Continuous linear scan laminography system and method

• US 5,583,904 A
• Filed: 04/11/1995
• Issued: 12/10/1996
• Est. Priority Date: 04/11/1995
• Status: Expired due to Term

• Current Assignee: Keysight Technologies, Inc.
• Original Assignee: Hewlett-Packard Company (HP Inc.)
• Inventors: Adams, John A.
• Primary Examiner(s): Porta, David P.
• Application Number:
  US08/419,794
• Time in Patent Office: 609 Days
• Field of Search: 378/17, 378/19, 378/21-27, 378/98.8, 378/62, 378/146, 378/57
• US Class Current: 378/22
• CPC Class Codes: G01N 2223/419 computed tomograph
• CPC Class Codes: G01N 23/044 using laminography or tomosynthesis
• CPC Class Codes: G01N 23/046 using tomography, e.g. computed tomography [CT]

Abstract

An improved laminography system that allows generation of high speed and high resolution X-ray laminographs by using a continuous scan method with two or more linear detectors and one or more collimated X-ray sources. Discrete X-ray images, with different viewing angles, are generated by each detector. The discrete X-ray images are then combined by a computer to generate laminographic images of different planes in the object under test, or analyzed in such a manner to derive useful data about the object under test. In one embodiment, the improved scanning laminography system does not require any motion of the source or detectors, but simply a coordinated linear motion of the object under test. Higher speed is achieved over conventional laminography systems due to the continuous nature of the scan, and due to the ability to generate any plane of data in the object under test without having to re image the object.

Claims

1. An imaging system comprising:

a first X-ray source positioned on a first side of a longitudinal axis of the imaging system;

a first linear X-ray detector positioned to intercept X-rays emitted by said first X-ray source at a first angle;

a second linear X-ray detector positioned to intercept X-rays emitted by said first X-ray source at a second angle;

a second X-ray source laterally positioned with respect to said first X-ray source on a second side of said imaging system longitudinal axis opposite said first side of said imaging system longitudinal axis;

a third linear X-ray detector positioned to intercept X-rays emitted by said second X-ray source at a third angle;

a fourth linear X-ray detector positioned to intercept X-rays emitted by said second X-ray source at a fourth angle;

a linear motion system positioned between said first and second X-ray source, and said first, second, third and fourth linear X-ray detectors, said linear motion system further having a support for an object under test, said linear motion system configured to transport said object under test along said imaging system longitudinal axis through said X-rays emitted at said first angle and said second angle and detected by said first linear X-ray detector and said second linear X-ray detector, respectively, and through said X-rays emitted at said third angle and said fourth angle and detected by said third linear X-ray detector and said fourth linear X-ray detector, respectively, after having passed through said object under test, thereby forming first, second, third and fourth shadowgraph images of said object under test; and

a control system connected to said linear motion system and said first, second, third and fourth linear X-ray detectors, wherein said control system regulates said linear motion system and the formation of said first, second, third and fourth shadowgraph images to produce a laminographic cross sectional image of a cutting plane of said object under test.

2. An imaging system as defined in claim 1 further comprising a first collimator positioned with respect to said first X-ray source such that said first collimator is configured to direct X-rays emitted by said first X-ray source toward said first linear X-ray detector and to block X-rays travelling in other directions.

3. An imaging system as defined in claim 2 further comprising a second collimator positioned with respect to said first X-ray source such that said second collimator is configured to direct X-rays emitted by said first X-ray source toward said second linear X-ray detector and to block X-rays travelling in other directions.

4. An imaging system as defined in claim 1 further comprising a third collimator positioned with respect to said second X-ray source such that said third collimator is configured to direct X-rays emitted by said second X-ray source toward said third linear X-ray detector and to block X-rays travelling in other directions.

5. An imaging system as defined in claim 4 further comprising a fourth collimator positioned with respect to said second X-ray source such that said fourth collimator is configured to direct X-rays emitted by said second X-ray source toward said fourth linear X-ray detector and to block X-rays travelling in other directions.

6. An imaging system as defined in claim 1 wherein said first, second, third and fourth linear X-ray detectors further comprise monolithic, self-scanning, linear, photodiode arrays.

7. An imaging system as defined in claim 6 further comprising an X-ray scintillation material deposited on said first, second, third and fourth linear photodiode array X-ray detectors.

8. An imaging system as defined in claim 7 wherein said X-ray scintillation material further comprises gadolinium oxysulfide.

9. An imaging system as defined in claim 1 wherein said linear motion system comprises a conveyor belt.

10. An apparatus for producing cross sectional images of a cutting plane within an object comprising:

a linear motion system having a longitudinal axis, said linear motion system adapted to support and transport an object under test along a substantially linear path;

a first source of X-rays for producing X-rays, said first source of X-rays positioned on a first side of said linear motion system longitudinal axis such that said X-rays produced by said first X-ray source impinge upon a first surface of said object and scan said object as said linear transport system moves said object along said linear path;

a first linear X-ray detector comprising a plurality of X-ray detector elements positioned adjacently in a substantially linear fashion, said first linear X-ray detector positioned adjacent a second surface of said object substantially opposite said first surface, said first linear X-ray detector thereby intercepting and detecting X-rays which enter said object through said first surface and exit said object through said second surface, said first linear X-ray detector positioned at a first angle with respect to said first source of X-rays;

a first linear X-ray detector readout control system, said first linear X-ray detector readout control system further having a clock which controls the periodic reading and storing of signals produced by said plurality of X-ray detector elements;

a second linear X-ray detector positioned a distance away from said first linear X-ray detector, said second linear X-ray detector comprising a plurality of X-ray detector elements positioned adjacently in a substantially linear fashion, said second linear X-ray detector positioned adjacent said second surface of said object substantially opposite said first surface, said second linear X-ray detector thereby intercepting and detecting X-rays which enter said object through said first surface and exit said object through said second surface, said second linear X-ray detector positioned at a second angle with respect to said first source of X-rays;

a second linear X-ray detector readout control system, said second linear X-ray detector readout control system further having a clock which controls the periodic reading and storing of signals produced by said plurality of X-ray detector elements;

a second source of X-rays laterally positioned with respect to said first source of X-rays on a second side of said linear motion system longitudinal axis opposite said first side of said linear motion system longitudinal axis;

a third linear X-ray detector positioned to intercept X-rays emitted by said second source of X-rays at a third angle, wherein said third linear X-ray detector comprises a plurality of X-ray detector elements positioned adjacently in a substantially linear fashion, said third linear X-ray detector positioned adjacent said second surface of said object substantially opposite said first surface, said third linear X-ray detector thereby intercepting and detecting X-rays which enter said object through said first surface and exit said object through said second surface, said third linear X-ray detector positioned at a third angle with respect to said second source of X-rays;

a third linear X-ray detector readout control system, said third linear X-ray detector readout control system further having a clock which controls the periodic reading and storing of signals produced by said plurality of X-ray detector elements;

a fourth linear X-ray detector positioned to intercept X-rays emitted by said second source of X-rays at a fourth angle, wherein said fourth linear X-ray detector comprises a plurality of X-ray detector elements positioned adjacently in a substantially linear fashion, said fourth linear X-ray detector positioned adjacent said second surface of said object substantially opposite said first surface, said fourth linear X-ray detector thereby intercepting and detecting X-rays which enter said object through said first surface and exit said object through said second surface, said fourth linear X-ray detector positioned at a fourth angle with respect to said second source of X-rays;

a fourth linear X-ray detector readout control system, said fourth linear X-ray detector readout control system further having a clock which controls the periodic reading and storing of signals produced by said plurality of X-ray detector elements;

a control system which controls and coordinates the operation of said linear motion system and said first, second, third and fourth linear X-ray detector readout control systems such that said first linear X-ray detector produces a first X-ray shadowgraph image of said object, said second linear X-ray detector produces a second X-ray shadowgraph image of said object, said third linear X-ray detector produces a third X-ray shadowgraph image of said object and said fourth linear X-ray detector produces a fourth X-ray shadowgraph image of said object; and

an image analysis system which receives said first, second, third and fourth X-ray shadowgraph images of said object and combines said first, second, third and fourth X-ray shadowgraph images of said object to form a cross sectional image of a cutting plane of said object.

11. An apparatus as defined in claim 10 further comprising a first collimator positioned with respect to said first source of X-rays such that said first collimator is configured to direct X-rays emitted by said first source of X-rays toward said first linear X-ray detector and to block X-rays travelling in other directions.

12. An apparatus as defined in claim 11 further comprising a second collimator positioned with respect to said first source of X-rays such that said second collimator is configured to direct X-rays emitted by said first source of X-rays toward said second linear X-ray detector and to block X-rays travelling in other directions.

13. An apparatus as defined in claim 10 further comprising a third collimator positioned with respect to said second source of X-rays such that said third collimator is configured to direct X-rays emitted by said second source of X-rays toward said third linear X-ray detector and to block X-rays travelling in other directions.

14. An apparatus as defined in claim 13 further comprising a fourth collimator positioned with respect to said second source of X-rays such that said fourth collimator is configured to direct X-rays emitted by said second source of X-rays toward said fourth linear X-ray detector and to block X-rays travelling in other directions.

15. An apparatus as defined in claim 10 wherein said first, second, third and fourth linear X-ray detectors further comprise monolithic, self-scanning, linear, photodiode arrays.

16. An apparatus as defined in claim 15 further comprising an X-ray scintillation material deposited on said first, second, third and fourth linear photodiode array X-ray detectors.

17. An apparatus as defined in claim 16 wherein said X-ray scintillation material further comprises gadolinium oxysulfide.

18. An apparatus as defined in claim 10 wherein said linear motion system comprises a conveyor belt.

19. A method of producing a cross sectional image of an object comprising the steps of:

providing a first source of X-rays positioned on a first side of a linear motion system longitudinal axis;

detecting X-rays produced by said first source of X-rays with a first linear X-ray detector after said X-rays have impinged upon and penetrated said object from a first angular orientation;

detecting X-rays produced by said first source of X-rays with a second linear X-ray detector after said X-rays have impinged upon and penetrated said object from a second angular orientation;

providing a second source of X-rays laterally positioned with respect to said first source of X-rays on a second side of said linear motion system longitudinal axis;

detecting X-rays produced by said second source of X-rays with a third linear X-ray detector after said X-rays have impinged upon and penetrated said object from a third angular orientation;

detecting X-rays produced by said second source of X-rays with a fourth linear X-ray detector after said X-rays have impinged upon and penetrated said object from a fourth angular orientation;

moving said object between said first and second sources of X-rays and said first, second, third and fourth linear X-ray detectors along a substantially linear path which is substantially parallel to said linear motion system longitudinal axis;

producing a first X-ray shadowgraph image of said object with said X-rays detected by said first linear X-ray detector as said object traverses said substantially linear path between said first source of X-rays and said first linear X-ray detector;

producing a second X-ray shadowgraph image of said object with said X-rays detected by said second linear X-ray detector as said object traverses said substantially linear path between said first source of X-rays and said second linear X-ray detector;

producing a third X-ray shadowgraph image of said object with said X-rays detected by said third linear X-ray detector as said object traverses said substantially linear path between said second source of X-rays and said third linear X-ray detector;

producing a fourth X-ray shadowgraph image of said object with said X-rays detected by said fourth linear X-ray detector as said object traverses said substantially linear path between said second source of X-rays and said fourth linear X-ray detector; and

combining said first, second, third and fourth X-ray shadowgraph images of said object to form a cross sectional image of said object.

20. A method as defined in claim 19 further comprising the step of collimating said first source of X-rays with a first collimator configured to direct X-rays emitted by said first source of X-rays toward said first linear X-ray detector and to block X-rays travelling in other directions.

21. A method as defined in claim 20 further comprising the step of collimating said first source of X-rays with a second collimator configured to direct X-rays emitted by said first source of X-rays toward said second linear X-ray detector and to block X-rays travelling in other directions.

22. A method as defined in claim 19 further comprising the step of collimating said second source of X-rays with a third collimator configured to direct X-rays emitted by said second source of X-rays toward said third linear X-ray detector and to block X-rays travelling in other directions.

23. A method as defined in claim 19 further comprising the step of collimating said second source of X-rays with a fourth collimator configured to direct X-rays emitted by said second source of X-rays toward said fourth linear X-ray detector and to block X-rays travelling in other directions.

24. A method as defined in claim 19 wherein said steps of detecting X-rays with said first, second, third and fourth linear X-ray detectors further comprise the step of providing monolithic, self-scanning, linear, photodiode arrays.

25. A method as defined in claim 24 further comprising the step of depositing an X-ray scintillation material on said first, second, third and fourth linear photodiode arrays.

26. A method as defined in claim 25 further comprising the step of selecting gadolinium oxysulfide as said X-ray scintillation material.

28. An imaging system as defined in claim 25 further comprising a first collimator positioned with respect to said first X-ray source such that said first collimator is configured to direct X-rays emitted by said first X-ray source toward said first linear X-ray detector and to block X-rays travelling in other directions.

29. An imaging system as defined in claim 28 further comprising a second collimator positioned with respect to said first X-ray source such that said second collimator is configured to direct X-rays emitted by said first X-ray source toward said second linear X-ray detector and to block X-rays travelling in other directions.

27. An imaging system comprising:

a first X-ray source positioned on a first side of a longitudinal axis of the imaging system;

a second X-ray source positioned on a second side of said longitudinal axis of the imaging system;

a first linear X-ray detector positioned to intercept X-rays emitted by said first X-ray source at a first angle;

a second linear X-ray detector positioned to intercept X-rays emitted by said first X-ray source at a second angle;

a third linear X-ray detector positioned to intercept X-rays emitted by said second X-ray source at a third angle;

a fourth linear X-ray detector positioned to intercept X-rays emitted by said second X-ray source at a fourth angle;

a linear motion system to which said first and second X-ray sources and said first, second, third and fourth linear X-ray detectors are mounted, said linear motion system further having a path for a stationary object under test to pass, said linear motion system configured to transport said first and second X-ray sources and said first, second, third and fourth linear X-ray detectors past said stationary object under test such that said X-rays emitted at said first, second, third and fourth angles and detected by said first, second, third and fourth linear X-ray detectors, respectively, after having passed through said stationary object under test, thereby form a first shadowgraph image, a second shadowgraph image, a third shadowgraph image and a fourth shadowgraph image of said stationary object under test; and

a control system connected to said linear motion system and said first, second, third and fourth linear X-ray detectors, wherein said control system regulates said linear motion system and the formation of said first, second, third and fourth shadowgraph images to produce a laminographic cross sectional image of a cutting plane of said stationary object under test.

30. A method of producing a cross sectional image of a stationary object comprising the steps of:

providing a first source of X-rays positioned on a first side of a linear motion system longitudinal axis;

detecting X-rays produced by said first source of X-rays with a first linear X-ray detector after said X-rays have impinged upon and penetrated said stationary object from a first angular orientation;

detecting X-rays produced by said first source of X-rays with a second linear X-ray detector after said X-rays have impinged upon and penetrated said stationary object from a second angular orientation;

providing a second source of X-rays positioned on a second side of said linear motion system longitudinal axis;

detecting X-rays produced by said second source of X-rays with a third linear X-ray detector after said X-rays have impinged upon and penetrated said stationary object from a third angular orientation;

detecting X-rays produced by said second source of X-rays with a fourth linear X-ray detector after said X-rays have impinged upon and penetrated said stationary object from a fourth angular orientation;

moving said first and second source of X-rays and said first, second, third and fourth linear X-ray detectors along a substantially linear path past said stationary object such that said X-rays from said first and second sources of X-rays penetrate said stationary object and are detected by said first, second, third and fourth linear X-ray detectors;

producing a first X-ray shadowgraph image of said stationary object with said X-rays detected by said first linear X-ray detector as said first linear X-ray detector and said first source of X-rays traverse said substantially linear path past said stationary object;

producing a second X-ray shadowgraph image of said stationary object with said X-rays detected by said second linear X-ray detector as said second linear X-ray detector and said first source of X-rays traverse said substantially linear path past said stationary object;

producing a third X-ray shadowgraph image of said stationary object with said X-rays detected by said third linear X-ray detector as said third linear X-ray detector and said second source of X-rays traverse said substantially linear path past said stationary object;

producing a fourth X-ray shadowgraph image of said stationary object with said X-rays detected by said fourth linear X-ray detector as said fourth linear X-ray detector and said second source of X-rays traverse said substantially linear path past said stationary object; and

combining said first, second, third and fourth X-ray shadowgraph images of said stationary object to form a cross sectional image of said stationary object.

31. A method as defined in claim 30 further comprising the step of collimating said first source of X-rays with a first collimator configured to direct X-rays emitted by said first source of X-rays toward said first linear X-ray detector and to block X-rays travelling in other directions.

32. A method as defined in claim 31 further comprising the step of collimating said first source of X-rays with a second collimator configured to direct X-rays emitted by said first source of X-rays toward said second linear X-ray detector and to block X-rays travelling in other directions.

33. A method as defined in claim 30 further comprising the step of collimating said second source of X-rays with a third collimator configured to direct X-rays emitted by said second source of X-rays toward said third linear X-ray detector and to block X-rays travelling in other directions.

34. A method as defined in claim 33 further comprising the step of collimating said second source of X-rays with a fourth collimator configured to direct X-rays emitted by said second source of X-rays toward said fourth linear X-ray detector and to block X-rays travelling in other directions.