Probe apparatus having reduced misalignment of conductive needles
First Claim
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1. A probe apparatus, comprising:
- a probe group supporting member having a substrate surface on which probes having conductive needles are formed;
wherein main bodies of said probes are constructed from composite beams formed of silicon, said composite beams being formed by joining a plurality of arms which extend from the substrate of the probe group supporting member, and which overhang said substrate in a direction parallel to the surface of said substrate, said composite beams further comprising a first arm which functions as a first wiring arrangement and a second arm which functions as a second wiring arrangement;
wherein said first arm further comprises an electrode that generates an electrostatic force between said arm and said substrate, said electrode being connected either to said first wiring arrangement or between said arm and a member other than said substrate;
wherein said first arm and said second arm are insulated from each other by either a PNP junction or an NPN junction; and
wherein said conductive needles are attached perpendicular to the substrate surface at a point on each of said composite beams.
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Abstract
A probe apparatus includes a probe group supporting member having a substrate on which probes having conductive needles are formed. The main bodies of the probes are constructed from composite beams, e.g. L-shaped beams, formed by joining a plurality of arms, e.g. first and second arms, which extend from the substrate of the probe group supporting member, and which overhang the substrate in a direction parallel to the surface of the substrate. The conductive needles are attached perpendicular to the substrate surface at a selected point on each of the composite beams.
20 Citations
11 Claims
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1. A probe apparatus, comprising:
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a probe group supporting member having a substrate surface on which probes having conductive needles are formed; wherein main bodies of said probes are constructed from composite beams formed of silicon, said composite beams being formed by joining a plurality of arms which extend from the substrate of the probe group supporting member, and which overhang said substrate in a direction parallel to the surface of said substrate, said composite beams further comprising a first arm which functions as a first wiring arrangement and a second arm which functions as a second wiring arrangement; wherein said first arm further comprises an electrode that generates an electrostatic force between said arm and said substrate, said electrode being connected either to said first wiring arrangement or between said arm and a member other than said substrate; wherein said first arm and said second arm are insulated from each other by either a PNP junction or an NPN junction; and wherein said conductive needles are attached perpendicular to the substrate surface at a point on each of said composite beams. - View Dependent Claims (2, 3)
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4. A probe apparatus having reduced misalignment of conductive needles, comprising:
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a probe group supporting member in which probes having conductive needles are formed on a substrate surface; wherein main bodies of said probes are constructed from folded-back beams which overhang the substrate of the probe group supporting member in a direction parallel to the surface of said substrate; wherein a member, other than the substrate, and said probes interact through electrostatic force; wherein initial end parts of said folded-back beams are fastened to the surface of the substrate of the probe group supporting member; and wherein said conductive needles are attached to final end parts of the folded-back beams. - View Dependent Claims (5, 6, 7, 8, 9, 10, 11)
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Specification