Rotation rate sensor with closed ended tuning fork

• US 5,585,561 A
• Filed: 08/11/1994
• Issued: 12/17/1996
• Est. Priority Date: 08/11/1994
• Status: Expired due to Fees

• Current Assignee: BEI Sensors & Systems Company Incorporated (Schneider Electric SE)
• Original Assignee: New SD, Inc.
• Inventors: Bahl, Suneet, Moore, Robert H.
• Primary Examiner(s): Oda, Christine K.
• Application Number:
  US08/289,319
• Time in Patent Office: 859 Days
• Field of Search: 73/505, 73/504, 73/517 AV, 73/504.02, 73/504.12, 73/504.15, 73/504.16, 310/346, 310/370
• US Class Current: 73/504.16
• CPC Class Codes: G01C 19/5607 using vibrating tuning forks double-ended tuning forks using planar vibrating masses suspended at opposite ends G01C19/5719

Abstract

A rotation rate sensor that includes a closed-ended tuning fork which has a drive end base, a pickup end base, and a pair of tines. Each of the tines has a drive end and a pickup end with the drive ends of the tines being joined to the drive end base and the pickup ends of the tines being joined to the pickup end base. The rotation rate sensor also includes a drive circuit for generating a drive signal and drive electrodes disposed on each of the tines for applying the drive signal to the tines. The drive signal causes drive mode vibration of the tines. The drive mode vibration changes orientation when the tuning fork is rotated and causes pickup mode vibration of the tines. The rotation rate sensor further includes pickup electrodes disposed on each of the tines for picking up a pickup signal corresponding to the pickup mode vibration of the tines and a pickup circuit which is responsive to the pickup signal for generating a rate signal corresponding to the rate of rotation of the tuning fork.

Claims

1. A closed-ended tuning fork comprising:

a pair of unframed tines;

a drive end base joined to a drive end of each of the tines; and

a pickup end base joined to a pickup end of each of the tines;

drive end and pickup end suspension systems respectively joined to the drive end and pickup end bases for mounting the tuning fork to an external structure, each of the drive end and pickup end suspension systems including means for reducing temperature related strain on the tuning fork and a bridge joined to a corresponding one of the drive end and pickup end bases and to the strain reducing means;

the tines, the drive end and pickup end bases, and the drive end and pickup end suspension systems all being formed from a single crystal piezoelectric material.

2. A closed-ended tuning fork as recited in claim 1 wherein each of the strain reducing means includes a first cross bar, a mount joined to the first cross bar for mounting to the external structure, a second cross bar joined substantially perpendicular to a corresponding one of the bridges, side bars joined substantially perpendicular to the first and second cross bars.

3. A rotation rate sensor comprising:

a housing;

a closed-ended tuning fork housed by the housing and including a pair of unframed tines, a drive end base connected to a drive end of each of the tines, a pickup end base connected to a pickup end of each of the tines, and drive end and pickup end suspension systems respectively joined to the drive end and pickup end bases and affixed to the housing, each of the drive end and pickup end suspension systems including means affixed to the housing for reducing temperature related strain on the tuning fork and a bridge joined to a corresponding one of the drive end and pickup end bases and to the strain reducing means, the tines, the drive end and pickup end bases, and the drive end and pickup end suspension systems all being formed from a single crystal piezoelectric material;

a drive circuit for generating a drive signal;

a plurality of drive electrodes disposed on each of the tines at the drive end for applying the drive signal to the tines so as to induce drive mode vibration of the tines, the drive mode vibration changing orientation when the tuning fork is rotated at a rate of rotation and causing pickup mode vibration of the tines;

a plurality of pickup electrodes disposed on each of the tines at the pickup end for picking up a pickup signal corresponding to the pickup mode vibration of the tines; and

a pickup circuit, responsive to the pickup signal, for generating a rate signal corresponding to the rate of rotation of the tuning fork.

4. A rotation rate sensor as recited in claim 3 wherein each of the strain reducing means includes a first cross bar, a mount joined to the first cross bar and affixed to the housing, a second cross bar joined substantially perpendicular to a corresponding one of the bridges, and side bars joined substantially perpendicular to the first and second cross bars.

5. A closed-ended tuning fork comprising:

a pair of tines;

a drive end base joined to a drive end of each of said tines; and

a pickup end base joined to a pickup end of each of said tines.

drive end and pickup end suspension systems respectively joined to the drive end and pickup end bases for mounting the tuning fork to an external structure, each of the drive end and pickup end suspension systems including means for reducing temperature related strain on the tuning fork and a bridge joined to a corresponding one of the drive end and pickup end bases and to the strain reducing means.

6. A closed-ended tuning fork as recited in claim 5 wherein each of the strain reducing means includes a first cross bar, a mount joined to the first cross bar for mounting to the external structure, a second cross bar joined substantially perpendicular to a corresponding one of the bridges, and side bars joined substantially perpendicular to the first and second cross bars.

7. A closed-ended tuning fork as recited in claim 5 wherein the tines, the drive end and pickup end bases, and the drive end and pickup end suspension systems are all formed from a single crystal piezoelectric material.

8. A rotation rate sensor comprising:

a housing;

a closed-ended tuning fork housed by the housing and including a pair of tines, a drive end base connected to a drive end of each of the tines, a pickup end base connected to a pickup end of each of the tines, and drive end and pickup end suspension systems affixed to the housing and respectively connected to the drive end and pickup end bases, each of the drive end and pickup end suspension systems including means affixed to the housing for reducing temperature related strain on the tuning fork and a bridge joined to a corresponding one of the drive end and pickup end bases and to the strain reducing means;

a drive circuit for generating a drive signal;

a plurality of drive electrodes disposed on each of the tines for applying the drive signal to the tines so as to induce drive mode vibration of the tines, the drive mode vibration changing orientation when the tuning fork is rotated at a rate rotation and causing pickup mode vibration of the tines;

means for providing a pickup signal corresponding to the pickup mod vibration of the tines; and

a pickup circuit, responsive to the pickup signal, for generating a rate sign corresponding to the rate of rotation of the tuning fork.

9. A rotation rate sensor as recited in claim 8 wherein each of the strain reducing means includes a first cross bar, a mount joined to the first cross bar and affixed to the housing, a second cross bar joined substantially perpendicular to a corresponding one of the bridges, and side bars joined substantially perpendicular to the first and second cross bars.

10. A rotation rate sensor as recited in claim 8 wherein the tines, the drive end and pickup end bases, and the drive end and pickup end suspension systems are all formed from a single crystal piezoelectric material.

11. A rotation rate sensor as recited in claim 10 wherein the tines are unframed.

12. A rotation rate sensor as recited in claim 11 wherein the drive electrodes disposed on each of the tines are disposed at the drive end and the means for providing the pickup signal includes a plurality of pickup electrodes disposed on each of the tines at the pickup end.