Atomic force microscope employing beam tracking
First Claim
1. A scanning force microscope for examining surface properties of a sample surface, said microscope comprising:
- a frame;
a sample stage;
a scanner element having a scanner end capable of motion relative to said frame in response to signals applied to said scanner element;
a cantilever having a reflective back surface, a first cantilever end and a second cantilever end, said first cantilever end having a sharp probe tip extending therefrom toward said sample stage, said second cantilever end coupled to said scanner;
at least one beam tracking element held in a fixed relationship to a portion of said scanner element;
a source of a collimated light beam, said source arranged to project said collimated light beam to said at least one beam tracking element and from said at least one beam tracking element to said reflective back surface of said cantilever forming a reflected light beam emanating from said reflective back surface; and
a position sensitive detector positioned to intercept said reflected light beam and produce a signal responsive to angular movement of said reflected light beam.
6 Assignments
0 Petitions
Accused Products
Abstract
A scanning probe microscope such as an atomic force microscope for measuring a feature of a sample surface with a sharp probe over an area of interest by means of a collimated light beam reflected from a reflective surface responsive to movement of the sharp probe relative to the sample surface, the movement detected by a position sensitive photodetector, includes a scanner having one end fixed and another end free and attached to the sharp probe for moving the sharp probe. Also fixed to the free end of the scanner is a mount for a beam tracking lens which is interposed into the collimated light beam to cause a focus spot of the light beam to track translational movement of the reflective surface caused by the scanner. In this way, a wide range of scanning ranges up to about 100×100 square micrometers is accommodated as is scanner head and scanner mode switching without the need to disturb the sample. Preferably the beam tracking lens is bi-convex and the source of the collimated light beam is a diode laser.
129 Citations
37 Claims
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1. A scanning force microscope for examining surface properties of a sample surface, said microscope comprising:
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a frame; a sample stage; a scanner element having a scanner end capable of motion relative to said frame in response to signals applied to said scanner element; a cantilever having a reflective back surface, a first cantilever end and a second cantilever end, said first cantilever end having a sharp probe tip extending therefrom toward said sample stage, said second cantilever end coupled to said scanner; at least one beam tracking element held in a fixed relationship to a portion of said scanner element; a source of a collimated light beam, said source arranged to project said collimated light beam to said at least one beam tracking element and from said at least one beam tracking element to said reflective back surface of said cantilever forming a reflected light beam emanating from said reflective back surface; and a position sensitive detector positioned to intercept said reflected light beam and produce a signal responsive to angular movement of said reflected light beam. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. An atomic force microscope for examining the surface properties of a sample surface, said atomic force microscope comprising:
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a frame; a sample stage; a piezoceramic tube scanner element having a scanner end capable of motion relative to said frame in response to signals applied to said scanner element; a cantilever having a reflective back surface, a first cantilever end and a second cantilever end, said first cantilever end having a sharp probe tip extending therefrom toward said sample stage; at least one beam tracking lens fixed in operation to a portion of said scanner element; a source of a collimated light beam including a diode laser module, said source fixed in operation to said frame, said source arranged to project said collimated light beam through said at least one beam tracking lens and to said reflective back surface of said cantilever forming a reflected light beam emanating from said reflective back surface; and a position sensitive photodetector fixed in operation to said frame and positioned to intercept said reflected light beam and produce a signal responsive to angular movement of said reflected light beam. - View Dependent Claims (14, 15)
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16. An atomic force microscope for examining the surface properties of a sample surface, said atomic force microscope comprising:
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a frame; a sample stage disposed under a portion of said frame; a piezoceramic tube scanner element having a scanner end capable of motion relative to said frame in response to signals applied to said scanner element; a cantilever having a reflective back surface, a first cantilever end and a second cantilever end, said first cantilever end having a sharp probe tip extending therefrom toward said sample stage; a source of a collimated light beam, said source fixed in operation to said frame, said source arranged to project said collimated light beam to said reflective back surface of said cantilever forming a reflected light beam emanating from said reflective back surface; and a position sensitive photodetector fixed in operation to said frame and positioned to intercept said reflected light beam and produce a signal responsive to angular movement of said reflected light beam.
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17. A scanning probe microscope for examining the surface properties of a sample surface, said scanning probe microscope comprising:
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a frame; a sample stage having an upper surface for supporting a sample, said sample stage disposed under a portion of said frame wherein said upper surface of said sample stage is not in contact with said frame; a piezoceramic tube scanner element having a scanner end capable of motion relative to said frame in response to signals applied to said scanner element; and a scanning probe for interacting with the sample surface disposed on said sample stage, said scanning probe suspended from said tube scanner.
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18. A scanning force microscope for examining surface properties of a sample surface, said microscope comprising:
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a frame; a sample stage; a scanner element having a scanner end capable of motion relative to said frame in response to signals applied to said scanner element; a cantilever having a reflective back surface, a first cantilever end and a second cantilever end, said first cantilever end having a sharp probe tip extending therefrom toward said sample stage, said second cantilever end coupled to said scanner; at least one beam tracking element held in a fixed relationship to a portion of said scanner element; a source of a beam of radiant energy, said source arranged to project said beam of radiant energy to said at least one beam tracking element and from said at least one beam tracking element to said reflective back surface of said cantilever forming a reflected beam of radiant energy emanating from said reflective back surface; and a position sensitive detector positioned to intercept said reflected beam of radiant energy and produce a signal responsive to angular movement of said reflected beam of radiant energy. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29)
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30. An atomic force microscope for examining the surface properties of a sample surface, said atomic force microscope comprising:
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a frame; a sample stage; a tube scanner element having a scanner end capable of motion relative to said frame in response to signals applied to said scanner element; a cantilever having a reflective back surface, a first cantilever end and a second cantilever end, said first cantilever end having a sharp probe tip extending therefrom toward said sample stage; at least one beam tracking lens fixed in operation to a portion of said scanner element; a source of a beam of radiant energy including a diode laser module, said source fixed in operation to said frame, said source arranged to project said beam of radiant energy through said at least one beam tracking lens and to said reflective back surface of said cantilever forming a reflected beam of radiant energy emanating from said reflective back surface; and a position sensitive photodetector fixed in operation to said frame and positioned to intercept said reflected beam of radiant energy and produce a signal responsive to angular movement of said reflected beam of radiant energy. - View Dependent Claims (31, 32)
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33. An atomic force microscope for examining the surface properties of a sample surface, said atomic force microscope comprising:
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a frame; a sample stage disposed under a portion of said frame; a tube scanner element having a scanner end capable of motion relative to said frame in response to signals applied to said scanner element; a cantilever having a reflective back surface, a first cantilever end and a second cantilever end, said first cantilever end having a sharp probe tip extending therefrom toward said sample stage; a source of a beam of radiant energy, said source fixed in operation to said frame, said source arranged to project said beam of radiant energy to said reflective back surface of said cantilever forming a reflected beam of radiant energy emanating from said reflective back surface; and a position sensitive photodetector fixed in operation to said frame and positioned to intercept said reflected beam of radiant energy and produce a signal responsive to angular movement of said reflected beam of radiant energy.
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34. A scanning probe microscope for examining the surface properties of a sample surface, said scanning probe microscope comprising:
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a frame; a sample stage having an upper surface for supporting a sample, said sample stage disposed under a portion of said frame wherein said upper surface of said sample stage is not in contact with said frame; a tube scanner element having a scanner end capable of motion relative to said frame in response to signals applied to said scanner element; and a scanning probe for interacting with the sample surface disposed on said sample stage, said scanning probe suspended from said tube scanner.
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35. A scanning probe microscope for examining the surface properties of a sample surface, said scanning probe microscope comprising:
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a frame; a sample stage disposed under a portion of said frame; an S-shaped piezoceramic tube scanner element having a scanner end capable of motion relative to said frame in response to signals applied to said scanner element; and a scanning probe for interacting with the sample surface disposed on said sample stage, said scanning probe suspended from said tube scanner.
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36. An atomic force microscope for examining the surface properties of a sample surface, said atomic force microscope comprising:
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a frame; a sample stage disposed under a portion of said frame; a piezoceramic tube scanner element having a scanner end capable of motion relative to said frame in response to signals applied to said scanner element; and a scanning probe for interacting with the sample surface disposed on said sample stage, said scanning probe suspended from said tube scanner.
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37. An atomic force microscope for examining the surface properties of a sample surface, said atomic force microscope comprising:
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a frame; a sample stage disposed under a portion of said frame; a tube scanner element having a scanner end capable of motion relative to said frame in response to signals applied to said scanner element; and a scanning probe for interacting with the sample surface disposed on said sample stage, said scanning probe suspended from said tube scanner.
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Specification