Semiconductor accelerometer having a cantilevered beam with a triangular or pentagonal cross section

• US 5,594,172 A
• Filed: 06/20/1990
• Issued: 01/14/1997
• Est. Priority Date: 06/21/1989
• Status: Expired due to Fees

• Current Assignee: Nissan Motor Co., Ltd.
• Original Assignee: Nissan Motor Co., Ltd.
• Inventors: Shinohara, Toshiro
• Primary Examiner(s): CHAPMAN JR, JOHN E
• Application Number:
  US07/540,613
• Time in Patent Office: 2,400 Days
• Field of Search: 73/514.33, 73/514.36, 73/514.38, 73/514.21, 73/514.23, 73/514.32, 73/862.382, 73/862.474, 338/2, 338/5
• US Class Current: 73/514.33
• CPC Class Codes: B81B 2201/025 Inertial sensors not provided for in B81B2201/0235 - B81B2201/0242
• CPC Class Codes: B81B 2203/0118 Cantilevers
• CPC Class Codes: B81C 1/00595 Control etch selectivity
• CPC Class Codes: B81C 2201/0133 Wet etching
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 2015/0828 the mass being of the paddle type being suspended at one of its longitudinal ends

Abstract

A semiconductor accelerometer, including a weight and a cantilevered beam formed in a silicon semiconductor substrate as a frame having a (100) surface, and a strain sensing device formed in a surface portion near a support portion of the cantilevered beam, the silicon cantilevered beam having a triangular cross section defined by one (100) surface and two (111) surfaces or a pentagonal cross section defined by one (100) surface, two (110) surfaces and two (111) surfaces. A method for producing the semiconductor accelerometer is also disclosed.

Claims

1. A semiconductor accelerometer, comprising:

a silicon semiconductor substrate as a frame having a (100) surface;

a weight formed in the substrate and surrounded by the substrate with a gap therebetween;

a silicon cantilevered beam formed in the substrate for connecting the weight to the substrate; and

a strain sensing device formed in a surface portion near a support portion of the cantilevered beam,

the silicon cantilevered beam having a triangular cross section defined by one (100) surface and two (111) surfaces.

2. The accelerometer of claim 1, wherein the triangular cross section has an inverted triangular shape defined by one flat upper (100) surface and two slant lower (111) surfaces.

3. The accelerometer of claim 1, also including stoppers formed between the substrate and the weight in both side portions and one end portions of the weight, each stopper including upper and lower stopper members having a triangular cross section defined by one (100) surface and two (111) surfaces and being arranged in the same direction as a bending direction of the weight with a certain gap between the upper and lower stopper members, the upper and lower stopper members projection from the weight and the substrate, respectively.

4. The accelerometer of claim 3, wherein said each lower stopper member includes a p⁺ -type silicon region situated below the one (100) surface of said each lower stopper member.

5. The accelerometer of claim 1, wherein said triangular cross section does not vary substantially along a longitudinal axis of said cantilevered beam.

6. A semiconductor accelerometer, comprising:

a silicon semiconductor substrate as a frame having a (100) surface;

a weight formed in the substrate and surrounded by the substrate with a gap therebetween;

a silicon cantilevered beam formed in the substrate for connecting the weight to the substrate; and

a strain sensing device formed in a surface portion near a support portion of the cantilevered beam,

the silicon cantilevered beam having a pentagonal cross section defined by one (100) surface, two (110) surfaces and two (111) surfaces.

7. The accelerometer of claim 6, wherein the pentagonal cross section is defined by one flat upper (100) surface, two vertical intermediate (110) surfaces and two slant lower (111) surfaces.

8. The accelerometer of claim 6, also including stoppers formed between the substrate and the weight in both side portions and one end portions of the weight, each stopper including upper and lower stopper members having a triangular cross section defined by one (100) surface and two (111) surfaces and being arranged in the same direction as a bending direction of the weight with a certain gap between the upper and lower stopper members, the upper and lower stopper members projecting from the weight and the substrate, respectively.

9. The accelerometer of claim 8, wherein said each lower stopper member includes a p⁺ -type silicon region situated below the one (100) surface of said each lower stopper member.

10. The accelerometer of claim 6, wherein said pentagonal cross section does not vary substantially along a longitudinal axis of said cantilevered beam.