Laser diode sensor

• US 5,591,407 A
• Filed: 04/21/1995
• Issued: 01/07/1997
• Est. Priority Date: 04/21/1995
• Status: Expired due to Fees

• Current Assignee: American Research Corporation Of Virginia
• Original Assignee: American Research Corporation Of Virginia
• Inventors: Lo, Peter, Zory, Peter, Weiss, Martin, Groger, Howard P.
• Primary Examiner(s): SNAY, JEFFREY R
• Application Number:
  US08/426,659
• Time in Patent Office: 627 Days
• Field of Search: 257/253, 257/414, 372/44, 372/43, 436/172, 436/164, 422/82.05, 422/82.08, 422/82.07, 422/82.09, 422/82.11, 356/318
• US Class Current: 422/82.05
• CPC Class Codes: G01N 2021/391 Intracavity sample
• CPC Class Codes: G01N 2021/399 Diode laser
• CPC Class Codes: G01N 21/39 using tunable lasers
• CPC Class Codes: G01N 21/553 and using surface plasmons fluorescence excitation G01N21/648; enhanced Raman G01N21/658
• CPC Class Codes: G01N 21/6428 Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes" in vivo A61B5/00; immunoassay G01N33/53
• CPC Class Codes: G01N 21/7703 using reagent-clad optical fibres or optical waveguides using measurement of total internal reflection or attenuated total reflection G01N21/552; optical fibres or waveguides per se G02B

Abstract

A chemical sensor uses a semiconductor diode laser having a surface active region. A laser structure, including an active layer, a cladding layer, a barrier layer and a grating layer, is constructed on a substrate. A contact layer is deposited on a surface of the laser structure. One or more electrodes are positioned on the contact layer. A segmented electrode has a first contact pad, a second contact pad, and a surface active region between the first and second pads. A surface active region is created between the two electrodes. The tail of the lasing signal interacts with surface features of the diode laser or with chemical materials or probes in contact with the surface of the diode laser or in contact with coatings on the surface of the diode laser. Chemical changes in the ambient environment induce changes in the laser signal. The modified laser signal output is detected by a detector region integral with or separated from the laser structure. The laser diode sensor has applications in fields involving chemical sensing and identification, including automotive, environmental and medical fields.

Claims

1. A surface-active laser chemical sensor for detecting chemical changes in an ambient environment comprising a substrate, a diode laser structure deposited on the substrate for generating a laser signal, the laser structure further comprising an active layer, a barrier layer on the active layer, a cladding layer on the barrier layer, and a reducing layer on the cladding layer, a contact layer formed on the reducing layer having a deposited electrode, a surface sensitive region adjacent to the electrode, wherein in the surface sensitive region the thickness of the cladding layer is from 0.5 microns to less than 0.05 microns to enable a tail of a lasing mode to have a finite value at the surface of the laser, such that the laser structure and the signal generated by the laser structure exhibit sensitivity to an analyte at the surface sensitive region, wherein the laser structure produces in the presence of the analyte a laser signal, and wherein the laser signal is detected by a detector.

2. The apparatus of claim 1, wherein the detector is integrated with the laser structure.

3. The apparatus of claim 1, wherein the detector is external to the laser structure.

4. The apparatus of claim 1, wherein the active layer in the laser structure lases at a wavelength where the analyte has an absorption peak.

5. The apparatus of claim 1, wherein the intermediate layer is selected from the group consisting of silica, alumina and titania.

6. The apparatus of claim 1, wherein the first electrode is a single gold contact pad.

7. The apparatus of claim 1, wherein the substrate is a n-GaAs substrate, and wherein the cladding layer is a p-gallium indium phosphide cladding layer.

8. The apparatus of claim 1, wherein the substrate is a p-GaAs substrate, and wherein the cladding layer is a n-gallium indium phosphide cladding layer.

9. The apparatus of claim 1, further comprising a coupling structure formed of a distributed mirror, and an optical component provided in a region spaced from the distributed mirror (Bragg reflector), the optical component being selected from the group consisting of a semiconductor photodiode, an electrode, an optical coupler, a beam splitter, a polarization beamsplitter or an interferometer.

10. The apparatus of claim 1, further comprising a fluorescent material deposited in a carrier over the cladding layer, and wherein the active layer in the laser structure lases at a wavelength where the fluorescent material deposited over the cladding layer has an absorption peak in the presence of the analyte.

11. The apparatus of claim 1, wherein the active layer in the laser structure has a composition that allows lasing between 700 and 880 nm.

12. The apparatus of claim 1, wherein the active layer of the laser structure lases between 630 nm and 700 nm.

13. The apparatus of claim 12, wherein the active layer is gallium indium phosphide.

14. The apparatus of claim 1, wherein the active layer of the laser structure has a composition that allows lasing between 630 nm and 700 nm.

15. The apparatus of claim 14, wherein the active layer is a quantum well active layer and has a composition comprising gallium indium phosphide.

16. The apparatus of claim 1, wherein the cladding layer is gallium indium phosphide.

17. The apparatus of claim 16, wherein the cladding layer is less than 0.5 microns thick.

18. The apparatus of claim 1, wherein the surface sensitive region has at least one additional optical component integrated in the laser structure.

19. The apparatus of claim 18, wherein the optical component is selected from the group consisting of lenses, gratings, beamsplitters, polarization beamsplitters, photodetectors, interferometers, heaters and nonlinear optical components.

20. The apparatus of claim 1, wherein the cladding layer has a surface corrugation.

21. The apparatus of claim 20, wherein the electrode extends over the area where the cladding has a surface corrugation, and wherein the electrode comprises optical components selected from the group consisting of photodiodes, polarization beamsplitters, and interferometers.

22. The apparatus of claim 1, wherein the electrode is a segmented electrode, the segmented electrode further comprising a first pad and a second pad, and wherein the surface sensitive region is positioned between the first and second pads.

23. The apparatus of claim 22, further comprising an intermediate layer deposited over the surface sensitive region between the pads, the intermediate layer being sensitive to the presence of the analyte and comprising an absorbing dye or a fluorescent dye immobilized in a polymer or ceramic material such that the absorbance or fluorescence or refractive index of the dye/polymer or dye/ceramic material system is altered in the presence of the analyte.

24. The apparatus of claim 22, wherein the first pad and the second pad of the segmented electrode are metal pads.

25. The apparatus of claim 22, further comprising a gold layer deposited over the cladding layer in the surface sensitive region between the pads.

26. The apparatus of claim 25, further comprising a nafion layer deposited over the gold layer.

27. The apparatus of claim 22, further comprising a fluorophore carrier deposited over the surface sensitive region between the pads.

28. The apparatus of claim 27, wherein the fluorophore carrier is selected from the group consisting of a polymer, a sol-gel and a thin-film deposited binder.

29. The apparatus of claim 1, wherein the first electrode is a stripe electrode, and further comprising a second stripe electrode deposited on the contact layer such that the laser can be operated under voltage applied to either electrode or to both electrodes.

30. The apparatus of claim 29, wherein the first electrode and the second electrode are both segmented electrodes having first segments, second segments, and gaps between the first segments and the second segments.

31. The apparatus of claim 30, further comprising a protective coating deposited over a gap between a first segment and a second segment of the second electrode to prohibit interaction with the analyte.

32. The apparatus of claim 29, wherein the first electrode and the second electrode are unsegmented electrodes, wherein the first electrode is substantially parallel to the second electrode, and wherein a surface active region is formed between the first electrode and the second electrode.

33. The apparatus of claim 32, wherein the first electrode and the second electrode are spaced less than 10 microns apart.