Radio-frequency plasma source

• US 5,592,055 A
• Filed: 10/17/1995
• Issued: 01/07/1997
• Est. Priority Date: 10/21/1994
• Status: Expired due to Term

• Current Assignee: Finmeccanica-Societa Per Azioni
• Original Assignee: Proel Technologie S.p.A.
• Inventors: Capacci, Marco, Noci, Giovanni E.
• Primary Examiner(s): Pascal, Robert
• Assistant Examiner(s): Philogene, Haissa
• Application Number:
  US08/544,018
• Time in Patent Office: 448 Days
• Field of Search: 315/111.21, 315/111.31, 315/111.41, 315/111.51, 315/111.71, 315/111.81, 313/231.31, 313/362.1, 313/234
• US Class Current: 315/111.21
• CPC Class Codes: H01J 27/18 with an applied axial magnetic field
• CPC Class Codes: H01J 37/32082 Radio frequency generated discharge H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence
• CPC Class Codes: H01J 37/32357 Generation remote from the workpiece, e.g. down-stream
• CPC Class Codes: H01J 37/32678 Electron cyclotron resonance
• CPC Class Codes: H05H 1/18 wherein the fields oscillate at very high frequency, e.g. in the microwave range , e.g. using cyclotron resonance
• CPC Class Codes: H05H 1/46 using applied electromagnetic fields, e.g. high frequency or microwave energy H05H1/26 takes precedence

Abstract

A plasma source is described, comprising a discharge chamber (1) bounded by a base wall (5) and by a lateral wall (3), a system (7) for the admission of gas into said discharge chamber, a system of electrodes (13, 15) which are associated with said discharge chamber (1) and which are connected to a radio-frequency generator (17), and which apply an oscillating electric field within the discharge chamber, and means (9, 11) for generating a static magnetic field in said discharge chamber. Coaxially with said discharge chamber (1) there are disposed a first and a second electrode (15; 13; 13X), at least one of which has an annular extent and is disposed in an intermediate position along the axial extent of the discharge chamber, said two electrodes (15; 13; 13X) being connected to two poles of the radio-frequency generator.

Claims

1. A plasma source comprising a discharge chamber (1) bounded by a base wall (5) and by a lateral wall (3), a system (7) for the admission of gas into said discharge chamber, a system of electrodes (13, 15) which are associated with said discharge chamber (1) and which are connected to a radio-frequency generator (17), and which apply an oscillating electric field within the discharge chamber and means (9, 11) for generating a static magnetic field in said discharge chamber,

characterized in that:

coaxially with said discharge chamber (1) there are disposed a first and a second electrode (15;

13;

13X), at least one of which has an annular extent and is disposed in an intermediate position along the axial extent of the discharge chamber, said two electrodes (15;

13;

13X) being connected to two poles of the radio-frequency generator;

and in that the means (9,

     11) for generating the static magnetic field generate a magnetic field (B₀) approximately parallel to the axis (A--A) of the discharge chamber, with an average intensity in the discharge chamber for which the corresponding electron cyclotron frequency f_c satisfies the condition f<

fc<

7f where f is the frequency of the electric field.

2. Plasma source according to claim 1, characterized in that both of said electrodes (13X, 15) have an annular extent and are disposed in two distinct intermediate positions along the axial extent of the discharge chamber (1).

3. Plasma source according to claim 1, characterized in that said first electrode (13) is applied in correspondence with the base wall (5) of the discharge chamber (1).

4. Plasma source according to claim 3, characterized in that said first electrode (13) has the shape of a small disc disposed on the base wall (5) of the discharge chamber (1).

5. Plasma source according to claim 3, characterized in that said second electrode (15) is disposed in an intermediate position along the axial extent of the discharge chamber (1), between the base wall (5) and half the height of the discharge chamber.

6. Plasma source according to claim 1, characterized in that it comprises a system of extraction grids (19) associated with a polarizing means (21) and a polarizing electrode (23) with associated polarizing means (25) for generating an ion beam.

7. Method for the generation of plasma in a discharge chamber (1) comprising a base wall (5) and a lateral wall (3), in which in said chamber there is generated a static magnetic field (B₀) and there is disposed a system of electrodes (13, 15) which apply a radio-frequency electric field (Erf) within the discharge chamber (1),

characterized by:

disposing a first electrode (13) and a second electrode (15) coaxially with said chamber (1), at least one of said electrodes being of annular extent;

and by generating a static magnetic field (B₀) approximately parallel to the axis (A--A) of the discharge chamber, the magnetic field exhibiting an average intensity in the discharge chamber for which the corresponding electron cyclotron frequency f_c satisfies the condition f<

fc<

7f where f is the frequency of the electric field.

8. Method according to claim 7, characterized by disposing said first electrode (13) in proximity to the base wall (5) of the discharge chamber (1) and said second electrode in an intermediate position along the axial extent of the discharge chamber, said second electrode being of annular extent.