Nitride based semiconductor device and manufacture thereof

• US 5,602,418 A
• Filed: 09/22/1994
• Issued: 02/11/1997
• Est. Priority Date: 08/07/1992
• Status: Expired due to Term

• Current Assignee: Asahi Kasei Kogyo Kabushiki Kaisha
• Original Assignee: Asahi Kasei Kogyo Kabushiki Kaisha
• Inventors: Hirai, Tadahiko, Imai, Hideaki, Miyata, Kunio
• Primary Examiner(s): Fahmy, Wael
• Assistant Examiner(s): Abraham, Fetsum
• Application Number:
  US08/211,322
• Time in Patent Office: 873 Days
• Field of Search: 257/627, 257/82, 257/85, 257/89, 257/90, 257/96, 257/184, 257/189, 437/16, 437/23, 437/105, 437/127, 437/129, 437/132, 437/133, 372/7, 372/42, 372/43
• US Class Current: 257/627
• CPC Class Codes: H01L 21/0237 Materials
• CPC Class Codes: H01L 21/0242 Crystalline insulating materials
• CPC Class Codes: H01L 21/02433 Crystal orientation
• CPC Class Codes: H01L 21/02458 Nitrides
• CPC Class Codes: H01L 21/02505 consisting of more than two layers
• CPC Class Codes: H01L 21/0251 Graded layers
• CPC Class Codes: H01L 21/0254 Nitrides
• CPC Class Codes: H01L 21/02579 P-type
• CPC Class Codes: H01L 21/0262 Reduction or decomposition of gaseous compounds, e.g. CVD
• CPC Class Codes: H01L 21/02631 Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation
• CPC Class Codes: H01L 31/1852 comprising a growth substrate not being an AIIIBV compound
• CPC Class Codes: H01L 33/007 comprising nitride compounds
• CPC Class Codes: Y02E 10/544 Solar cells from Group III-V materials
• CPC Class Codes: Y02P 70/50 Manufacturing or production processes characterised by the final manufactured product

Abstract

A nitride semiconductor device is made using a molecular beam epitaxy growth apparatus having a gas source for supplying a compound including gaseous nitrogen, solid body sources for supplying Group III constituents, and sources for supplying n-type and p-type dopants. A gaseous state compound containing nitrogen, and a Group III constituent is supplied to the surface of a substrate, wherein the substrate is at a temperature of 300° to 1000° C. and is under a pressure of less than 10^-5 Torr, to produce a first layer of oriented polycrystalline nitride semiconductor on the substrate at a growth rate of 0.1 to 20 Angstroms/second. Subsequently, a gaseous state compound containing nitrogen and a Group III constituent is supplied to the surface of the first layer of the substrate to produce a single crystal nitride semiconductor layer on the first layer at a growth rate of 0.1 to 10 Angstroms/second. The resultant nitride semiconductor device comprises a substrate, a first layer of an oriented polycrystalline nitride semiconductor of less than 5000 Angstroms thickness and disposed directly on the substrate, an operating layer of a single crystal nitride semiconductor disposed directly on the first layer, and at least two electrical terminals connected at predetermined locations, with at least one terminal being connected to the first layer.

Claims

1. A nitride semiconductor device comprising:

a substrate;

a first layer of an oriented polycrystalline nitride semiconductor of less than 5000 Angstroms thickness disposed directly on said substrate;

an operating layer of a single crystal nitride semiconductor disposed directly on said first layer; and

at least two electrical terminals connected at predetermined locations, at least one of said terminals being connected directly to said first layer.

2. The nitride semiconductor device as claimed in claim 1, wherein at least one of the orientations of the periodic arrangement of the atoms on the surface of said substrate, and at least one of the orientations of the crystal axes of the lattice face of said first layer nitride semiconductor in direct contact with said substrate coincide, and the mismatch of an integer multiple (from 1 to 10) of the atomic spacing of the latter orientation and the atomic spacing of the former orientation is within 5%.

3. The nitride semiconductor device as claimed in claim 2, wherein said substrate is a transparent single crystal substrate having a transmissivity in the 360 to 800 nm wave length region of at least 80%.

4. The nitride semiconductor device as claimed in claim 3, wherein said transparent single crystal substrate is a sapphire substrate.

5. The nitride semiconductor device as claimed in claim 4, wherein a face of said transparent single crystal substrate is the sapphire (01 1 2) R face.

6. The nitride semiconductor device as claimed in claim 5, wherein a face of said transparent single crystal substrate is inclined at an angle of 9.2 degrees to the sapphire (01 1 2) R face towards the (2 110) A face.

7. The nitride semiconductor device as claimed in claim 1, wherein said single crystal nitride semiconductor comprises nitrogen and at least one Group III constituent selected from aluminum, gallium, and indium.

8. The nitride semiconductor device as claimed in claim 1, wherein the C axis orientation of a crystal axis of the oriented polycrystalline nitride semiconductor of the first layer is parallel to the substrate surface.

9. The nitride semiconductor device as claimed in claim 1, wherein said first layer of an oriented polycrystalline nitride semiconductor has a composition graded structure, with the structure changing gradually from the portion in contact with the substrate to the portion in contact with the operating layer to finally give a required operating layer composition.

10. The nitride semiconductor device as claimed in claim 1, wherein said first layer of an oriented polycrystalline nitride semiconductor has a laminated structure of alternate differing composition nitride semiconductor layers each of less than 100 Angstroms thickness.

11. The nitride semiconductor device as claimed in claim 1, wherein said first layer of an oriented polycrystalline nitride semiconductor is doped with n-type dopant.

12. The nitride semiconductor device as claimed in claim 1, wherein said single crystal nitride semiconductor operating layer comprises a layer having a combination of at least two single crystal nitride semiconductors selected from the group of p-type, i-type and n-type single crystal nitride semiconductors.

13. The nitride semiconductor device as claimed in claim 1, wherein said single crystal nitride semiconductor operating layer comprises at least two layers having a combination of at least two single crystal nitride semiconductors selected from the group of p-type, i-type and n-type single crystal nitride semiconductors.

14. The nitride semiconductor device as claimed in claim 12 or claim 13, wherein a thickness of said single crystal nitride semiconductor operating layer is not more than 5 microns.

15. The nitride semiconductor device as claimed in claim 14, wherein said single crystal nitride semiconductor operating layer comprises at least one layer of p-type, i-type and n-type single crystal nitride semiconductor, and a terminal for applying a voltage is connected to said p-type or i-type single crystal nitride semiconductor layer.

16. The nitride semiconductor device as claimed in claim 15, wherein a surface layer is made from said p-type or i-type single crystal nitride semiconductor, and a terminal having a pattern for uniformly applying a voltage to produce a light, is disposed over a region of said surface layer not exceeding 50% of the area thereof.

17. The nitride semiconductor device as claimed in claim 14, wherein said single crystal nitride semiconductor operating layer comprises an i-type single crystal nitride semiconductor having a thickness of not more than 500 angstroms, an n-type single crystal nitride semiconductor having a thickness of not more than 3 microns, and a terminal for applying a voltage is disposed on said i-type single crystal nitride semiconductor layer.

18. The nitride semiconductor device as claimed in claim 14, wherein said single crystal nitride semiconductor operating layer comprises at least a p-type single crystal nitride semiconductor having a thickness of not more than 2 microns, and an n-type single crystal nitride semiconductor having a thickness of not more than 3 microns, and a terminal for applying a voltage is disposed on said p-type single crystal nitride semiconductor layer.

19. The nitride semiconductor device as claimed in claim 14, wherein said single crystal nitride semiconductor operating layer comprises at least a p-type single crystal nitride semiconductor, an i-type single crystal nitride semiconductor, and an n-type single crystal nitride semiconductor, and a terminal for applying a voltage is disposed on said p-type single crystal nitride semiconductor layer, wherein a current is produced in said operating layer when said operating layer is illuminated with light.

20. A method of making a nitride semiconductor device using a molecular beam epitaxy crystal growth apparatus having a gas source for supplying a compound including nitrogen in a gaseous state, a solid body source for supplying Group III constituents, and a source for supplying n-type and p-type dopants, comprising the steps of:

supplying a gaseous state compound containing nitrogen, and a Group III constituent to the surface of a substrate, with said substrate at a temperature of 300°

to 1000°

C., under a pressure of less than 10^-5 Torr to produce a first layer of an oriented polycrystalline nitride semiconductor on said substrate at a growth rate of 0.1 to 20 Angstroms/second;

supplying a gaseous state compound containing nitrogen, and a Group III constituent to the surface of said first layer with said substrate at a temperature of 300 to 1000°

C., under a pressure of less than 10^-5 Torr to produce a single nitride semiconductor layer on said first layer at a growth rate of 0.1 to 10 Angstroms/second;

dry etching predetermined positions on an operating layer comprising at least one of a p-type and an i-type single crystal nitride semiconductor, and an n-type single crystal nitride semiconductor, and predetermined positions on said first layer;

heat treating the device after the dry etching step at a temperature below at least one of the temperature of dissociation of the nitrogen containing gas and the temperature of dissociation of the nitride semiconductor, in at least one of an inert gas and other gases; and

forming terminals on at least two of the predetermined positions of said operating layer, at least one of said terminals being connected directly to said first layer.

21. The method of making a nitride semiconductor device as claimed in claim 20, wherein ammonia, nitrogen triflouride, hydrazine or di methyl hydrazine is used as the compound containing nitrogen.

22. The method of making a nitride semiconductor device according to claim 20, wherein said compound containing nitrogen gas is heated and supplied to the surface of said substrate.

23. The method of making a nitride semiconductor device as claimed in claim 20, wherein nitrogen containing ammonia is used as the compound containing nitrogen, and these are supplied in a plasma gaseous state.

24. The method of making a nitride semiconductor device according to claim 20, wherein a partial pressure of a carbon containing compound inside the crystal growth apparatus is less than 10^-8 Torr.