IC-processed microneedles
First Claim
Patent Images
1. A microstructure, comprising:
- a substrate having an interface region and an elongated region extending from said interface region; and
a shell connected with said substrate along said elongated region and at least a portion of said interface region;
wherein said substrate and shell define a shaft having an enclosed channel.
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Accused Products
Abstract
An IC-processed microneedle including an interface region and shaft. A shell defines an enclosed channel to form the shaft. The shaft has ports to permit fluid movement therethrough. Microheaters, microdetectors and additional devices may also be fabricated on the microneedle.
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Citations
26 Claims
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1. A microstructure, comprising:
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a substrate having an interface region and an elongated region extending from said interface region; and a shell connected with said substrate along said elongated region and at least a portion of said interface region; wherein said substrate and shell define a shaft having an enclosed channel. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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24. An microneedle, comprising:
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an interface region having an area of 2 to 3 millimeters square; and an elongated hollow shaft connected to and extending from said interface region for permitting movement of a fluid therethrough, said shaft having a length of between about 1 and 6 millimeters, said shaft having at a distal end width of about 50 micrometers or less and a height of about 9 micrometers or less. - View Dependent Claims (25)
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26. A microstructure fabricated by a process comprising the steps of:
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providing a substrate for forming an interface region and an elongated portion extending away from said interface region, said substrate including a frontside and a backside; forming a patterned, non-planar etchable structure on the frontside of said elongated portion; depositing an unetchable membrane layer atop said etchable structure; opening at least one etching hole in said membrane layer; and etching said etchable structure by placing an etchant into said etching hole, said etchable structure being etched to a predetermined extent to form a cavity underneath said membrane layer, thereby producing a shaft formed from said membrane layer and said elongated portion of said substrate.
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Specification