Precision non-contact polishing tool
First Claim
Patent Images
1. A non-contact polishing tool, comprising:
- a brim;
a shaft connected to said brim and having an opening therein;
means for directing a slurry through said opening in said shaft;
means for rotating at least said brim; and
means for changing at least the shape of an outer periphery of said brim;
whereby a slurry is adapted to flow through said opening in said shaft and onto an associated surface to be polished.
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Abstract
A non-contact polishing tool that combines two orthogonal slurry flow geometries to provide flexibility in altering the shape of the removal footprint. By varying the relative contributions of the two flow geometries, the footprint shape can be varied between the characteristic shapes corresponding to the two independent flow regimes. In addition, the tool can include a pressure activated means by which the shape of the brim of the tool can be varied. The tool can be utilized in various applications, such as x-ray optical surfaces, x-ray lithography, lenses, etc., where stringent shape and finish tolerances are required.
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Citations
17 Claims
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1. A non-contact polishing tool, comprising:
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a brim; a shaft connected to said brim and having an opening therein; means for directing a slurry through said opening in said shaft; means for rotating at least said brim; and means for changing at least the shape of an outer periphery of said brim; whereby a slurry is adapted to flow through said opening in said shaft and onto an associated surface to be polished. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A precision non-contact polishing tool having an adjustable removal footprint geometry, comprising:
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a brim having a non-continuous bottom surface thereof; a shaft connected to the brim and having an axially extending opening therein, and in fluid communication with said grooves in said brim; means for rotating the shaft and brim; and means for deflecting at least an outer portion of said brim, for adjusting the removal footprint geometry of the brim. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17)
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Specification