Electro-optic apparatus for measuring an electric field of a sample
First Claim
1. An electro-optic probe apparatus for measuring an electric field of a sample, comprising:
- a freely reciprocating electro-optic member comprised of an electro-optic material;
a guide mechanism for supporting said freely reciprocating electro-optic member to be freely reciprocally movable within a predetermined stroke range, said free reciprocal movement occuring only in directions normal to said sample; and
driving means for reciprocating said guide mechanism in said direction of said sample.
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Accused Products
Abstract
An electric field measuring apparatus for causing an optical probe head having an electro-optic member with an electro-optic material to oppose a sample such as a semiconductor integrated circuit device and for optically measuring a voltage of an opposite portion of the sample. The electro-optic material consists of an LiTaO3 electro-optic crystal or the like, the polarization characteristics of which change depending on the electric-field strength of the sample. The electro-optic member is supported on a guide mechanism to be reciprocally movable within a predetermined stroke range in a direction of the sample. The guide mechanism is reciprocated in the direction of the sample to control the distance between the electro-optic material and the sample. In measurement, light is incident on the electro-optic material whose polarization characteristics change depending on the electric-field strength, and the light intensity of a predetermined polarized component of the light reflected by the electro-optic material is detected, thereby measuring the electric-field strength and voltage of the sample. When if the electro-optic member is brought into contact with the sample, the sample is not damaged due to the stroke set in the guide mechanism. The simple structure of the guide mechanism realizes improvement of operability. The electro-optic member can therefore safety approach the sample to increase the measurement sensitivity.
15 Citations
29 Claims
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1. An electro-optic probe apparatus for measuring an electric field of a sample, comprising:
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a freely reciprocating electro-optic member comprised of an electro-optic material; a guide mechanism for supporting said freely reciprocating electro-optic member to be freely reciprocally movable within a predetermined stroke range, said free reciprocal movement occuring only in directions normal to said sample; and driving means for reciprocating said guide mechanism in said direction of said sample. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. An electro-optic probe apparatus for measuring an electric field of a sample, comprising:
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a freely reciprocating first member having an electro-optic member; and a cylinder having an inner surface being in contact with said freely reciprocating first member, said cylinder supporting said freely reciprocating first member so as to be freely reciprocally movable within a predetermined stroke range over said inner surface of said cylinder. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. An electro-optic probe apparatus for measuring an electric field of a sample, comprising:
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a freely reciprocating first member including an electro-optic member, said freely reciprocating first member including a projection; and a holder having an inner surface in contact with said projection of said freely reciprocating first member, said holder supporting said freely reciprocating first member to be freely reciprocally movable within a predetermined stroke range over said inner surface of said holder. - View Dependent Claims (24, 25, 26)
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27. An electro-optic probe apparatus for measuring an electric field of a sample, comprising:
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a holder; and a freely reciprocating electro-optic member located in said holder, said holder supporting said freely reciprocating electro-optic member so as to be freely reciprocally movable within a predetermined stroke range within said holder, said freely reciprocating electro-optic member having a spherical surface. - View Dependent Claims (28, 29)
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Specification