Surface sweeping method for surface movement in three dimensional topography simulation

• US 5,586,230 A
• Filed: 11/05/1993
• Issued: 12/17/1996
• Est. Priority Date: 06/24/1992
• Status: Expired due to Term

• Current Assignee: Intel Corporation, Nippon Telegraph and Telephone Corporation
• Original Assignee: Intel Corporation, Nippon Telegraph and Telephone Corporation
• Inventors: Leon, Francisco A., Tazawa, Satoshi
• Primary Examiner(s): Zimmerman, Mark K.
• Application Number:
  US08/148,181
• Time in Patent Office: 1,138 Days
• Field of Search: 395/119-123, 395/127, 395/125, 364/468, 364/598
• US Class Current: 345/420
• CPC Class Codes: G06T 17/10 Constructive solid geometry [CSG] using solid primitives, e.g. cylinders, cubes

Abstract

A method for deforming a solid and avoiding the creation of self-intersecting solid structures in a topography simulator. In a topography simulated based on a solids modeling system, self-intersecting structures are solids which have boundaries that intersect. Such self-intersecting structures are invalid and cannot be processed. A general method for sweeping a solid surface to create a deformed solid and avoid the creation of self-intersecting solid structures is described, which include the steps of: providing a material solid with a surface represented as one or more segments; constructing a first segment solid for a first segment; performing a boolean set operation between the solid being swept and the first segment solid creating a temporary first solid; identifying a second segment; constructing a second segment solid for the second segment; and performing the boolean set operation between said temporary first solid and said first segment solid creating said deformed first solid. The case where simultaneous deposition and etch is occurring requires utilizes separate temporary deposition and etch solids for each segment both of which are swept to create the deformed solid.

Claims

1. In a computer controlled display system including a solid modeling means, wherein a workpiece is represented as one or more solids, a method for deforming a first solid responsive to manufacturing parameters to create a deformed solid so that said deformed solid does not self-intersect, said method comprising the steps of:

a) inputting said first solid to a surface sweeping means, said first solid having a surface comprised of a plurality of triangular segments, each of said plurality of triangular segments defining a plurality of vertex points, wherein said plurality of triangular segments includes a first segment and a second segment, said first segment defining a first set of vertex points, said second segment defining a second set of vertex points;

b) defining a set of vectors corresponding to said manufacturing parameters including a vector associated with each of said plurality of vertex points, a magnitude and direction of each of said vectors in said set of vectors being defined according to manufacturing parameters at a location of the corresponding vertex on said first solid;

c) constructing a first segment solid defined by said first set of vertex points and a first subset of said vectors associated with said first set of vertex points;

d) creating a temporary solid from said first solid and said first segment solid;

e) identifying said second segment as sharing an edge with said first segment;

f) constructing a second segment solid defined by said second set of vertex points and a second subset of said vectors associated with said second set of vertex points; and

g) creating a deformed solid from said temporary solid and said second segment solid.

2. The method as recited in claim 1 wherein said step of creating a temporary solid includes a step of performing a boolean set operation between said first solid and said first segment solid.

3. The method as recited in claim 2 wherein said step of creating a deformed solid includes a step of performing a boolean set operation between said temporary solid and said second segment solid.

4. The method as recited in claim 3 wherein said step of constructing a first segment solid includes the steps of:

g) advancing said first set of vertex points to create a first set of advanced vertex points based on said manufacturing parameters;

h ) defining said first segment solid based on said first set of vertex points and said first set of advanced vertex points; and

i) triangulating faces of said first segment solid.

5. The method as recited in claim 4 wherein said step of constructing a second segment solid includes the steps of:

j) advancing said second set of vertex points to create a second set of advanced vertex points based on said manufacturing parameters;

k) defining said second segment solid based on said second set of vertex points and said second set of advanced vertex points; and

l) triangulating faces of said second segment solid.

6. The method as recited in claim 5 wherein for said step of performing a boolean set operation between said temporary solid and said second segment solid, said boolean set operation is a union operation.

7. The method as recited in claim 5 wherein for said step of performing a boolean set operation between said temporary solid and said second segment solid said boolean set operation is a difference operation.

8. The method as recited in claim 1 wherein said first set of vertex points includes a vertex point in said second set of vertex points.

9. In a computer controlled display system, said computer controlled display system including a solids modeling means for simulating the changes to the topography of a workpiece during a manufacturing process step wherein simultaneous deposition and etch is occurring, said workpiece being represented as one or more solids wherein each of said one or more solids has a surface comprised of a plurality of triangles, a method for deforming a first solid comprising the steps of:

a) constructing a temporary deposition solid for each triangle of said plurality of triangles;

b) constructing a temporary etch solid for each triangle of said plurality of triangles;

c) creating a deposition solid for each triangle of said plurality of triangles, each of said deposition solids created from said first solid, said temporary deposition solids and said temporary etch solids, said deposition solid further created corresponding to adjacent triangles;

d) creating an etch solid for each triangle of said plurality of triangles, each of said etch solids created from said first solid, said deposition solids and said temporary etch solids, said etch solid further created corresponding to adjacent triangles;

e) creating a deformed solid from said first solid, each of said deposition solids and each of said etch solids.

10. The method as recited in claim 9 wherein said step of creating a deposition solid for each of said triangles of said plurality of triangles includes the steps of:

f) identifying triangles which are adjacent to a triangle being processed;

g) creating an intermediate deposition solid for said triangle being processed by performing a boolean set difference operation between a temporary deposition solid corresponding to said triangle being processed and said first solid; and

h) performing a boolean set difference operation between said intermediate deposition solid corresponding to said triangle being processed and temporary etch solids corresponding to adjacent triangles.

11. The method as recited in claim 10 wherein said step of creating an etch solid for each triangle of said plurality of triangles includes the steps of:

i) identifying triangles which are adjacent to a triangle being processed;

j) creating an intermediate etch solid for said triangle being processed by performing a boolean set intersection operation between a temporary deposition solid corresponding to said triangle being processed and said first solid; and

k) performing a boolean set difference operation between said intermediate etch solid corresponding to said triangle being processed and temporary deposition solids corresponding to adjacent triangles.

12. The method as recited in claim 11 wherein said step of creating a deformed solid from said first solid, each of said deposition solids and each of said etch solids includes the steps of:

l) creating an intermediate solid by performing a boolean set union operation between said first solid and each of said deposition solids; and

m) performing a boolean set difference operation between said intermediate solid and each of said etch solids to create said deformed solid.

13. The method as recited in claim 12 wherein said step of constructing temporary deposition solids for each triangle of said plurality of triangles includes the steps of:

n) advancing vertex points of a triangle being processed;

o) deriving a set of vertex points from said advanced vertex points and unadvanced vertex points of said triangle;

p) if two vertex points are undergoing a deposition process and a third vertex point is undergoing an etch process, constructing a temporary deposition solid based on a first predetermined subset of vertex points; and

q) if two vertex points are undergoing an etch process and a third vertex point is undergoing a deposition process, constructing a temporary deposition solid based on a second predetermined subset of said set of vertex points.

14. The method as recited in claim 13 wherein said step of constructing temporary etch solids for each triangle in said plurality of triangles includes the steps of:

r) if two vertex points are undergoing a deposition process and a third vertex point is undergoing an etch process, constructing a temporary etch solid based on said second predetermined subset of said set of vertex points; and

s) if two vertex points are undergoing an etch process and a third vertex point is undergoing an etch process, constructing a temporary etch solid based on said first predetermined subset of said set of vertex points.