×

Vacuum process apparaus

  • US 5,609,689 A
  • Filed: 06/03/1996
  • Issued: 03/11/1997
  • Est. Priority Date: 06/09/1995
  • Status: Expired due to Fees
First Claim
Patent Images

1. A vacuum process apparatus, which is provided with a plurality of vacuum process chambers for subjecting an object of process to predetermined processes, comprising:

  • a vacuum reserve chamber for delivering the object in a substantially vacuum state to the vacuum process chambers and receiving the processed object substantially at the atmospheric pressure from the vacuum process chambers;

    a cooling table for cooling the processed object in the vacuum reserve chamber; and

    support members arranged so as to support the object over the cooling table with predetermined gaps between the object and the table.

View all claims
  • 2 Assignments
Timeline View
Assignment View
    ×
    ×