Planar magnetic element

• US 5,583,474 A
• Filed: 05/25/1994
• Issued: 12/10/1996
• Est. Priority Date: 05/31/1990
• Status: Expired due to Term

• Current Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Original Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Inventors: Tomita, Hiroshi, Sahashi, Masashi, Sato, Toshiro, Sawabe, Atsuhito, Mizoguchi, Tetsuhiko, Hasegawa, Michio
• Primary Examiner(s): Kozma, Thomas J.
• Application Number:
  US08/248,679
• Time in Patent Office: 930 Days
• Field of Search: 336/83, 336/212, 336/218, 336/232, 336/233, 336/234, 336/200
• US Class Current: 336/83
• CPC Class Codes: H01F 17/0006 Printed inductances printed coils for dynamo-electric machines H02K3/26; printed circuits H05K
• CPC Class Codes: H01F 2017/0066 with a magnetic layer
• CPC Class Codes: H01F 2017/0086 on semiconductor substrate
• CPC Class Codes: Y10T 29/4902 Electromagnet, transformer or inductor

Abstract

Disclosed herein is a planar magnetic element comprising a substrate, a first magnetic layer arranged over the substrate, a first insulation layer arranged over the first magnetic layer, a planer coil formed of a conductor, having a plurality of turns, arranged over the first insulation layer and having a gap aspect ratio of at least 1, the gap aspect ratio being the ratio of the thickness of the conductor to the gap between any adjacent two of the turns, a second insulation layer arranged over the planar coil, and a second magnetic layer arranged over the second insulation layer. When used as an inductor, the planar magnetic element has a great quality coefficient Q. When used as a transformer, it has a large gain and a high voltage ratio. Since the element is small and thin, it is suitable for use in an integrated circuit, and can greatly contribute to miniaturization of electronic devices.

Claims

1. A planar magnetic element comprising:

a substrate;

a first magnetic layer arranged over said substrate;

a first insulation layer arranged over said first magnetic layer;

a planar rectangular spiral coil formed of a conductor, having a plurality of turns, arranged over said first insulation layer and having a gap aspect ratio greater than or equal to 1, said gap aspect ratio being the ratio of the thickness of said conductor to the gap between any adjacent two of said turns, wherein one pair of opposing sides of said planar rectangular spiral coil has a length which is greater than that of the other pair of opposing sides of said planar rectangular spiral coil;

a second insulated layer arranged over said planar rectangular spiral coil; and

a second magnetic layer arranged over said second insulation layer,

wherein said planar rectangular spiral coil generates a magnetic field, and said first and second magnetic layers have a single-axis magnetic anisotropy, and the axis of easy magnetization of each of said first and second magnetic layers is parallel to said pair of opposing sides of said planar rectangular spiral coil having the greater length.

2. The planar magnetic element according to claim 1, wherein each of said first and second magnetic layers comprises four triangular magnetic members arranged with apices contacting each other, each triangular magnetic member has a uniaxial magnetic anisotropy, the axis of which extends parallel to the base.

3. The planar magnetic element according to claim 1, wherein said first and second magnetic layers cover a portion of said conductor which is parallel to an easy magnetization axis of said first and second magnetic layers.

5. The planar magnetic element according to claim 1, further comprising a passive element formed on said substrate.

6. The planar magnetic element according to claim 2, further comprising an active element formed on said substrate.

7. The planar magnetic element according to claim 2, further comprising a passive element formed on said substrate.

8. A planar magnetic element comprising:

a substrate;

a first magnetic layer arranged over said substrate;

a first insulation layer arranged over said first magnetic layer;

a planar rectangular spiral coil formed of a conductor, having a plurality of turns, arranged over said first insulation layer, wherein one pair of opposing sides of said planar rectangular spiral coil has a length which is greater than that of the other pair of opposing sides of said planar rectangular spiral coil;

a second insulated layer arranged over said planar rectangular spiral coil; and

a second magnetic layer arranged over said second insulation layer,

wherein said planar rectangular coil generates a magnetic field, and said first and second magnetic layers have a single-axis magnetic anisotropy, and the axis of easy magnetization of each of said first and second magnetic layers is parallel to said pair of opposing sides of said planar rectangular spiral coil having the greater length.

13. The planar magnetic element according to claim 8, wherein opposite ends of said planar coil protrude from said first and second magnetic layers.

14. The planar magnetic element according to claim 8, including at least a second rectangular coil wherein said planar rectangular coil and said at least second rectangular coil are arranged such that shorter sides of said rectangular coils are adjacent to each other.

15. A planar magnetic element according to claim 8 including at least a second planar rectangular coil wherein said planar rectangular coil and said at least second planar rectangular coil are arranged such that longer sides of the rectangular coils are adjacent to each other.

16. The planar magnetic element according to claim 8 including at least a second coil wherein said planar rectangular coil and said at least second coil are arranged adjacent to each other and are wound such that magnetic fields generated by said coils have directions opposite to each other.

17. The planar magnetic element according to claim 8 including at least a second coil wherein said planar rectangular coil and said at least second coil are arranged adjacent to each other and are wound such that magnetic fields generated by said coils have the same direction.

9. A planar magnetic element comprising:

a substrate;

a first magnetic layer arranged over said substrate;

a first insulation layer arranged over said first magnetic layer;

a planar rectangular spiral coil formed of a conductor, having a plurality of turns, arranged over said first insulation layer and having a gap aspect ratio of at least 1, said gap aspect ratio being the ratio of the thickness of said conductor to the gap between any adjacent two of said turns;

a second insulated layer arranged over said planar coil; and

a second magnetic layer arranged over said second insulation layer, wherein

said planar coil is a rectangular spiral coil having longer and shorter sides and has an axis parallel to longer sides aligned with axes of easy magnetization of said first and second magnetic layers.

4. The planar magnetic element according to claim 11, further comprising an active element formed on said substrate.

10. The planar magnetic element according to claim 9, wherein opposite ends of said planar coil protrude from said first and second magnetic layers.

11. The planar magnetic element according to claim 9, further comprising means for shielding magnetic fluxes leaking from said planar coil.

12. A planar magnetic element comprising:

a substrate;

a first magnetic layer arranged over said substrate;

a first insulation layer arranged over said first magnetic layer;

a planar coil formed of a conductor, having a plurality of turns, arranged over said first insulation layer and having a gap aspect ratio of at least 1, said gap aspect ratio being the ratio of the thickness of said conductor to the gap between any adjacent two of said turns;

a second insulation layer arranged over said planar coil; and

a second magnetic layer arranged over said second insulation layer, said planar coil generating a magnetic field, and first and second magnetic layers having a uniaxial magnetic anisotropy, the axes of which extends are right angles to the axis of the magnetic field, wherein said planar coil consists of a plurality of rectangular spiral coils, wherein each of said plurality of rectangular spiral coils has longer and shorter sides and has a first axis which is parallel to said longer sides and which is aligned with axes of easy magnetization of said first and second magnetic layers and wherein each of said plurality of rectangular spiral coils has a second axis which is parallel to said shorter sides and wherein each of the second axis of said plurality of rectangular spiral coils are aligned with one another.