Inspection system for cross-sectional imaging

• US 5,592,562 A
• Filed: 09/02/1994
• Issued: 01/07/1997
• Est. Priority Date: 01/19/1994
• Status: Expired due to Fees

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Rooks, Stephen M.
• Primary Examiner(s): Couso, Jose L.
• Assistant Examiner(s): Do, Anh Hong
• Application Number:
  US08/300,677
• Time in Patent Office: 858 Days
• Field of Search: 378/22, 378/62, 382/147, 382/150, 382/145, 382/8, 29/830, 437/205
• US Class Current: 382/150
• CPC Class Codes: G01N 2223/419 computed tomograph
• CPC Class Codes: G01N 23/044 using laminography or tomosynthesis
• CPC Class Codes: G01N 23/046 using tomography, e.g. computed tomography [CT]
• CPC Class Codes: G01N 23/083 the radiation being X-rays
• CPC Class Codes: G01N 23/18 Investigating the presence of flaws defects or foreign matter
• CPC Class Codes: G01R 31/309 of printed or hybrid circuits or circuit substrates
• CPC Class Codes: G06T 2207/10116 X-ray image
• CPC Class Codes: G06T 2207/30152 Solder
• CPC Class Codes: G06T 7/0004 Industrial image inspection
• CPC Class Codes: G06T 7/0006 using a design-rule based approach
• CPC Class Codes: Y10T 29/49126 Assembling bases

Abstract

A method and apparatus for inspecting a bonded joint between components. A cross-sectional image of the joint is analyzed by determining the location of a first characteristic of the joint, the centroid of the joint in the cross-sectional image; and then measuring a second characteristic of the joint in reference to the location of the centroid. This measurement may be used by comparing it with a predetermined specification expected for the measurement for the purpose of determining the quality of the joint. The invention is particularly advantageous for studying cross-sectional X-ray images of solder joints between electronic components and substrata upon which they are mounted and can be implemented for analyzing the images produced in cross-sectional X-ray inspection machines such as scanned beam X-ray laminography systems or digital tomosynthesis systems.

Claims

1. A method of inspecting a solder joint of a ball-grid array comprising the steps of:

using cross-sectional images of said joint generated in planes intersecting said joint at ball, pad and package slices;

locating the centroid of the solder ball of said joint in said cross-sectional image taken at said ball slice; and

performing the steps of

a) measuring said joint at said pad slice;

locating the centroid of said pad;

determining the ball pad offset;

measuring image background gray level and average solder thickness in the region of said pad;

measuring solder thickness on said pad in a plurality of annular rings positioned relative to said ball and pad centroids;

measuring the extent of solder on said pad relative to the centroid of said pad;

b) measuring said joint at said package slice;

locating the centroid of said joint at said package slice;

determining the ball joint offset at said package slice;

measuring image background gray level and average solder thickness at said joint on said package;

measuring solder thickness on said package in a plurality of annular rings positioned relative to said ball and package centroids;

measuring the extent of solder at said package relative to the centroid of the joint at said package slice; and

c) comparing selected measurements to predetermined threshold valuations to identify a defective or acceptable joint.

2. The method of claim 1, wherein said comparison of selected measurements is performed at said pad slice.

3. The method of claim 1, wherein said comparison of selected measurements is performed at said package slice.

4. The method of claim 1, wherein a centroid of a joint is determined by estimating the position of said centroid using a weighted centroid software routine means;

subsequently using edge detection software routine means, the application of which is centered about the centroid estimated by said weighted centroid routine to obtain measurement of the extent of said joint;

subsequently applying a centroid determining operator routine means adapted to the size of said joint as determined by said edge detection software routine to obtain the final determination of said joint centroid.

5. A method of inspecting a soldered joint of a ball-grid array comprising joining a package and a substrate, having one or more connection pads, comprising:

a) locating the centroid of the solder ball of said joint in a cross-sectional image of said joint across said ball;

locating the centroid of the pad of said joint in a cross-sectional image of said joint across said pad;

calculating the offset of said pad and ball as determined by comparing said locations between said images;

b) measuring the local background gray levels of cross-sectional images of said joint at pad and package slices;

c) measuring characteristics of said joint in said cross-sectional images at pad and package slices by measuring the average solder thickness in circumjacent rings centered with respect to the offset between the centroids of said ball and pad;

d) determining the extent of said solder at said pad and package slices by determining the edge contour of said solder joint; and

comparing information obtained thereby with predetermined threshold valuations.

6. The method of claim 5, further comprising the step of identifying open or low solder amounts by comparing the measurements obtained in steps a, b, and c with predetermined threshold valuations to determine whether said measurements fall outside said thresholds.

7. The method of claim 5, further comprising the step of determining whether a pad has not been wetted by solder by comparing the measurements made at the package slice to identify whether solder in excess of a preselected threshold has been measured.

8. The method of claim 5, further comprising the step of determining ball pad misalignment in which the offset between the centroids of said ball and pad have exceeded a predetermined maximum offset.

9. The method of claim 5, further including the method of identifying solder bridging to another joint or feature, comprising the step of:

comparing the average solder thickness on a cross-sectional image at a pad or package slice in a preselected region around said joint to a predetermined threshold.

10. The method of claim 9, wherein solder thickness is measured by determining whether the gray level in the relevant image exceeds a preselected threshold amount above the background gray level in a plurality of small regions outside of a region circumscribing both ball and pad.

11. The method of claim 10 further comprising, if said threshold amount has been exceeded, performing gradient measurements along a path circumscribing said pad and ball to determine if solder is present outside a preselected boundary in the direction of another joint or feature.

12. Apparatus for inspecting a solder joint of a ball-grid array, using cross-sectional images of said joint generated in planes intersecting said joint at ball, pad, and package slices, comprising:

means for locating the centroid of the solder ball of said joint in said cross-sectional image taken at said ball slice;

a) means for inspecting said joint intersected at said pad slice, comprising;

means for measuring said joint at said pad slice;

means for locating the centroid of said pad;

means for determining the ball pad offset;

means for measuring image background gray level and average solder thickness on said pad;

means for measuring solder thickness on said pad in a plurality of annular rings positioned relative to said ball and pad centroids;

means for measuring the extent of solder on said pad relative to the centroid of said pad;

b) means for inspecting said joint intersected at said package slice, comprising;

means for measuring said joint at said package slice;

means for locating the centroid of joint at said package slice;

means for determining the ball package offset;

means for measuring image background gray level and average solder thickness at said package slice;

means for measuring solder thickness at said package slice in a plurality of annular rings positioned relative to said ball and package centroids;

means for measuring the extent of solder at said package slice relative to the centroid of said joint at said package slice; and

c) means for comparing selected measurements to predetermined threshold valuations to identify a defective or acceptable joint.

13. The apparatus of claim 12, wherein said means for comparison of selected measurements is adapted to perform a comparison at said pad slice.

14. The apparatus of claim 12, wherein said means for comparison of selected measurements is adapted to perform a comparison at said package slice.

15. The apparatus of claim 12, wherein said means for locating a centroid of a joint comprises:

means for estimating the position of said centroid using weighted centroid software routine means;

edge detection software routine means, the application of which is centered about the centroid estimated by said weighted centroid routine to obtain measurement of the extent of said joint; and

a centroid determining operator routine means adapted for conformation to the size of said joint as determined by said edge detection software routine to obtain the final determination of said joint centroid.

16. Apparatus for inspecting a soldered joint of a ball-grid array joining a package and a substrate, having one or more connection pads, comprising:

a) means for locating the centroid of the solder ball of said joint in a cross-sectional image of said joint across said ball;

means for locating the centroid of the pad of said joint in a cross-sectional image of said joint across said pad;

means for calculating the offset of said pad and ball as determined by means for comparing said locations between said images;

b) means for measuring the local background gray levels of cross-sectional images of said joint at pad and package slices;

c) means for measuring characteristics of said joint in said cross-sectional images at pad and package slices by measuring the average solder thickness in circumjacent rings centered with respect to the offset between the centroids of said ball and pad;

d) means for determining the extent of said solder at said pad and package slices by determining the edge contour of said solder joint; and

means for comparing information obtained thereby with predetermined threshold valuations.

17. The apparatus of claim 16, further comprising means for identifying open or low solder amounts by comparing the measurements obtained in means identified a, b, and c with predetermined threshold valuations to determine whether said measurements fall outside said thresholds.

18. The apparatus of claim 16, further comprising means for determining whether a pad has not been wetted by solder by comparing the measurements made at the package slice to identify whether solder in excess of a preselected threshold has been measured.

19. The apparatus of claim 16, further comprising means for determining ball pad misalignment in which the offset between the centroids of said ball and pad have exceeded a predetermined maximum offset.

20. The apparatus of claim 16, including means for identifying solder bridging to another joint or feature, comprising:

means for comparing the average solder thickness on a cross-sectional image at a pad or package slice in a preselected region around said joint to a predetermined threshold.

21. The apparatus of claim 20, including means for measuring solder thickness by determining whether the gray level in the relevant image exceeds a preselected threshold amount above the background gray level in a plurality of small regions outside of a region circumscribing both ball and pad of said joint.

22. The apparatus of claim 20, further comprising means for performing gradient measurements if said threshold amount has been exceeded, for the purpose of performing gradient measurements along a path circumscribing said pad and ball to determine, if solder is present outside a preselected boundary in the direction of another joint or feature.