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High-yield spatial light modulator with light blocking layer

  • US 5,597,736 A
  • Filed: 06/07/1995
  • Issued: 01/28/1997
  • Est. Priority Date: 08/11/1992
  • Status: Expired due to Term
First Claim
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1. A method of manufacturing a semiconductor device comprising:

  • a. preparing a substrate;

    b. forming electrically active regions in said substrate;

    c. depositing a blocking layer over said substrate;

    d. depositing an electrode layer over said blocking layer; and

    e. patterning said electrode layer to form landing and address electrodes separated by a gap, wherein said gap and said blocking layer are aligned such that light incident said semiconductor device which passes through said gap is blocked by said blocking layer.

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