Method for manufacturing a medical electrode
First Claim
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1. A method for manufacturing a medical electrode comprising the steps of:
- disposing a bare substrate of electrically conductive material in an atmosphere containing titanium, nitrogen and hydrogen;
directly covering said bare substrate with an optical mask having a pattern therein having openings corresponding to a structure to be produced on said substrate; and
irradiating said substrate with said optical mask thereon in said atmosphere with an excimer laser and thereby depositing a structure of porous titanium nitride corresponding to said pattern directly on said substrate exclusively in said openings.
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Abstract
In a method for manufacturing electrodes for medical applications, particularly implantable stimulation electrodes, having an active layer of porous titanium nitride, a substrate of electrically conductive material that is in an atmosphere containing titanium, nitrogen and hydrogen is irradiated with an excimer laser through an optical mask, and a structure of porous titanium nitride is deposited on the substrate.
88 Citations
14 Claims
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1. A method for manufacturing a medical electrode comprising the steps of:
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disposing a bare substrate of electrically conductive material in an atmosphere containing titanium, nitrogen and hydrogen; directly covering said bare substrate with an optical mask having a pattern therein having openings corresponding to a structure to be produced on said substrate; and irradiating said substrate with said optical mask thereon in said atmosphere with an excimer laser and thereby depositing a structure of porous titanium nitride corresponding to said pattern directly on said substrate exclusively in said openings. - View Dependent Claims (2, 3, 4, 5)
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6. A method for manufacturing a medical electrode comprising the steps of:
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disposing a substrate of electrically conductive material in an atmosphere containing tetrakis(dimethylamino)-titanium and nitrogen; covering said substrate with an optical mask having a pattern therein corresponding to a structure to be produced on said substrate; and irradiating said substrate with said optical mask thereon in said atmosphere with an excimer laser and thereby depositing a structure of porous titanium nitride corresponding to said pattern on said substrate. - View Dependent Claims (7, 8, 9, 10)
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11. A method for manufacturing a medical electrode comprising the steps of:
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disposing a bare substrate of electrically conductive material in an atmosphere containing titanium tetrachloride and ammonia; directly covering said bare substrate with an optical mask having a pattern therein having openings corresponding to a structure to be produced on said substrate; and irradiating said substrate with said optical mask thereon in said atmosphere with an excimer laser and thereby depositing a structure of porous titanium nitride corresponding to said pattern directly on said substrate exclusively in said openings. - View Dependent Claims (12, 13, 14)
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Specification