Process for forming vertical gap in a thin film magnetic transducer

• US 5,600,880 A
• Filed: 05/12/1995
• Issued: 02/11/1997
• Est. Priority Date: 03/07/1994
• Status: Expired due to Fees

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Santini, Hugo A. E., Snyder, Clinton D.
• Primary Examiner(s): Hall, Carl E.
• Application Number:
  US08/440,513
• Time in Patent Office: 641 Days
• Field of Search: 29/603.13, 29/603.14, 29/603.15, 29/603.16, 360/120, 360/125
• US Class Current: 29/603.14
• CPC Class Codes: G11B 5/232 Manufacture of gap
• CPC Class Codes: G11B 5/3163 Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
• CPC Class Codes: G11B 5/3183 intersecting the gap plane, e.g. "horizontal head structure"
• CPC Class Codes: Y10T 29/49044 Plural magnetic deposition layers
• CPC Class Codes: Y10T 29/49046 with etching or machining of magnetic material

Abstract

In the manufacture of a thin-film magnetic head having a vertical gap, auxiliary support is provided at the ends of a gap wall prior to formation of the magnetic poles. In a preferred embodiment, a pit is defined in a substrate and a release layer is deposited on the substrate followed by a layer of alumina. A recess is then etched through the alumina layer to the release layer in the pit. A partial layer of polymer or metal is deposited with a vertical edge across the median of the pit and recess. A layer of nonmagnetic wall material such as silicon oxide is deposited which after etching leaves a wall against the vertical edge of the partial layer. After removal of the partial layer, a vertical wall extends transversely across the recess and pit with the ends of the wall anchored and supported at the recess sidewalls. Alternatively, a pedestal may be provided in the recess to support each end of the wall. The magnetic poles are then formed simultaneously on either side of the wall. Other thin film layers are then deposited in an appropriate sequence of steps to complete the desired vertical gap, horizontal head structure. The substrate is separated from the completed thin film structure by dissolving the release layers.

Claims

1. A method for fabricating a magnetic transducer comprising the steps of:

providing a substrate having a release layer formed on a surface thereof, said substrate and release layer defining a pit having sidewalls;

forming a vertical wall of a nonmagnetic material in said pit with its ends supported by the sidewalls of the pit;

forming first and second pole pieces of a magnetic material, said pole pieces each having a pole tip disposed in the pit in opposing relationship to each other separated by said vertical wall disposed therebetween defining a magnetic gap;

magnetically coupling the pole pieces; and

separating the substrate from the magnetic transducer formed thereon by removing the release layer.

2. The method as in claim 1 wherein said pit includes a recess formed therein in which said pole tips are disposed.

3. The method as in claim 1 wherein the step of forming said vertical wall comprises the steps of:

depositing a layer of a first material with a vertical edge formed transversely across the pit;

depositing a layer of a second material over said vertical edge of the layer of the first material; and

removing horizontal portions of said layer of second material and said layer of first material thereby leaving the portion of said layer of second material deposited over said vertical edge thus forming said vertical wall extending transversely across said pit with its ends supported by said sidewalls of the pit.

4. The method as in claim 1 wherein the step of forming said vertical wall comprises the steps of:

depositing a first layer of a first material with a vertical edge formed transversely across said pit;

depositing a layer of a second material over said layer of first material, said second material being deposited over said vertical edge;

removing horizontal portions of said layer of second material leaving that portion of said second material deposited over said vertical edge thereby forming said vertical wall; and

depositing a second layer of said first material over said release layer and pit including said first layer of said first material.

5. The method of claim 4 including the further step of patterning and etching said first and second layers of first material for forming a plating frame for said first and second pole pieces.

6. The method as in claim 1 further comprising the steps of:

forming magnetic induction coils and electrical leads for said coils, said coils inductively coupled to said pole pieces; and

forming a suspension member integral and unitary to said pole pieces.

7. The method as in claim 1 wherein said magnetic material comprises a material selected from the group consisting of nickel, iron, cobalt, nickel-iron and magnetic alloys of nickel, iron or cobalt.

8. The method as in claim 7 wherein said magnetic material comprises nickel-iron.

9. The method as in claim 4 wherein said first material comprises a metallic material.

10. The method of claim 4 wherein said first material comprises a polymeric material.

11. The method of claim 4 wherein said second material comprises a dielectric material.

12. The method of claim 4 wherein said second material is selected from the group consisting of aluminum oxide and silicon oxide.

13. A method for manufacturing a magnetic disk storage system comprising the steps of:

providing at least one magnetic storage disk;

providing a drive mechanism for rotating said magnetic storage disk;

providing an actuator mechanism for moving a magnetic transducer supported on a suspension member close to the surface of said magnetic storage disk;

manufacturing said magnetic transducer by the steps of;

forming a release layer formed on a substrate, said substrate and release layer defining a pit having sidewalls;

forming a vertical wall of nonmagnetic material in said pit with its ends supported by the sidewalls of the pit;

forming first and second pole pieces of a magnetic material, said pole pieces each having a pole tip disposed in the pit in opposing relationship to each other separated by said vertical wall disposed therebetween defining a magnetic gap;

magnetically coupling the pole pieces; and

separating the substrate from the magnetic transducer formed thereon by removing the release layer.

14. A method as in claim 13 wherein said pit includes a recess formed therein in which said pole tips are disposed.

15. A method as in claim 13 wherein the step of forming said vertical wall comprises the steps of:

depositing a layer of a first material with a vertical edge formed transversely across the pit;

depositing a layer of a second material over said vertical edge of said layer of first material;

removing horizontal portions of said layer of second material thereby leaving the portion of said layer of second material deposited over said vertical edge thus forming said vertical wall extending transversely across said pit; and

depositing a second layer of said first material over said release layer and said pit including said first layer of first material.

16. A method as in claim 15 including the further step of patterning and etching said first and second layers of first material for forming a plating frame for said first and second pole pieces.

17. A method as in claim 13 wherein said magnetic transducer is manufactured integral and unitary with said suspension member.