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Radio-frequency plasma source

  • US 5,592,055 A
  • Filed: 10/17/1995
  • Issued: 01/07/1997
  • Est. Priority Date: 10/21/1994
  • Status: Expired due to Term
First Claim
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1. A plasma source comprising a discharge chamber (1) bounded by a base wall (5) and by a lateral wall (3), a system (7) for the admission of gas into said discharge chamber, a system of electrodes (13, 15) which are associated with said discharge chamber (1) and which are connected to a radio-frequency generator (17), and which apply an oscillating electric field within the discharge chamber and means (9, 11) for generating a static magnetic field in said discharge chamber,characterized in that:

  • coaxially with said discharge chamber (1) there are disposed a first and a second electrode (15;

    13;

    13X), at least one of which has an annular extent and is disposed in an intermediate position along the axial extent of the discharge chamber, said two electrodes (15;

    13;

    13X) being connected to two poles of the radio-frequency generator;

    and in that the means (9,

         11) for generating the static magnetic field generate a magnetic field (B0) approximately parallel to the axis (A--A) of the discharge chamber, with an average intensity in the discharge chamber for which the corresponding electron cyclotron frequency fc satisfies the condition f<

    fc<

    7f where f is the frequency of the electric field.

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