Compound semiconductor devices and methods of making compound semiconductor devices

• US 5,585,649 A
• Filed: 03/14/1995
• Issued: 12/17/1996
• Est. Priority Date: 03/15/1994
• Status: Expired due to Term

• Current Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Original Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Inventors: Nishikawa, Yukie, Hatakoshi, Genichi, Parbrook, Peter J., Onomura, Masaaki, Saito, Shinji, Ishikawa, Masayuki
• Primary Examiner(s): MEIER, STEPHEN D
• Application Number:
  US08/404,287
• Time in Patent Office: 644 Days
• Field of Search: 257/94, 257/95, 257/96, 257/15
• US Class Current: 257/94
• CPC Class Codes: H01L 33/145 with a current-blocking structure
• CPC Class Codes: H01L 33/28 containing only elements of Group II and Group VI of the Periodic Table
• CPC Class Codes: H01L 33/32 containing nitrogen
• CPC Class Codes: H01L 33/40 Materials therefor
• CPC Class Codes: H01S 5/2211 based on II-VI materials
• CPC Class Codes: H01S 5/2231 with inner confining structure only between the active layer and the upper electrode
• CPC Class Codes: H01S 5/327 in AIIBVI compounds, e.g. ZnCdSe-laser

Abstract

A compound semiconductor device with an improved internal current blocking structure. The semiconductor device includes an n-clad layer of II-VI compound semiconductor, a p-clad layer of II-VI compound semiconductor, an active layer of II-VI compound semiconductor between the n-clad and p-clad layers, a very thin current blocking layer of n-type II-VI compound semiconductor on the p-clad layer and providing an opening, a p-contact layer of p-type II-VI compound semiconductor on the p-clad layer and the current blocking layer at the opening, and a p-side electrode on the p-contact layer.

Claims

1. A semiconductor device providing a current blocking structure, comprising:

a first semiconductor layer of a first conductive type of one of II-VI compound semiconductors and N-containing III-V compound semiconductors;

a second semiconductor layer of a second conductive type of one of II-VI compound semiconductors and N-containing III-V compound semiconductors on the first semiconductor layer the second semiconductor layer having an aperture for partially leaving a surface of the first semiconductor layer exposed; and

a third layer of the first conductive type semiconductor comprising one of II-VI compound semiconductors and N-containing III-V compound semiconductors on the first semiconductor layer and contacting the second semiconductor layer through the aperture.

2. The semiconductor device according to claim 1, wherein a thickness of the second semiconductor layer is about 700 nm or less.

3. The semiconductor device according to claim 1, wherein a thickness of the second semiconductor layer is from about 100 nm to about 450 nm.

4. The semiconductor device according to claim 1, wherein the first conductive type is p-type and the second conductive type is n-type.

5. The semiconductor device according to claim 1, wherein the first semiconductor layer provides a hollow at a portion covered with the third layer.

6. The semiconductor contact structure according claim 5, wherein the second semiconductor layer has a depression, and the third semiconductor layer contacts the second semiconductor layer at the hollow of the first semiconductor layer.

7. The semiconductor contact structure according to claim 6, wherein the depression and the hollow are coextensive.

9. The semiconductor device according to claim 1, wherein the first semiconductor layer comprises the II-VI compound semiconductor, and the second semiconductor layer comprises the II-VI compound semiconductor, and the third layer comprises the II-VI compound semiconductor.

8. The semiconductor contact structure according to claim 8, wherein the depression and the hollow are formed in a single etching step.

10. A semiconductor laser comprising:

a semiconductor substrate of n-type;

an n-clad layer of II-VI compound semiconductor on the substrate;

an active layer of II-VI compound semiconductor on the n-clad layer;

a p-clad layer of II-VI compound semiconductor on the active layer;

a current blocking layer of n-type II-VI compound semiconductor on the p-clad layer and having an opening;

a buried p-contact layer of p-ZnSeS on the current blocking layer and contacting the p-clad layer through the opening of the current blocking layer;

a p-contact layer of p-ZnTe on the buried p-contact layer;

a first electrode in contact with the p-contact layer; and

a second electrode in contact with the semiconductor substrate; and

a super lattice comprising ZeSe layers, ZnSeTe layers, and ZnTe layers between the buried p-contact layer and the p-contact layer wherein the super lattice comprises a first portion of p-ZnSe layers and p-ZnSeTe layers at a side of the buried p-contact layer, and a second portion of p-ZnSeTe layers and p-ZnTe layers at a side of the p-contact layer.

11. A semiconductor device comprising:

an n-clad layer of one of II-VI compound semiconductors and N-containing III-V compound semiconductors;

a p-clad layer of one of II-VI compound semiconductors and N-containing III-V compound semiconductors;

an active layer of one of II-VI compound semiconductors and N-containing III-V compound semiconductors between the n-clad and p-clad layers;

a current blocking layer of n-type semiconductor comprising one of II-VI compound semiconductors and N-containing III-V compound semiconductors, disposed on the p-clad layer and providing an opening;

a p-contact layer of p-type semiconductor comprising one of II-VI compound semiconductors and N-containing III-V compound semiconductors on the current blocking layer and contacting the p-clad layer through the opening; and

a p-side electrode on the p-contact layer.

12. The semiconductor device according to claim 11, wherein the active layer includes multi-quantum wells.

13. A semiconductor device comprising:

a semiconductor substrate of a first conductive type;

a first clad layer of the first conductive type on the semiconductor substrate;

an active layer of one of II-VI compound semiconductors and N-containing III-V compound semiconductors on the first clad layer;

a second clad layer of a second conductive type on the active layer;

a current blocking layer of the first conductive type on the active layer;

a current blocking layer on the first conductive type on the second clad layer and having an opening;

a contact layer of a semiconductor material of the second conductive type on the current blocking layer and contacting the second clad layer through the opening of the current blocking layer;

a first electrode in contact with the contact layer; and

a second electrode in contact with the semiconductor substrate.

14. The semiconductor device according to claim 13, wherein a thickness of the current blocking layer is about 700 nm or less.

15. The semiconductor device according to claim 13, further comprising a cap layer of the second conductive type between the current blocking layer and the second clad layer.

16. The semiconductor device according to claim 15, wherein the second clad layer comprising a Mg-containing II-VI compound semiconductor, and the cap layer comprises a Mg-free II-VI compound semiconductor.

17. The semiconductor device according to claim 13, further comprising a semiconductor buffer layer of the first conductive type semiconductor between the substrate and the first clad layer.

18. The semiconductor device according to claim 13, wherein the contact layer comprises:

a buried contact layer on the second clad layer and the current blocking layer at the opening of the current blocking layer;

a top contact layer on the buried contact layer; and

a super lattice layer between the top contact layer and the buried contact layer, comprising first layers of semiconductor comprising the buried contact layer and second layers of another semiconductor comprising the top contact layer.

19. The semiconductor device according to claim 13, wherein the active layer includes multi-quantum wells.