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Air filtering within clean environments

  • US 5,607,647 A
  • Filed: 10/04/1994
  • Issued: 03/04/1997
  • Est. Priority Date: 12/02/1993
  • Status: Expired due to Term
First Claim
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1. An air filtering system for filtering an air stream for use in a clean environment to effectively remove a process-limiting molecular contaminant therefrom comprising sequentially arranged upstream and downstream air filtering beds,said upstream air filtering bed being constructed and arranged for filtering air for use in a clean environment, being positioned to receive an air stream from the clean environment and comprising activated carbon particles in the size range of 20×

  • 140 mesh impregnated with an upstream chemically active reagent of sulfuric acid in a quantity selected to reduce the concentration of a process-limiting molecular contaminant in the air stream to a level below that which is detrimental to a process associated with the clean environment as said air stream passes through the upstream air filtering bed, said upstream chemically active reagent releasing a characteristic volatile component into said air stream at a concentration level that is detrimental to the associated clean environment process, andsaid downstream air filtering bed being constructed and arranged to filter air for use in a clean environment, being positioned to receive the air stream that has passed through said upstream air filtering bed and comprising activated carbon particles in the size range of 20×

    140 mesh impregnated with a downstream reagent selected to reduce the concentration of the characteristic volatile component released by said upstream reagent of sulfuric acid to a level below that which is detrimental to the associated clean environment process.

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