Infrared radiation sensor
First Claim
1. A heat sensitive infrared radiation sensor comprising an n type single crystal area formed in the shape of a thin film by doping a sensor substrate made of p type semiconductor with an n type impurity through the surface of said sensor substrate, a temperature sensor element formed in said n type single crystal area, a hollow part formed by removing by etching said p type semiconductor from the substantially lower and peripheral parts of said n type single crystal area as to leave said n type single crystal area of the sensor substrate, and a thermally and electrically insulating thin film bridge structure part having said n type single crystal area in the shape of a thin film provided with said temperature sensor element carried thereon, said bridge structure part formed over said hollow part and including a light receiving part.
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Accused Products
Abstract
An infrared radiation sensor of high accuracy is provided which is suitable for a thermometer to be used for effecting noncontacting determination of a temperature of a subject under test, particularly a temperature of a tympanic membrane, by utilizing the temperature characteristics of the saturated current flowing in the reverse direction through a Schottky junction diode. The infrared radiation sensor comprises an n type single crystal area 2 formed in the shape of a thin film by doping a sensor substrate 8 made of p type semiconductor with an n type impurity through the surface of the sensor substrate, a temperature sensor element 1 formed in the n type single crystal area 2, a hollow part 6 formed by removing by electrochemically etching the p type semiconductor from the substantially lower and peripheral parts of the n type single crystal area 2, and a thermally and electrically insulating thin film bridge structure having the n type single crystal area 2 in the shape of a thin film provided with the temperature sensor element 1 carried thereon.
34 Citations
6 Claims
- 1. A heat sensitive infrared radiation sensor comprising an n type single crystal area formed in the shape of a thin film by doping a sensor substrate made of p type semiconductor with an n type impurity through the surface of said sensor substrate, a temperature sensor element formed in said n type single crystal area, a hollow part formed by removing by etching said p type semiconductor from the substantially lower and peripheral parts of said n type single crystal area as to leave said n type single crystal area of the sensor substrate, and a thermally and electrically insulating thin film bridge structure part having said n type single crystal area in the shape of a thin film provided with said temperature sensor element carried thereon, said bridge structure part formed over said hollow part and including a light receiving part.
Specification