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Device for the measurement of a profile on a plane surface

  • US 5,589,941 A
  • Filed: 04/12/1995
  • Issued: 12/31/1996
  • Est. Priority Date: 04/12/1994
  • Status: Expired due to Fees
First Claim
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1. Apparatus for measuring a relief profile line contained upon a planar surface of a substrate that includes:

  • a hand-held measurement head that further includes,a light source and a lens means for converting a beam of light emanating from said source into an image in the form of a luminous streak that is perpendicular to a relief profile line being measured wherein the orientation of said beam of light is effected at an angle of incidence (α

    ) having a value about equal to the Brewster angle of the substrate,means for focussing back-scattered light from the illuminated relief profile line upon a matrix camera which converts received analog light signals into digital output signals, andprocessing means connected to said camera for processing said digital signals to determine at least one of the geometrical characteristics defining the relief profile line.

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