5,581,837 A
• Filed: 06/21/1995
• Issued: 12/10/1996
• Est. Priority Date: 07/04/1994
• Status: Expired due to Fees

• Current Assignee: Shin-Etsu Handotai Co., Ltd. (Shin-Etsu Chemical Company Limited)
• Original Assignee: Shin-Etsu Handotai Co., Ltd. (Shin-Etsu Chemical Company Limited)
• Inventors: Takamatu, Hiroyuki, Nakano, Masami, Uchiyama, Isao, Suzuki, Morie
• Primary Examiner(s): Scherbel, David
• Assistant Examiner(s): Chin, Randall E.
• Application Number:
  US08/493,070
• Time in Patent Office: 538 Days
• Field of Search: 15/77, 15/88.3, 15/97.1, 15/102, 15/302, 15/306.1, 15/308, 15/309.2, 134/57 R, 134/902
• US Class Current: 15/77
• CPC Class Codes: B08B 1/20 Cleaning of moving articles, e.g. of moving webs or of objects on a conveyor
• CPC Class Codes: B08B 3/022 Cleaning travelling work B08B3/042 takes precedence
• CPC Class Codes: H01L 21/67028 for cleaning followed by drying, rinsing, stripping, blasting or the like

Abstract

A brush cleaning apparatus which includes at least one brush cleaning means having a pair of rotary brushes that are arranged in parallel one above the other. Disk-shaped objects are transported one at a time between the brushes so as to be cleaned thereby. A stopper is provided in front of the disk-shaped objects. The stopper selectively blocks movement of the disk-shaped objects and releases the disk-shaped objects for controlled movement of the disk-shaped objects through the cleaning apparatus.

Claims

1. A brush cleaning apparatus comprising:

a plurality of brush cleaning means for transporting and cleaning disk-shaped objects one at a time between a pair of brushes, each of said brush cleaning means comprising a pair of rotary brushes arranged in parallel one above the other, guides for guiding the disk-shaped objects during cleaning, said guides being arranged perpendicular to axes of the rotary brushes and adjacent the rotary brushes, and a stopper means for blocking movement of the disk-shaped objects and releasing the disk-shaped objects for movement along a transport direction perpendicular to the axes of the rotary brushes, said stopper means being located at a distance from the brush cleaning means along the transport direction, said stopper means including a pair of stopper rods, a spacing between said pair of stopper rods being adjustable, whereby the disk-shaped objects are transported at a speed during cleaning, which speed is controlled by adjusting a rate of change in magnitude of the spacing between the stopper rods.

2. The brush cleaning apparatus as defined in claim 1, further comprising at least one auxiliary brush cleaning means for cleaning a leading tip of each disk-shaped object, said at least one auxiliary brush cleaning means including a pair of auxiliary rotary brushes arranged in parallel one above the other and located at a distance from the stopper means along the transport direction of the disk-shaped objects.

3. The brush cleaning apparatus as defined in claim 2, further comprising an auxiliary stopper means for blocking movement of the disk-shaped objects and releasing the disk-shaped objects for movement along the transport direction, said auxiliary stopper means being located at a distance from the at least one auxiliary brush cleaning means along the transport direction of the disk-shaped objects.

4. The brush cleaning apparatus as defined in claim 3, wherein said auxiliary stopper means comprises a pair of auxiliary stopper rods, a spacing between said pair of auxiliary stopper rods being adjustable, whereby a disk-shaped object is stopped in place when the space between the pair of the stopper rods is smaller than the diameter of the disk-shaped object, the disk-shaped object is slowly moved forward as the space between the pair of stopper rods is slowly increased, and the disk-shaped object is moved out of the apparatus when the space between the pair of stopper rods is larger the diameter of the disk-shaped object.

5. The brush cleaning apparatus as defined in claim 4, wherein said disk-shaped objects are semiconductor wafers.

6. The brush cleaning apparatus as defined in claim 1, wherein said disk-shaped objects are semiconductor wafers.

7. The brush cleaning apparatus as defined in claim 2, wherein said disk-shaped objects are semiconductor wafers.

8. The brush cleaning apparatus as defined in claim 3, wherein said disk-shaped objects are semiconductor wafers.

9. A cleaning system for disk-shaped objects comprising:

a carrier for accommodating disk-shaped objects therein;

a loader mechanism for loading the disk-shaped objects one by one from the carrier to brush cleaning sections of the cleaning system in which the disk-shaped objects are cleaned, said brash cleaning sections being directly located next to the loader mechanism;

rinse sections for rinsing disk-shaped objects cleaned in the brash cleaning sections;

drying sections for drying disk-shaped objects rinsed in the rinse sections;

an unloader mechanism for receiving the disk-shaped objects from the drying section and placing said disk-shaped objects into another carrier; and

a disk-shaped object transportation belt mechanism for transporting the disk-shaped objects between the brash cleaning sections, the rinse sections, and the drying sections,

wherein each of the brash cleaning sections comprises a plurality of brash cleaning means for transporting and cleaning disk-shaped objects one by one between pairs of brushes, each of the brush cleaning means comprising;

a pair of rotary brushes arranged in parallel one above the other,

guides for guiding the disk-shaped objects during cleaning, said guides being arranged perpendicular to axes of the rotary brushes and adjacent the rotary brushes, and

a stopper means for blocking movement of the disk-shaped objects and releasing the disk-shaped objects for movement along a transportation direction, the stopper means being located at a distance from the brush cleaning means along the transportation direction and perpendicularly to the axes of the rotary brushes, said stopper means including a pair of stopper rods, a spacing between said pair of stopper rods being adjustable, whereby the disk-shaped objects are advanced along the transportation direction at a speed which speed is controlled by adjusting a rate of change in magnitude of the spacing of the stopper rods.

10. A cleaning system for disk-shaped objects as defined in claim 9, further comprising an auxiliary stopper means for blocking movement of the disk-shaped objects and releasing the disk-shaped objects for movement along the transportation direction, said auxiliary stopper means being located at a distance from at least one auxiliary brush cleaning means in the transportation direction of the objects.

11. A cleaning system for disk-shaped objects comprising:

a carrier for accommodating disk-shaped objects therein;

a loader mechanism for loading the disk-shaped objects one by one from the carrier to brush cleaning sections of the cleaning system in which the disk-shaped objects are cleaned, said brush cleaning sections being directly located next to the loader mechanism;

rinse sections for rinsing disk-shaped objects cleaned in the brush cleaning sections;

drying sections for drying disk-shaped objects rinsed in the rinse sections;

an unloader mechanism for receiving the disk-shaped objects from the drying section and placing said disk-shaped objects into another carrier;

a disk-shaped object transportation belt mechanism for transporting the disk-shaped objects between the brash cleaning sections, the rinse sections, and the drying sections, wherein each of the brash cleaning sections comprises;

a plurality of brash cleaning means for transporting and cleaning disk-shaped objects one by one between pairs of brushes, each of the brush cleaning means comprising;

a pair of rotary brushes arranged in parallel one above the other,

guides for guiding the disk-shaped objects during cleaning, said guides being arranged perpendicular to axes of the rotary brushes and adjacent the rotary brushes, and

a stopper means for blocking movement of the disk-shaped objects and releasing the disk-shaped objects for movement along a transportation direction, the stopper means being located at a distance from the brash cleaning means along the transportation direction and perpendicularly to the axes of the rotary brushes, said stopper means including a pair of stopper rods, a spacing between said pair of stopper rods being adjustable, whereby the disk-shaped objects are advanced along the transportation direction at a speed which speed is controlled by adjusting a rate of change in magnitude of the spacing of the stopper rods; and

at least one auxiliary brash cleaning means for cleaning a leading tip of each disk-shaped object, said at least one auxiliary brash cleaning means including a pair of auxiliary rotary brushes arranged in parallel one above the other and located at a distance from the stopper means along the transportation direction of the disk-shaped objects.

12. A cleaning system for disk-shaped objects as defined in claim 11, further comprising an auxiliary stopper means for blocking movement of the disk-shaped objects and releasing the disk-shaped objects for movement along the transportation direction, said auxiliary stopper means being located at a distance from at least one auxiliary brush cleaning means in the transportation direction of the disk shaped objects.

13. A cleaning system for disk-shaped objects comprising:

a carrier for accommodating disk-shaped objects therein;

a loader mechanism for loading the disk-shaped objects one by one from the carrier to brush cleaning sections of the cleaning system in which the disk-shaped objects are cleaned, said brush cleaning sections being directly located next to the loader mechanism;

rinse sections for rinsing disk-shaped objects cleaned in the brush cleaning sections;

drying sections for drying disk-shaped objects rinsed in the rinse sections;

an unloader mechanism for receiving the disk-shaped objects from the drying section and placing said disk-shaped objects into another carrier;

a disk-shaped object transportation belt mechanism for transporting the disk-shaped objects between the brush cleaning sections, the rinse sections, and the drying sections, wherein each of the brush cleaning sections comprises;

a plurality of brush cleaning means for transporting and cleaning disk-shaped objects one by one between pairs of brushes, each of the brush cleaning means comprising;

a pair of rotary brushes arranged in parallel one above the other,

disk-shaped object guides for guiding the disk-shaped objects during cleaning, said disk-shaped object guides being arranged perpendicular to axes of the rotary brushes and adjacent the rotary brushes, and

a stopper means for blocking movement of the disk-shaped objects and releasing the disk-shaped objects for movement along a transportation direction, the stopper means being located at a distance from the brush cleaning means along the transportation direction and perpendicularly to the axes of the rotary brushes, said stopper means including a pair of stopper rods, a spacing between said pair of stopper rods being adjustable, whereby the disk-shaped objects are advanced along the transportation direction at a speed which speed is controlled by adjusting a rate of change in magnitude of the spacing of the stopper rods; and

an auxiliary stopper means for blocking movement of the disk-shaped objects and releasing the disk-shaped objects for movement along the transportation direction, said auxiliary stopper means being located at a distance from the at least one auxiliary brush cleaning means along the transportation direction of the disk-shaped objects.

14. A cleaning system for disk-shaped objects as defined in claim 13, wherein said auxiliary stopper means comprising a pair of auxiliary stopper rods, a spacing between said pair of auxiliary stopper rods being adjustable, whereby a disk-shaped object is stopped in place when the space between the pair of the stopper rods is smaller than the diameter of the disk-shaped object, the disk-shaped object is slowly moved forward as the spaced between the pair of stopper rods is slowly increased, and the disk-shaped object is moved out of the apparatus when the space between the pair of stopper rods is larger the diameter of the disk-shaped object.

15. A cleaning system for disk-shaped objects comprising:

a carrier for accommodating disk-shaped objects therein;

a loader mechanism for loading the disk-shaped objects one by one from the carrier to brush cleaning sections of the cleaning system in which the disk-shaped objects are cleaned, said brush cleaning sections being directly located next to the loader mechanism;

rinse sections for rinsing disk-shaped objects cleaned in the brush cleaning sections;

drying sections for drying disk-shaped objects rinsed in the rinse sections;

an unloader mechanism for receiving the disk-shaped objects from the drying section and placing said disk-shaped objects into another carrier; and

a disk-shaped object transportation belt mechanism for transporting the disk-shaped objects between the brush cleaning sections, the rinse sections, and the drying sections, wherein each of the brush cleaning sections comprises a plurality of brush cleaning means for transporting and cleaning disk-shaped objects one by one between pairs of brushes, each of the brush cleaning means comprising;

a pair of rotary brushes arranged in parallel one above the other,

disk-shaped object guides for guiding the disk-shaped objects during cleaning, said disk-shaped object guides being arranged perpendicular to axes of the rotary brushes and adjacent the rotary brushes, and

a stopper means for blocking movement of the disk-shaped objects and releasing the disk-shaped objects for movement along a transportation direction, the stopper means being located at a distance from the brush cleaning means alone the transportation direction and perpendicularly to the axes of the rotary brushes, said stopper means including a pair of stopper rods, a spacing between said pair of stopper rods being adjustable, whereby the disk-shaped objects are advanced along the transportation direction at a speed which speed is controlled by adjusting a rate of change in magnitude of the spacing of the stopper rods; and

an auxiliary stopper means for blocking movement of the disk-shaped objects and releasing the disk-shaped objects for movement along the transportation direction, said auxiliary stopper means being located at a distance from at least one auxiliary brush cleaning means in the transportation direction of the disk shaped objects, said auxiliary stopper means comprising a pair of auxiliary stopper rods, a spacing between said pair of auxiliary stopper rods being adjustable, whereby a disk-shaped object is stopped in place when the space between the pair of the stopper rods is smaller than the diameter of the disk-shaped object, the disk-shaped object is slowly moved forward as the spaced between the pair of stopper rods is slowly increased, and the disk-shaped object is moved out of the apparatus when the space between the pair of stopper rods is larger the diameter of the disk-shaped object.