Method of making an interferometer-based bolometer

• US 5,584,117 A
• Filed: 12/11/1995
• Issued: 12/17/1996
• Est. Priority Date: 12/11/1995
• Status: Expired due to Term

• Current Assignee: Transpacific IP Group Limited
• Original Assignee: Industrial Technology Research Institute
• Inventors: Chen, Chi-Nan, Lee, Shih-ping
• Primary Examiner(s): ECHOLS, PERCY W
• Application Number:
  US08/570,061
• Time in Patent Office: 372 Days
• Field of Search: 29/620, 29/592.1, 216/16, 250/338.1, 250/353, 338/18, 356/352
• US Class Current: 29/620
• CPC Class Codes: G01J 3/26 using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
• CPC Class Codes: G01J 5/20 using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: H01L 31/09 Devices sensitive to infrared, visible or ultraviolet radiation H01L31/101 takes precedence
• CPC Class Codes: Y10T 29/49002 Electrical device making
• CPC Class Codes: Y10T 29/49099 Coating resistive material on a base

Abstract

An infrared detector device is described. It is based on an infrared analog of the Fabry Perot interferometer, using one curved, fully reflecting, plate and one planar, mainly reflecting, but partially transmitting, plate. The space between these plates behaves as a resonant cavity which can be built to respond to either a broad or a narrow band of wavelengths in the general range between 1 and 15 microns. It is also possible to combine several detectors of different narrow bands in a single device. Actual detection of the radiation is based on use of thin film resistors, having a high thermal coefficient of resistance, that are thermally isolated from the other parts of the structure. Details relating to the manufacture of the devices are given.

Claims

1. A method for manufacturing an infrared radiation detection device comprising:

providing top and bottom plates of silicon, each plate having upper and lower surfaces;

forming a concavity in the lower surface of said top plate and coating said lower surface, including the concavity, with a layer of material that renders said lower surface fully reflective;

roughening the lower surface of said bottom plate;

forming a first layer of silicon oxide on the upper surface of said bottom plate;

coating said first layer of silicon oxide with a layer of material having non-zero transmittance and a reflectance that is slightly less than unity;

depositing a second layer of silicon oxide on said reflecting material then patterning and etching said second layer of silicon oxide into a rectangular shape that is slightly larger than said concavity;

depositing a first layer of silicon nitride then heating said bottom plate to achieve stress relief;

depositing a layer of resistive material on said first layer of silicon nitride and then patterning and etching said resistive layer to form a resistor having two ends;

depositing, patterning, and etching a layer of conductive material to form contact pads to said resistor, one pad for each end of the resistor;

depositing a second layer of silicon nitride for protective purposes;

patterning and etching said first and second layers of silicon nitride to form a support platform for the resistor and supportive legs for said platform;

selectively removing said second layer of silicon oxide, thereby limiting thermal contact to the platform to said supportive legs;

forming support spacers on the upper surface of said bottom plate;

aligning the center of the concavity with the center of the platform and then attaching the lower surface of the top plate to the support spacers thereby forming an enclosure for said concavity and platform; and

evacuating said enclosure and then sealing it under vacuum.

2. The method of claim 1 wherein forming said concavity further comprises:

forming a cylindrically shaped trench by means of electron bombardment; and

isotropically etching said trench so as to remove sharp corners.

3. The method of claim 1 wherein the roughening of the lower surface of said bottom plate is achieved by means of sand blasting to a roughness value between about 10 and 50 microns.

4. The method of claim 1 wherein said first layer of silicon oxide is formed by thermally oxidising the upper surface of said bottom plate.

5. The method of claim 1 wherein said high reflectance, non-zero transmittance material comprises one of gold or molybdenum, or tungsten having a thickness of about 50 nanometers.

6. The method of claim 1 wherein said second layer of silicon oxide is deposited by chemical vapor deposition to a thickness between about 1.8 and 2.5 microns.

7. The method of claim 1 wherein the thickness of said first layer of silicon nitride is between about 2 and about 5 microns.

8. The method of claim 1 wherein said resistive material comprises chromium or titanium oxide.

9. The method of claim 1 wherein the thickness of said second layer of silicon nitride is between about 900 and about 1,100 Angstrom units.

10. The method of claim 1 wherein said spacers comprise an alloy of nickel and iron and are formed by means of electroforming in photoresist moulds.

11. The method of claim 10 wherein said alloy comprises about 37% nickel and about 63% iron.

12. The method of claim 1 wherein the selective removal of said second layer of silicon oxide is achieved by etching with hydrofluoric acid.

13. The method of claim 1 wherein the step of sealing under vacuum is achieved by use of epoxy or glass frit.