Capacitance type acceleration sensor

• US 5,594,171 A
• Filed: 10/25/1995
• Issued: 01/14/1997
• Est. Priority Date: 10/31/1994
• Status: Expired due to Fees

• Current Assignee: Kabushiki Kaisha Tokai RIKA Denki Seisakusho
• Original Assignee: Kabushiki Kaisha Tokai RIKA Denki Seisakusho
• Inventors: Ishida, Tatsuya, Imaeda, Yasuo
• Primary Examiner(s): Williams, Hezron E.
• Assistant Examiner(s): MOLLER, RICHARD ALAN
• Application Number:
  US08/548,043
• Time in Patent Office: 447 Days
• Field of Search: 73/514.18, 73/514.32, 73/514.36, 73/514.38, 361/280
• US Class Current: 73/514.32
• CPC Class Codes: B60T 8/171 Detecting parameters used in the regulation; Measuring values used in the regulation
• CPC Class Codes: G01P 1/023 for acceleration measuring devices
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 15/18 in two or more dimensions
• CPC Class Codes: G01P 2015/084 the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
• CPC Class Codes: H01L 2924/16235 Connecting to a semiconductor or solid-state bodies, i.e. cap-to-chip
• CPC Class Codes: Y10S 438/96 Porous semiconductor

Abstract

A compact capacitance type acceleration sensor in which a mass portion having a plurality of movable electrodes are arranged in a recess portion formed on the surface of a p-type single crystal silicon base plate under the condition that the mass portion can be displaced. A plurality of stationary electrodes are arranged at a position opposed to the movable electrodes being separate from the movable electrodes. The mass portion is elastically supported by a support from the lower side and also elastically supported by four beams from the lateral side. Due to the above structure, the damping characteristic of the mass portion can be improved.

Claims

1. A capacitance type acceleration sensor comprising:

a silicon bass plate having a first recess portion on the surface thereof;

a mass portion movably arranged in said first recess portion;

a plurality of movable electrodes disposed on said mass portion;

a plurality of stationary electrodes arranged so as to oppose to said movable electrodes and being separate from said movable electrodes;

a support for elastically supporting said mass portion from the lower side of said mass portion; and

a plurality of beams for elastically supporting said mass portion from the lateral side of said mass portion.

2. The capacitance type acceleration sensor according to claim 1, wherein said support is integrally formed with said silicon base and extending from the bottom surface of said recess portion.

3. The capacitance type acceleration sensor according to claim 1, wherein said beams are extending from the lateral side surface of said recess portion.

4. The capacitance type acceleration sensor according to claim 1, further comprising:

a bonding pad electrically connected to said movable electrodes, said bonding pad being formed on said silicon base plate.

5. The capacitance type acceleration sensor according to claim 1, further comprising:

a glass base plate joined to the surface of said silicon base plate, said glass plate having a second recess portion in which said stationary electrode is disposed.

6. The capacitance type acceleration sensor according to claim 1, wherein the shape of said mass portion is approximately square, and said each beam is attached to the each side of said mass portion.