Flow control valve

• US 5,582,208 A
• Filed: 10/05/1995
• Issued: 12/10/1996
• Est. Priority Date: 10/06/1994
• Status: Expired due to Term

• Current Assignee: MKS Japan, Inc. (MKS Instruments Incorporated)
• Original Assignee: MKS Japan, Inc. (MKS Instruments Incorporated)
• Inventors: Suzuki, Isao
• Primary Examiner(s): Fox, John C.
• Application Number:
  US08/539,744
• Time in Patent Office: 432 Days
• Field of Search: 137/625.29, 137/625.33
• US Class Current: 137/625.33
• CPC Class Codes: F16K 1/34 Cutting-off parts, e.g. valve members, seats F16K1/06, F16K1/12, F16K1/14, F16K1/26 take precedence
• CPC Class Codes: F16K 31/007 Piezoelectric stacks
• CPC Class Codes: Y10T 137/86726 Valve with bypass connections
• CPC Class Codes: Y10T 137/86759 Reciprocating

Abstract

A flow control valve of the present invention includes a valve member mounted in a valve chamber having an inlet port, through which a fluid flows into the valve chamber, and an outlet port through which the fluid flows out of the valve chamber, the valve member being slidable in the valve chamber in response to a driving force applied from an actuator, and a valve seat member mounted in the valve chamber in opposed relation to the valve member, the valve seat member cooperating with the valve member to control a rate of flow of the fluid. The valve seat member has at least a first hole formed therein and extending in a direction of driving of the valve member, a second hole formed therein and extending from an outer peripheral surface thereof and a third hole which is separated from the first hole and extends from its surface facing the valve member to said second hole in a direction of driving of the valve member, the second hole extending in a direction substantially perpendicular to the direction of driving of the valve member. A gap is provided in the valve chamber, so that when the valve member is disengaged from the valve seat member, there are formed a first flow passage, through which the fluid flows from the inlet port to the outlet port via the first holes, and a second flow passage through which the fluid flows from the inlet port to the outlet port via the first, the second and the third holes.

Claims

1. A flow control valve comprising:

a valve member mounted in a valve chamber having an inlet port, through which a fluid flows into said valve chamber, and an outlet port through which the fluid flows out of said valve chamber, said valve member being slidable in said valve chamber in response to a driving force applied from an actuator; and

a valve seat member mounted in said valve chamber in opposed relation to said valve member, said valve seat member cooperating with said valve member to control a rate of flow of the fluid;

wherein said valve seat member has at least a first hole formed therethrough and extending in a direction of driving of said valve member, at least a second hole formed therein and extending from an outer peripheral surface thereof, and a third hole which is separated from said first hole and extends from its surface facing said valve member to said second hole in a direction of driving of said valve member, said second hole extending in a direction substantially perpendicular to the direction of driving of said valve member; and

wherein a gap is provided in said valve chamber, so that when said valve member is disengaged from said valve seat member, there are formed a first flow passage, through which the fluid flows from said inlet port to said outlet port via said first hole, and a second flow passage through which the fluid flows from said inlet port to said outlet port via said first, third and second holes.

2. A flow control valve according to claim 1, in which projections are formed on the opposing surfaces of said valve member and/or said valve seat member, said projection interrupting the communication between said first hole and said third hole in a closed condition of said valve.

3. A flow control valve according to claim 1, in which the surface of said valve member facing said valve seat member is flat, and said projections are provided on the surface of said valve seat member facing said valve member.

4. A flow control valve according to claim 1, in which there is provided a diaphragm member which includes a diaphragm portion disposed at an actuator side, and a side wall extending from an outer peripheral portion of said diaphragm portion, said valve chamber being formed by an internal space of said diaphragm member.

5. A flow control valve according to claim 1, in which said outlet port is provided in a direction substantially perpendicular to the direction of driving of said valve member.