Method of forming bipolar junction transistor of epitaxial planar type

• US 5,587,326 A
• Filed: 10/23/1992
• Issued: 12/24/1996
• Est. Priority Date: 10/24/1991
• Status: Expired due to Fees

• Current Assignee: NEC Electronics Corporation (Renesas Electronics Corporation)
• Original Assignee: NEC Corporation
• Inventors: Takemura, Hisashi
• Primary Examiner(s): Chaudhuri, Olik
• Assistant Examiner(s): Pham, Long
• Application Number:
  US07/965,027
• Time in Patent Office: 1,523 Days
• Field of Search: 437/31, 437/233, 437/162, 437/193, 437/33, 437/909, 437/191, 148/DIG. 10, 148/DIG. 11, 148/35, 148/124, 257/586, 257/565
• US Class Current: 438/365
• CPC Class Codes: H01L 21/2257 the applied layer being silicon or silicide or SIPOS, e.g. polysilicon, porous silicon
• CPC Class Codes: H01L 29/66272 Silicon vertical transistors H01L29/66242, H01L29/66257 and H01L29/66265 take precedence
• CPC Class Codes: Y10S 148/01 Bipolar transistors-ion implantation
• CPC Class Codes: Y10S 148/011 Bipolar transistors
• CPC Class Codes: Y10S 148/035 Diffusion through a layer
• CPC Class Codes: Y10S 148/124 Polycrystalline emitter

Abstract

In a bipolar junction transistor of an epitaxial planar type comprising a base region, an emitter region formed in the base region, and a poly-silicon layer as an emitter poly-silicon electrode layer overlying the emitter region, the poly-silicon layer being used as an impurity diffusion source for forming the emitter region in fabrication of the transistor, the emitter poly-silicon electrode layer comprises a poly-silicon film containing an additive of one of C, O, and P overlying the emitter region and a poly-silicon layer overlying the poly-silicon film. An impurity is doped in the poly-silicon layer and is diffused into the base region through the poly-silicon film to form the emitter region in the base region in fabrication of the transistor. The poly-silicon film contains the additive and serves to prevent the poly-silicon film and the poly-silicon layer from grain growth which badly affects the impurity diffusion for forming the emitter region.

Claims

1. A fabrication method of a bipolar junction transistor of an epitaxial planar type comprising:

a first step of preparing a semiconductor substrate with a primary surface;

a second step of forming a collector region of a first conductivity type in the primary surface of said semiconductor substrate;

a third step of forming a base region of a second conductivity type on said collector region, said base region having a base exposure surface;

a fourth step of forming an insulating layer overlying said base region, said insulating layer having an opening in registry with a predetermined surface portion of said base exposure surface;

a fifth step of forming a conductor film on said predetermined surface in said opening, said conductor film including an additive which prevents grain growth of poly-silicon, said additive is selected from a group consisting of C, O and P, and said conductive film has a predetermined thickness not thicker than 100 Å

;

a sixth step of forming a poly-silicon layer overlying said conductive film; and

a seventh step of forming an emitter region of a first conductivity type in said predetermined surface portion of said base exposure surface, said conductive film and said poly-silicon layer serving as an emitter poly-silicon electrode layer;

said seventh step further comprising the substeps of;

doping an impurity of the first conductivity type in said poly-silicon layer; and

thermally diffusing said impurity from said poly-silicon layer into said base region through said conductive film to form said emitter region in said base region.

2. A fabrication method as claimed in claim 1, wherein said fourth step comprises the sub-steps of:

forming an insulating lamina on said base region; and

selectively etching said insulating lamina into said insulating layer to define said opening and to leave said insulating layer on said predetermined surface portion defined by said opening,

wherein the impurity of said first conductivity type is doped in said poly-silicon layer by an ion implantation technique.

7. A fabrication method as claimed in claim 1, wherein said fifth step is of forming said conductive film by the chemical vapor deposition with supply of a mixed gas containing SiH₂ Cl₂, C₂ H₆, and hydrogen chloride, to thereby form said conductive film containing C.

8. A fabrication method as claimed in claim 1, wherein said fifth step is of forming said conductive film by the chemical vapor deposition with supply of a mixed gas containing SiH₂ Cl₂, H₂, O₂, and hydrogen chloride, to thereby form said conductive film containing O.

9. A fabrication method as claimed in claim 1, wherein said fifth step is of forming said conductive film by the chemical vapor deposition with supply of a mixed gas containing SiH₂ Cl₂, H₂, O₂, PH₃, and hydrogen chloride, to thereby form said conductive film containing P.

3. A fabrication method of a bipolar junction transistor of an epitaxial planar type, which comprises a collector region of a first conductivity type, a base region of a second conductivity type different from said first conductivity type, and an emitter region of the first conductivity type which is formed through a conductive film deposited on said emitter region and a poly-silicon layer deposited on said conductive film, said fabrication method comprising the steps of:

adding an additive in said conductive film which prevents occurrence of grain growth in the poly-silicon layer, said additive is selected from a group consisting of C, O and P;

depositing the conductive film including said additive, to a predetermined thickness not thicker than 100 Å

; and

depositing the poly-silicon layer onto said conductive film.

4. A fabrication method as claimed in claim 3, wherein the predetermined thickness is between 20 and 100 angstroms.

5. A fabrication method as claimed in claim 4, wherein said poly-silicon layer has a thickness of about 2000 angstroms.

6. A fabrication method as claimed in claim 3, wherein said conductive film is formed by in-situ doping of said additive.