Batch deposition of polymeric ion sensor membranes
First Claim
1. A method of batch fabricating ion-selective sensors, the method comprising the steps of:
- installing a mask on a semiconductor substrate, the mask having at least one aperture therethrough having a set configuration which corresponds to a chosen membrane configuration;
applying a polymeric membrane paste to the mask, the polymeric membrane being in the form of a mixture of a polyurethane polymer, hydroxylated poly(vinyl chloride) copolymer, ionophore, and a plasticizer, as polymeric membrane components dissolved completely in a second solvent after a first solvent has been removed from the polymeric membrane paste;
drawing a squeegee across said mask wherein the polymeric membrane paste is urged into the aperture of the mask and into communication with the semiconductor substrate; and
curing the deposited polymeric membrane paste to form a polymeric membrane having a set ion-selective characteristic.
1 Assignment
0 Petitions
Accused Products
Abstract
Screen printing technology is employed in the batch fabrication of the contacts and polymeric membranes of solid-state ion-selective sensors. The process achieves high yield with very reproducible results. Moreover, membrane thickness can easily be predetermined, as it is directly related to the thickness of the screen or stencil. The process of the present invention is compatible with many integrated circuit manufacturing technologies, including CMOS fabrication. Advantageous polymeric membrane paste compositions include a polyurethane/hydroxylated poly(vinyl chloride) compound and a silicone-based compound in appropriate solvent systems to provide screen-printable pastes of the appropriate viscosity and thixotropy.
44 Citations
14 Claims
-
1. A method of batch fabricating ion-selective sensors, the method comprising the steps of:
-
installing a mask on a semiconductor substrate, the mask having at least one aperture therethrough having a set configuration which corresponds to a chosen membrane configuration; applying a polymeric membrane paste to the mask, the polymeric membrane being in the form of a mixture of a polyurethane polymer, hydroxylated poly(vinyl chloride) copolymer, ionophore, and a plasticizer, as polymeric membrane components dissolved completely in a second solvent after a first solvent has been removed from the polymeric membrane paste; drawing a squeegee across said mask wherein the polymeric membrane paste is urged into the aperture of the mask and into communication with the semiconductor substrate; and curing the deposited polymeric membrane paste to form a polymeric membrane having a set ion-selective characteristic. - View Dependent Claims (2, 3, 4)
-
-
5. A method of batch fabricating ion-selective sensors, the method comprising the steps of:
-
installing a metallic mask on a semiconductor substrate on which are simultaneously formed a plurality of the ion-selective sensors, the mask being patterned to have a plurality of apertures therethrough, each having a set configuration which corresponds to a chosen membrane configuration, and each being located as to be associated with one of the ion-selective sensors; applying a polymeric membrane paste to the mask, the polymeric membrane being in the form of a mixture of a polyurethane polymer, hydroxylated poly(vinyl chloride) copolymer, ionophore, and a plasticizer, as polymeric membrane components dissolved completely in a second solvent after a first solvent has been removed from the polymeric membrane paste; urging the polymeric membrane paste into the pattern of apertures of the mask and into communication with the semiconductor substrate; and curing the deposited polymeric membrane paste to form a polymeric membrane having a set ion-selective characteristic. - View Dependent Claims (6)
-
-
7. A solid-state ion-selective sensor formed by the process of:
-
installing a metallic mask on a semiconductor substrate on which are simultaneously formed a plurality of ion-selective sensors, the mask having a pattern formed of a plurality of apertures therethrough, each such aperture having a set configuration which corresponds to a chosen membrane configuration for a respectively associated one of the ion-selective sensors; applying a polymeric membrane paste to the mask, the polymeric membrane being in the form of a mixture of a polyurethane polymer, hydroxylated poly(vinyl chloride) copolymer, ionophore, and a plasticizer, as polymeric membrane components dissolved completely in a second solvent after a first solvent has been removed from the polymeric membrane paste; urging the polymeric membrane paste into the pattern of apertures of the mask and into communication with the semiconductor substrate; and curing the deposited polymeric membrane paste to form a polymeric membrane having a set ion-selective characteristic. - View Dependent Claims (8)
-
-
9. A process for forming a polymeric membrane paste, the process comprising the steps of:
-
mixing polyurethane, hydroxylated poly(vinyl chloride) copolymer ionophore, and a plasticizer, as polymeric membrane components, in a first solvent have a first boiling point in order to dissolve completely the components; adding a second solvent having a second boiling point higher than the first boiling point; and removing the first solvent. - View Dependent Claims (10, 11)
-
-
12. A process for forming a polymeric membrane paste, the process comprising the steps of:
-
mixing silicone rubber and a lipophilic additive in a solvent in order to completely dissolve the components; and evaporating the solvent. - View Dependent Claims (13, 14)
-
Specification