Image detector
First Claim
1. An image detector for sensing radiation, comprising an array of sensors formed from layers of material provided on a substrate and separated from a biasing electrode by a radiation conversion layer in which charge carriers are generated in response to incident radiation, each sensor comprising a collecting electrode for collecting charge carriers generated in the radiation conversion layer, a capacitor for storing charge and a switching element having at least first and second electrodes on a first insulating layer with one of the first and second electrodes being coupled to the collecting electrode for enabling charge carriers stored at the sensor to be read out, each collecting electrode extending laterally beyond the associated switching element on a second insulating layer provided substantially above said first insulating layer to form the associated capacitor with an underlying reference electrode separate from the collecting electrode by the second insulating layer.
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Accused Products
Abstract
An image detector (1, 1a) has an array (2) of sensors (3) formed from layers of material provided on a substrate (4) and separated from a biasing electrode (5) by a radiation conversion layer (6) in which charge carriers are generated in response to incident radiation. Each sensor has a collecting electrode (7a, 7b) for collecting charge carriers generated in the radiation conversion layer (6), a capacitor (c) for storing charge and a switching element (8) having at least first and second electrodes (9 and 10) with one (10) of the first and second electrodes being coupled to the collecting electrode (7a, 7b) for enabling charge carriers stored at the sensor (3) to be read out. Each collecting electrode (7a, 7b) extends laterally beyond the associated switching element (8) on an insulating layer (12a, 12b) provided over the switching elements to form the associated capacitor (c) with an underlying reference electrode (12a, 12b) separated from the collecting electrode (7a, 7b) by the insulating layer (11a, 11b).
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Citations
20 Claims
- 1. An image detector for sensing radiation, comprising an array of sensors formed from layers of material provided on a substrate and separated from a biasing electrode by a radiation conversion layer in which charge carriers are generated in response to incident radiation, each sensor comprising a collecting electrode for collecting charge carriers generated in the radiation conversion layer, a capacitor for storing charge and a switching element having at least first and second electrodes on a first insulating layer with one of the first and second electrodes being coupled to the collecting electrode for enabling charge carriers stored at the sensor to be read out, each collecting electrode extending laterally beyond the associated switching element on a second insulating layer provided substantially above said first insulating layer to form the associated capacitor with an underlying reference electrode separate from the collecting electrode by the second insulating layer.
Specification