High-yield spatial light modulator with light blocking layer
First Claim
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1. A method of manufacturing a semiconductor device comprising:
- a. preparing a substrate;
b. forming electrically active regions in said substrate;
c. depositing a blocking layer over said substrate;
d. depositing an electrode layer over said blocking layer; and
e. patterning said electrode layer to form landing and address electrodes separated by a gap, wherein said gap and said blocking layer are aligned such that light incident said semiconductor device which passes through said gap is blocked by said blocking layer.
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Abstract
A semiconductor device with an optically active region which receives light, and has a layer of metal which blocks the light from the substrate. The substrate contains addressing circuitry which can experience current leakage if photocarriers are allowed to form by contact with light. A layer of metal is deposited as an integral part of the device to prevent the light from reaching the substrate.
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Citations
7 Claims
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1. A method of manufacturing a semiconductor device comprising:
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a. preparing a substrate; b. forming electrically active regions in said substrate; c. depositing a blocking layer over said substrate; d. depositing an electrode layer over said blocking layer; and e. patterning said electrode layer to form landing and address electrodes separated by a gap, wherein said gap and said blocking layer are aligned such that light incident said semiconductor device which passes through said gap is blocked by said blocking layer. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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