Prescaler IC testing method and test probe card

• US 5,604,447 A
• Filed: 12/28/1995
• Issued: 02/18/1997
• Est. Priority Date: 12/28/1994
• Status: Expired due to Fees

• Current Assignee: NEC Electronics Corporation (Renesas Electronics Corporation)
• Original Assignee: NEC Corporation
• Inventors: Takano, Isamu
• Primary Examiner(s): Wieder, Kenneth A.
• Assistant Examiner(s): BOWSER, BARRY
• Application Number:
  US08/580,365
• Time in Patent Office: 418 Days
• Field of Search: 324/765, 324/73.1, 324/800, 324/72.5
• US Class Current: 324/754.07
• CPC Class Codes: G01R 31/2831 Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates G01R31/318511 takes precedence; testing during manufacture H01L22/00
• CPC Class Codes: G01R 31/2851 Testing of integrated circuits [IC] G01R31/317 takes precedence; testing individual devices G01R31/26; testing printed circuits G01R31/2801
• CPC Class Codes: G01R 31/31905 Interface with the device under test [DUT], e.g. arrangements between the test head and the DUT, mechanical aspects, fixture

Abstract

A probe card includes an oscillator generating an AC signal, an averaged value detecting circuit receiving a signal outputted from a prescaler IC, for generating an averaged DC signal, and a plurality of switches for changing a flow of a signal among the IC tester, the prescaler IC, the oscillator and the averaged value detecting circuit. The switches is so controlled that the AC signal is supplied to the prescaler IC, and the signal outputted from the prescaler IC is supplied to the averaged value detecting circuit and converted to the averaged DC signal, whereby a non-defective/defective of the AC function of the prescaler IC is discriminated on the basis of the obtained averaged DC signal. The switches are also so controlled that a DC test signal is supplied from the IC tester to the prescaler IC and a DC output signal outputted from the prescaler IC is supplied to the IC tester. Thus, both an AC function test and a DC function test can be carried out on the prescaler IC in the form of a wafer by transferring only DC signals between the IC tester and the probe card.

Claims

1. A prescaler IC testing method using an IC DC tester and a probe card which is connected to the IC tester and on which a prescaler IC to be tested is mounted, the method performing a function test of the prescaler IC in the form of a wafer by transferring DC signals between the IC tester and the probe card, the probe card including an AC signal generating means for generating an AC signal having the frequency lower than a frequency-divided frequency region of said prescaler IC, an averaged value detecting means receiving a signal outputted from said prescaler IC, for generating an averaged DC signal, and a plurality of signal switch means controlled by a control signal from said IC DC tester for changing a flow of a signal among said IC DC tester, said prescaler IC, said AC signal generating means and said averaged value detecting means, the method comprising the step of carrying out the AC test by controlling said signal switch means so that said AC signal generated by said AC signal generating means is supplied to said prescaler IC, and said signal outputted from said prescaler IC is supplied to said averaged value detecting means and converted to said averaged DC signal, whereby a non-defective/defective of said prescaler IC is discriminated on the basis of the obtained averaged DC signal, and the method also comprising the step of carrying out the DC test by controlling said signal switch means so that a DC test signal is supplied from said IC DC tester to said prescaler IC and a DC output signal outputted from said prescaler IC is supplied to said IC DC tester.

2. A prescaler IC testing method claimed in claim 1 wherein said test probe card comprises an AC signal generating means receiving a DC drive control signal from said IC tester for generating an AC signal having a predetermined frequency, a first switch means for supplying an output of said AC signal generating circuit to said prescaler IC, a second switch means receiving a DC test signal from said IC tester to supply the received DC test signal to said prescaler IC, a third switch means receiving a DC output signal from said prescaler IC to supply the received DC output signal to said IC tester, a fourth switch means receiving an AC output signal from said prescaler IC, a pulse width conversion means receiving said AC output signal of said prescaler IC through said fourth switch means, for converting it into a pulse having a predetermined pulse width, and an averaged value detecting means receiving an output of said pulse width conversion means, for outputting an averaged value to said IC DC tester, said first to fourth switch means being controlled by a DC control signal from said IC tester in such a manner that when said first and fourth switched means are in a closed condition, said second and third switch means are in an open condition and said AC test is carried out, and when said second and third switch means are in the closed condition, said first and fourth switched means are in the open condition and said DC test is carried out, whereby both the AC test and the DC test can be carried out by transferring only the DC signals between said IC tester and said test probe card.

3. A prescaler IC testing method claimed in claim 2 wherein said test probe card further includes a bandpass filter means receiving said output of said AC signal generating means, for supplying to said first switch means a signal from which a noise component is removed.

4. A prescaler IC testing method claimed in claim 2 wherein said test probe card further includes a variable attenuating means means receiving said output of said AC signal generating means, and controlled by a DC control signal from said IC tester so as to supply the attenuated signal to said first switch means.

5. A test probe card to be coupled with an IC tester so as to transfer signals between the test probe card and the IC tester, and to enable to perform a function test of the prescaler IC in the form of a wafer, the test probe card comprising an AC signal generating means receiving a DC drive control signal from said IC tester for generating an AC signal having a predetermined frequency, a first switch means for supplying an output of said AC signal generating circuit to said prescaler IC, a second switch means receiving a DC test signal from said IC tester to supply the received DC test signal to said prescaler IC, a third switch means receiving a DC output signal from said prescaler IC to supply the received DC output signal to said IC tester, a fourth switch means receiving an AC output signal from said prescaler IC, a pulse width conversion means receiving said AC output signal of said prescaler IC through said fourth switch means, for converting it into a pulse having a predetermined pulse width, and an averaged value detecting means receiving an output of said pulse width conversion means, for outputting an averaged value to said IC DC tester, said first to fourth switch means being controlled by a DC control signal from said IC tester in such a manner that when said first and fourth switched means are in a closed condition, said second and third switch means are in an open condition and an AC test is carried out, and when said second and third switch means are in the closed condition, said first and fourth switched means are in the open condition and a DC test is carried out, whereby both the AC test and the DC test can be carried out by transferring only the DC signals between said IC tester and said test probe card.

6. A test probe card claimed in claim 5 further including a bandpass filter means receiving said output of said AC signal generating means, for supplying to said first switch means a signal from which a noise component is removed.

7. A test probe card claimed in claim 5 further including a variable attenuating means means receiving said output of said AC signal generating means, and controlled by a DC control signal from said IC tester so as to supply the attenuated signal to said first switch means.