Optical elements having regions of different indices of refraction and method of fabricating the same

• US 5,585,968 A
• Filed: 12/01/1993
• Issued: 12/17/1996
• Est. Priority Date: 12/01/1993
• Status: Expired due to Fees

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Ray, Michael, Guhman, Glenn F., Touw, Theodore R.
• Primary Examiner(s): Dzierzynski, Paul M.
• Assistant Examiner(s): Juba, Jr., John
• Application Number:
  US08/160,567
• Time in Patent Office: 1,112 Days
• Field of Search: 359/652, 359/654, 359/569, 359/573, 359/575, 359/896, 359/599, 359/707, 359/888, 359/737, 359/653, 359/655, 359/721, 359/558, 359/565, 65/105, 65/425, 65/394, 65/399, 65/400, 428/310.5, 428/312.6, 428/315.5, 385/27, 385/31, 385/33
• US Class Current: 359/654
• CPC Class Codes: G02B 3/0087 with index gradient
• CPC Class Codes: Y10S 359/90 Methods
• CPC Class Codes: Y10T 428/249961 With gradual property change within a component
• CPC Class Codes: Y10T 428/249969 Of silicon-containing material [e.g., glass, etc.]
• CPC Class Codes: Y10T 428/249978 Voids specified as micro

Abstract

An optical device having a variable index of refraction across its surface includes a light transmissive material with a plurality of regions in the light transmissive material. Each region has an index of refraction which is different from the remainder of the material. The regions may be arranged in the surface of the material such that the density of the regions on the surface varies across the surface. Each region may be a bore, including a hole that extends through the light transmissive material. Variations in the density of the regions or bores as well as the depth and shape of the bores may be utilized to create variations of the refractive index within the light transmissive material.

Claims

1. An optical device comprising:

a light transmissive material have a planar surface thereon, said surface being substantially larger than the thickness of the material wherein said device is adapted to allow light of a predetermined wavelength to pass through said surface;

a plurality of bores within the material extending in a direction substantially normal to the surface, said plurality of bores being defined, in a plane parallel to the surface by a single perimeter, said bores having a width less than approximately one-tenth of said wavelength of light transmissible through the planar surface and forming a plurality of regions in said surface having an index of refraction different from the remainder of the material;

said regions being arranged in the surface of said material such that the density of said regions on said surface varies in a regular predetermined manner across said surface.

2. The optical device of claim 1 wherein said bores are of varying depth.

3. The optical device of claim 1 wherein at least one of said bores is tapered.

4. The optical device of claim 1 wherein the number of bores within said surface varies in a first direction.

5. The optical device of claim 1 wherein the surface comprises a thin wafer of silicon.

6. The optical device of claim 1 wherein at least one of the bores is filled with a transparent material having a refractive index different than the light transmissive material.

7. An optical device comprising:

a light transmissive material having a surface thereon;

a plurality of regions in said surface having an index of refraction different from the remainder of the material, said regions comprising at least one hole extending through the light transmissive material;

wherein said device is adapted to allow light of a predetermined wavelength to pass through the surface said at least one hole having a width less than approximately one-tenth of said wavelength of light transmissible through the surface and being defined by a single perimeter, said regions being arranged in the surface of said material such that the density of said regions on said surface varies in a regular predetermined manner across said surface.

8. The optical device of claim 7 wherein the number of holes within said surface varies radially from a central point.

9. The optical device of claim 8 wherein the number of holes within said surface located towards said central point is greater than the number of holes located away from said central point wherein said optical device operates as a concave lens.

10. The optical device of claim 8 wherein the number of holes within the said surface located towards said central point is less than the number of holes located away from said central point wherein said optical device operates as a convex lens.

11. A method of fabricating an optical device comprising:

forming a plurality of bores substantially normally oriented

within a planar surface of a material transmissive of light having a predetermined wavelength wherein the surface is substantially larger than the thickness of the material, said bores having a width less than approximately one-tenth of said wavelength of light transmissible through the planar surface and being defined, in a plane parallel to the surface, by a single perimeter, said plurality of holes creating a plurality of regions in the surface, each region having an index of refraction different from the remainder of the light transmissive material; and

arranging said regions in the surface of said material such that the density of said regions on said surface is variable in a regular predetermined manner across said surface.

12. The method of claim 11 wherein said bores are of varying depth.

13. The method of claim 11 wherein at least one of said bores is tapered.

14. The method of claim 11 wherein the number of bores created within said planar surface varies in a first direction.

15. The method of claim 11 wherein the number of bores created within said surface varies radially from a central point.

16. The method of claim 15 wherein the number of bores created within said planar surface located towards said central point is less than the number of bores located away from said central point wherein said optical device operates as a convex lens.

17. The method of claim 11 wherein said created surface of a light transmissive material comprises a thin wafer of silicon.

18. The method of claim 11 wherein said bores are created by using a lithographic process.

19. The method of claim 11 wherein said bores are created using reactive ion etching.

20. The method of claim 11 wherein a portion of the bores is filled with a transparent material having an index of refraction different from the light transmissive material.

21. A method of fabricating an optical device comprising:

creating a plurality of regions in a surface of a light transmissive material, each region comprising one or more bores and having an index of refraction different from the remainder of the light transmissive material;

arranging said regions in the surface of said material such that the density of said regions on said surface is varied across said surface, wherein the number of bores created within the surface varies radially from a central point and the number of bores created within said surface located towards said central point is greater than the number of bores created away from said central point wherein said optical device operates as a concave lens.

22. An optical device comprising:

a light transmissive material having a surface thereon;

a plurality of regions in said surface having an index of refraction different from the remainder of the material, said regions comprising at least one bore extending through the light transmissive material, said regions being arranged in the surface of said material such that the density of said regions on said surface varies across said surface; and

the number of bores within said surface varying radially from a central point, wherein the number of bores within said surface located towards said central point is greater than the number of bores located away from said central point wherein said optical device operates as a concave lens.

23. An optical device comprising:

a light transmissive material having a surface thereon;

a plurality of regions in said surface having an index of refraction different from the remainder of the material, said regions comprising at least one bore, said regions being arranged in the surface of said material such that the density of said regions on said surface varies across said surface; and

the number of bores within said surface varying radially from a central point, wherein the number of bores within said surface located towards said central point is greater than the number of holes located away from said central point wherein said optical device operates as a concave lens.