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Low surface energy passivation layer for micromechanical devices

  • US 5,602,671 A
  • Filed: 02/04/1994
  • Issued: 02/11/1997
  • Est. Priority Date: 11/13/1990
  • Status: Expired due to Term
First Claim
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1. An electronic device comprising:

  • at least one address electrode on a substrate;

    at least one landing electrode on said substrate adjacent said address electrode;

    a support layer formed upon said substrate such that at least one gap exists in said support layer exposing said address electrode and said landing electrode;

    at least one hinge formed on said support layer such that said hinge is suspended over said gap;

    at least one deflection element formed upon said at least one hinge and supported over said gap by said hinge, wherein a mutual attraction exists between said deflection element and said landing electrode when said deflection element is in contact with said landing electrode; and

    an oriented monolayer formed upon said landing electrode whereby said mutual attraction between said landing electrode and said deflection element is reduced, wherein said oriented monolayer is comprised of a COOH terminal group attached to said landing electrode, a carbon chain connected to said COOH terminal group by a first end, and a CF3 terminal group connected to a second end of said carbon chain.

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