Microgyrometer
First Claim
1. A microgyrometer for detecting a rotation about a first direction (z) comprising a plate (1) that is orthogonal to the first direction, suspended to a fixed frame (8) and excited at the resonance frequency of said plate along a second direction (x) perpendicular to the first direction, a rotation about the first direction causing the plate to vibrate about a third direction (y) orthogonal to the first two directions, wherein;
- said plate comprises teeth (9,
10) extending respectively along the second and third directions and engaging, without contact, in grooves (11,
12) integral with said frame, andeach one of said teeth carries lateral metallizations which constitute capacitors (Cx, Cy) with facing metallizations of said grooves.
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Accused Products
Abstract
A microgyrometer for detecting a rotation about a first direction comprises a plate that is orthogonal to the first direction, suspended to a fixed frame and excited at its resonance frequency along a second direction perpendicular to the first direction. A rotation about the first direction causes the plate to vibrate about a third direction orthogonal to the first two directions. The plate comprises teeth extending respectively along the second and third directions and engaging, without contact, in grooves integral with the frame. Each tooth carries lateral metallizations which constitute capacitors with facing metallizations of the grooves.
22 Citations
6 Claims
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1. A microgyrometer for detecting a rotation about a first direction (z) comprising a plate (1) that is orthogonal to the first direction, suspended to a fixed frame (8) and excited at the resonance frequency of said plate along a second direction (x) perpendicular to the first direction, a rotation about the first direction causing the plate to vibrate about a third direction (y) orthogonal to the first two directions, wherein;
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said plate comprises teeth (9,
10) extending respectively along the second and third directions and engaging, without contact, in grooves (11,
12) integral with said frame, andeach one of said teeth carries lateral metallizations which constitute capacitors (Cx, Cy) with facing metallizations of said grooves. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification