Multi-level digital micromirror device
First Claim
1. A method of fabricating an array of rotatable elements, each said element individually rotatable into at least two states, said method comprising the steps of:
- providing a substrate for supporting all of said elements in said array;
constructing a supporting structure between said substrate and said elements, comprising at least two hinges, and at least one hinge yoke, said hinges connecting said substrate and said hinge yoke, said hinge yoke connected to said elements;
maintaining said elements in a plane separate from the plane of said substrate and said hinge yoke, wherein when said elements are rotated, said hinge yoke rotates with said elements and limits the rotation of said elements by contacting said substrate.
1 Assignment
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Accused Products
Abstract
An improved hidden hinge digital micromirror device, and method of making the same, having hinges 424 attached to a yoke 428 which limits the rotation of the device mirror 430. In one embodiment, the mirror 430 is supported by a center support post 416 attached to two torsion hinges 424 by a landing hinge yoke 428. The ends of the torsion hinges 424 are attached to two support posts 426 which hold the hinges 424 above the substrate 400 and allow the hinges 424 to twist in a torsional fashion. The device is fabricated using two sacrificial spacer layers 404, 414 which are removed to allow the mirror 430 to rotate.
643 Citations
38 Claims
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1. A method of fabricating an array of rotatable elements, each said element individually rotatable into at least two states, said method comprising the steps of:
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providing a substrate for supporting all of said elements in said array; constructing a supporting structure between said substrate and said elements, comprising at least two hinges, and at least one hinge yoke, said hinges connecting said substrate and said hinge yoke, said hinge yoke connected to said elements; maintaining said elements in a plane separate from the plane of said substrate and said hinge yoke, wherein when said elements are rotated, said hinge yoke rotates with said elements and limits the rotation of said elements by contacting said substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A digital micromirror device comprising:
- a substrate;
at least one mirror element; at least one hinge yoke connected to said at least one mirror element; at least two hinges between said substrate and said hinge yoke, said hinges supporting said at least one mirror element and allowing said at least one mirror element to rotate relative to said substrate, wherein said hinge yoke limits said rotation of said at least one mirror element. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
- a substrate;
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21. A digital micromirror device comprising:
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a substrate; at least one mirror element; at least one hinge yoke connected to said at least one mirror element; at least two hinges disposed along a hinge axis, said hinges supporting said at least one mirror element away from said substrate and allowing said at least one mirror element to rotate about said hinge axis; at least one landing electrode disposed between said at least one mirror element and said substrate, wherein said hinge yoke limits said rotation of said at least one mirror element; and at least one address electrode disposed between said at least one mirror element and said substrate such that said at least one landing electrode is between said at least one address electrode and said hinge axis. - View Dependent Claims (22, 23, 24, 25, 26, 27)
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28. A method of fabricating a digital mirror device comprising:
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providing a substrate, said substrate including address circuitry; depositing a first spacer layer on said substrate, said first spacer layer patterned to define hinge support posts and address electrode support posts; constructing said hinge support posts; constructing said address electrode support posts; establishing deformable torsion hinges on said first spacer layer, wherein said deformable hinges are connected to said hinge support posts and to a hinge yoke; establishing address electrodes on said first spacer layer, said address electrodes connected to said address electrode support posts; depositing a second spacer layer on said substrate, said second spacer layer patterned to define mirror support posts on said hinge yoke; establishing a plurality of mirrors on said second spacer layer, said mirrors connected to said mirror support posts; and removing said first and second spacer layers, wherein said mirrors may rotate by deforming said hinges, said hinge yoke for limiting the rotation of said mirrors.
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29. A digital micromirror device comprising:
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a substrate; an array of mirror elements; a plurality of hinge yokes, at least one of said hinge yokes connected to each of said mirror elements in said array of mirror elements; a plurality of hinges, each of said hinges connected between said substrate and one of said hinge yokes, each of said hinges supporting one of said mirror elements in said may of mirror elements and allowing said mirror elements to rotate relative to said substrate wherein said hinge yokes limit said rotation of said mirror elements in said array of mirror elements. - View Dependent Claims (30, 31, 32, 33, 34, 35, 36, 37, 38)
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Specification