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Electrostatic chuck

  • US 5,600,530 A
  • Filed: 06/10/1994
  • Issued: 02/04/1997
  • Est. Priority Date: 08/04/1992
  • Status: Expired due to Fees
First Claim
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1. An electrostatic chuck comprising:

  • a. first and second members;

    b. an electrode comprising a metal interposed between and bonding portions of the first and second members by chemically reacting with them; and

    c. a non-conductive material, selected from the group consisting of inorganic dielectric filler and organic dielectric filler, interposed between portions of the first and second members not bonded by the metal.

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