Humidity sensor and a method of producing the humidity sensor
First Claim
1. A humidity sensor, comprising:
- a humidity sensing film on a first surface of a substrate, the humidity sensing film comprised of an alkali metal compound and a metal oxide selected from the group consisting of manganese oxide, lead oxide and mixtures thereof;
at least two electrodes upon the first surface of the substrate and covered by the humidity sensing film;
a fluorine polymer film coating the humidity sensing film; and
terminal parts formed on a second surface of the substrate, wherein one of the terminal parts is electrically coupled to one of the at least two electrodes.
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Abstract
A humidity sensor to detect humidity by utilizing a change in the electric characteristics of the device corresponding to a change in the humidity. A solution containing manganese acetate, lead acetate and potassium acetate is coated on an alumina substrate on which interdigital electrodes are formed, and heat-treatment is carried out to provide a humidity sensor having a humidity sensing film which mainly contains manganese oxide, lead oxide and a compound of the alkali metal. The humidity sensor shows a low impedance and an appropriate dynamic range of the impedance even after being downsized. The humidity sensor shows a quick response and excellent environmental resistance. In addition, the humidity sensor and a humidity measuring circuit are easily produced. Thus, the humidity sensor can be widely used in those fields that require a humidity sensor of a small size, a quick response, high reliability and a low cost such as in portable instruments and the like.
60 Citations
22 Claims
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1. A humidity sensor, comprising:
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a humidity sensing film on a first surface of a substrate, the humidity sensing film comprised of an alkali metal compound and a metal oxide selected from the group consisting of manganese oxide, lead oxide and mixtures thereof; at least two electrodes upon the first surface of the substrate and covered by the humidity sensing film; a fluorine polymer film coating the humidity sensing film; and terminal parts formed on a second surface of the substrate, wherein one of the terminal parts is electrically coupled to one of the at least two electrodes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method for producing a humidity sensor, comprising the steps of:
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attaching at least two electrodes to a first surface of a substrate; coating the at least two electrodes and the first surface of the substrate to form a humidity sensing film comprised of an alkali metal compound and a metal oxide selected from the group consisting of manganese oxide, lead oxide and mixtures thereof; coating the humidity sensing film with a fluorine polymer film; forming a terminal part on a second surface of the substrate; and electrically coupling the terminal part to one of the at least two electrodes. - View Dependent Claims (17, 18, 19, 20, 21, 22)
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Specification