Bidirectional semiconductor switch

• US 5,608,237 A
• Filed: 03/13/1995
• Issued: 03/04/1997
• Est. Priority Date: 03/14/1994
• Status: Expired due to Term

• Current Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Original Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Inventors: Katoh, Toshimitu, Aizawa, Yoshiaki
• Primary Examiner(s): Meier, Stephen
• Assistant Examiner(s): Wallace, Valencia Martin
• Application Number:
  US08/403,519
• Time in Patent Office: 722 Days
• Field of Search: 257/212, 257/119, 257/132, 257/121
• US Class Current: 257/132
• CPC Class Codes: H01L 2224/05554 being square
• CPC Class Codes: H01L 2224/06181 On opposite sides of the body
• CPC Class Codes: H01L 2224/45124 Aluminium (Al) as principal constituent
• CPC Class Codes: H01L 2224/48091 Arched
• CPC Class Codes: H01L 2224/48137 the bodies being arranged next to each other, e.g. on a common substrate
• CPC Class Codes: H01L 2224/48247 connecting the wire to a bond pad of the item
• CPC Class Codes: H01L 2224/49171 Fan-out arrangements
• CPC Class Codes: H01L 2224/8592 Applying permanent coating, e.g. protective coating
• CPC Class Codes: H01L 23/3178 Coating or filling in grooves made in the semiconductor body
• CPC Class Codes: H01L 29/7395 Vertical transistors, e.g. vertical IGBT
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/00012 Relevant to the scope of the group, the symbol of which is combined with the symbol of this group
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
• CPC Class Codes: H01L 2924/01019 Potassium [K]
• CPC Class Codes: H01L 2924/01079 Gold [Au]
• CPC Class Codes: H01L 2924/12032 Schottky diode
• CPC Class Codes: H01L 2924/12041 LED
• CPC Class Codes: H01L 2924/1301 Thyristor
• CPC Class Codes: H01L 2924/1305 Bipolar Junction Transistor [BJT]
• CPC Class Codes: H01L 2924/13055 Insulated gate bipolar transistor [IGBT]
• CPC Class Codes: H01L 2924/13091 : Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
• CPC Class Codes: H01L 2924/181 : Encapsulation
• CPC Class Codes: H03K 17/567 : Circuits characterised by the use of more than one type of semiconductor device, e.g. BIMOS, composite devices such as IGBT
• CPC Class Codes: H03K 17/6872 : using complementary field-effect transistors
• CPC Class Codes: H03K 2217/0036 : Means reducing energy consumption

Abstract

A bidirectional semiconductor switch employs two insulated gate semiconductor devices such as insulated gate bipolar transistors (IGBTs) that are connected oppositely in parallel, with the collector of one of the IGBTs being connected to the emitter of the other. The gates of the IGBTs are biased by gate controllers that are potentially independent of each other. The semiconductor switch is capable of controlling a direct current as well as an alternating current at a low ON-state voltage, reducing a conduction loss, and improving efficiency.

Claims

1. A bidirectional semiconductor switch comprising:

(a) a first insulated gate semiconductor device having a first main electrode, a second main electrode, a first gate insulating film disposed between the first and second main electrodes, and a first gate electrode formed on the first gate insulating film;

(b) a second insulated gate semiconductor device having a first main electrode connected to the second main electrode of said first insulated gate semiconductor device, a second main electrode connected to the first main electrode of said first insulated gate semiconductor device, a second gate insulating film disposed between the first and second main electrodes of the second insulated gate semiconductor device, and a second gate electrode formed on the second gate insulating film;

(c) a first gate controller connected to the first gate electrode for capacitively controlling the current flowing between the first and second main electrodes of said first insulated gate semiconductor device; and

(d) a second gate controller connected to the second gate electrode for capacitively controlling the current flowing between the first and second main electrodes of said second insulated gate semiconductor device.

2. A bidirectional semiconductor switch as recited in claim 1, wherein said first and second insulated gate semiconductor devices are a first IGBT and a second IGBT, respectively.

5. A bidirectional semiconductor switch as recited in claim 1, wherein said first and second gate controllers are light-triggered controllers for providing photovoltaic forces to the first and second gate electrodes in response to light emitted from a light emitting element electrically isolated from the first and second gate controller.

6. A bidirectional semiconductor switch as recited in claim 5, wherein said first and second gate controllers include each at least a photodiode array.

3. A bidirectional semiconductor switch comprising:

(a) a first IGBT having a first emitter layer, a first emitter electrode on the first emitter layer and on a first base layer, a first gate insulating film on the first base layer, a first gate electrode on the first gate insulating film, a first anode layer, and a first anode electrode on the first anode layer;

(b) a second IGBT having a second emitter layer, a second emitter electrode on the second emitter layer connected to the first anode electrode, a second base layer, a second gate insulating film on the second base layer, a second gate electrode on the second gate insulating film, a second anode layer, and a second anode electrode on the second anode layer connected to the first emitter electrode;

(c) a first gate controller connected between the first emitter electrode and the first gate electrode;

(d) a second gate controller connected between the second emitter electrode and the second gate electrode,

wherein the first and second IGBTs consist of the emitter layers of the same conductivity type and the base layers of the same conductivity type.

17. A bidirectional semiconductor switch as recited in claim 3, wherein the first and second IGBTs are lateral IGBTs (LIGBTs) that are integrated on a semiconductor substrate.

4. A bidirectional semiconductor switch comprising:

(a) an n-channel IGBT having a first emitter electrode, a first gate electrode, and a first anode electrode;

(b) a p-channel IGBT having a second emitter electrode connected to the first emitter electrode, a second gate electrode, and a second anode electrode connected to the first anode electrode;

(c) a first gate controller; and

(d) a second gate controller,

wherein said first gate controller is connected between the first emitter electrode and the first gate electrode and said second gate controller is connected between the second emitter electrode and the second gate electrode.

18. A bidirectional semiconductor switch as recited in claim 4, wherein:

the n-channel IGBT consists of at least a p-type base layer formed on the surface of a high specific-resistance semiconductor substrate, an n⁺ -type emitter layer formed inside the p-type base layer, a gate electrode formed on a gate insulation film that is formed on a part of the p-type base layer, and a p⁺ -type anode layer formed on the bottom surface of the semiconductor substrate; and

the p-channel IGBT consists of at least an n-type base layer formed on the top surface of the semiconductor substrate, a p⁺ -type emitter layer formed inside the n-type base layer, a gate electrode formed on a gate insulation film that is formed on a part of the n-type base layer, and an n⁺ -type anode layer formed on the bottom surface of the semiconductor substrate.

19. A bidirectional semiconductor switch as recited in claim 18, wherein a plurality of p⁺ -type anode layers are regularly arranged along the bottom surface of the semiconductor substrate at intervals of L with L being smaller than 2Ln where Ln is an electron diffusion length.

7. A bidirectional semiconductor switch comprising:

(a) a first IGBT having a first emitter, a first gate, and a first anode electrode;

(b) a second IGBT having a second emitter connected to the first anode electrode, a second gate electrode, and a second anode electrode connected to the first emitter electrode;

(c) a first gate controller connected to the first gate electrode; and

(d) a second gate controller connected to the second gate electrode,

wherein the first and second IGBTs are integrated on a same semiconductor substrate.

8. A bidirectional semiconductor switch comprising:

(a) a first IGBT having a first emitter, a first gate, and a first anode electrode;

(b) a second IGBT having a second emitter connected to the first anode electrode, a second gate electrode, and a second anode electrode connected to the first emitter electrode;

(c) a first gate controller connected to the first gate electrode; and

(d) a second gate controller connected to the second gate electrode,

wherein the first and second IGBTs and said first and second gate controllers are mounted on a single ceramic substrate, or on a single semi-insulated metal substrate.

9. A bidirectional semiconductor switch comprising:

(a) a first IGBT having a first emitter, a first gate, and a first anode electrode;

(b) a second IGBT having a second emitter connected to the first anode electrode, a second gate electrode, and a second anode electrode connected to the first emitter electrode;

(c) a first gate controller connected to the first gate electrode; and

(d) a second gate controller connected to the second gate electrode,

wherein;

the first IGBT is mounted on a first lead frame;

the second IGBT is mounted on a second lead frame;

said first and second gate controllers are mounted on a third lead frame; and

the first, second, and third lead frames are packed in resin to form a single package.

10. A bidirectional semiconductor switch as recited in claim 9, further comprising a light emitting element mounted on a fourth lead frame, wherein said first and second gate controllers include each a photodiode array to be irradiated with light from the light emitting element, and the first, second, third, and fourth lead frames are packed in resin to form a single package.

11. A bidirectional semiconductor switch as recited in claim 10, wherein the light emitting element and photodiode arrays are packed in transparent rubber or gel silicon resin.

12. A bidirectional semiconductor switch as recited in claim 11, wherein the light emitting element and photodiode arrays are arranged to face each other so that light from the light emitting element directly irradiates the photodiode arrays.

13. A bidirectional semiconductor switch comprising:

(a) a first IGBT having a first emitter, a first gate, and a first anode electrode;

(b) a second IGBT having a second emitter connected to the first anode electrode, a second gate electrode, and a second anode electrode connected to the first emitter electrode;

(c) a first gate controller connected to the first gate electrode; and

(d) a second gate controller connected to the second gate electrode,

wherein;

the first IGBT is mounted on a first lead frame;

the second IGBT is mounted on a second lead frame;

said first gate controller is mounted on a third lead frame;

said second gate controller is mounted on a fourth lead frame; and

the first, second, third, and fourth lead frames are packed in resin to form a single package.

14. A bidirectional semiconductor switch as recited in claim 13, further comprising a light emitting element mounted on a fifth lead frame, wherein said first and second gate controllers include each a photodiode array to be irradiated with light from the light emitting element, and the first to fifth lead frames are packed in resin to form a single package.

15. A bidirectional semiconductor switch as recited in claim 14, wherein the light emitting element and photodiode arrays are packed in transparent rubber or gel silicon resin.

16. A bidirectional semiconductor switch as recited in claim 14, further comprising a second light emitting element mounted on a sixth lead frame, wherein the light emitting element and said first gate controller are packed in first transparent rubber or gel silicon resin, and the second light emitting element and said second gate controller are packed in second transparent rubber or gel silicon resin, and the first and second transparent rubber or gel silicon resin are packed in another resin to accommodate the first to sixth lead frames in the same package.

20. A bidirectional semiconductor switch comprising:

(a) a first IGBT formed on a first semiconductor chip, having a first emitter, a first gate, and a first anode electrode;

(b) a second IGBT formed on a second semiconductor chip, having a second emitter connected to the first anode electrode, a second gate electrode and a second anode electrode connected to the first emitter electrode;

(c) a first gate controller connected to the first gate electrode; and

(d) a second gate controller connected to the second gate electrode,

wherein each side of the first and second semiconductor chips is covered with a diffusion layer of high impurity concentration.

21. A bidirectional semiconductor switch comprising:

(a) a first IGBT formed on a first semiconductor chip, having a first emitter, a first gate, and a first anode electrode;

(b) a second IGBT formed on a second semiconductor chip, having a second emitter connected to the first anode electrode, a second gate electrode, and a second anode electrode connected to the first emitter electrode;

(c) a first gate controller connected to the first gate electrode; and

(d) a second gate controller connected to the second gate electrode,

wherein the peripheries of the top and bottom surfaces of the first and second semiconductor chips are beveled by etching, and the beveled surface is covered with a glass layer.

22. A bidirectional semiconductor switch comprising:

(a) a semiconductor substrate of first conductivity type;

(b) a first semiconductor region of second conductivity type formed on a first principal plane of said semiconductor substrate, and a first emitter region of first conductivity type formed inside said first semiconductor region;

(c) a second semiconductor region of second conductivity type formed on a second principal plane opposite to the first principal plane of said semiconductor substrate, and a second emitter region of first conductivity type formed inside said second semiconductor region;

(d) a first gate electrode formed on a gate oxide film that is formed on the surface of said first semiconductor region;

(e) a second gate electrode formed on a gate oxide film that is formed on the surface of said second semiconductor region;

(f) a first main electrode region electrically connected to said first semiconductor region and first emitter region;

(g) a second main electrode region electrically connected to said second semiconductor region and second emitter region;

(h) a first gate controller electrically connected between said first main electrode region and said first gate electrode; and

(i) a second gate controller electrically connected between said second main electrode region and said second gate electrode.

23. A bidirectional semiconductor switch as recited in claim 22, further comprising:

a first anode region of second conductivity type formed adjacent to said second semiconductor region, the impurity concentration of the first anode region being higher than that of said second semiconductor region; and

a second anode region of second conductivity type formed adjacent to said first semiconductor region, the impurity concentration of the second anode region being higher than that of said first semiconductor region.

25. A bidirectional semiconductor switch as recited in claim 22, wherein said first and second gate controllers are driven by light emitted from a light emitting element.

27. A bidirectional semiconductor switch as recited in claim 25, wherein said first and second gate controllers include each at least a photodiode array.

24. A bidirectional semiconductor switch comprising:

(a) a first semiconductor region of second conductivity type formed on a semiconductor substrate of first conductivity type;

(b) second and third semiconductor regions of first conductivity type formed on the surface of said first semiconductor region;

(c) first and second emitter regions of second conductivity type formed inside said second and third semiconductor regions, respectively;

(d) first and second gate electrodes formed on gate oxide films that are formed on the surfaces of said second and third semiconductor regions, respectively;

(e) a first main electrode region electrically connected to said second semiconductor region and first emitter region;

(f) a second main electrode region electrically connected to said third semiconductor region and second emitter region;

(g) a first gate controller electrically connected between said first main electrode region and said first gate electrode; and

(h) a second gate controller electrically connected between said second main electrode region and said second gate electrode.

26. A bidirectional semiconductor switch as recited in claim 24, wherein said first and second gate controllers are driven by light emitted from a light emitting element.