E-beam high voltage switching power supply
First Claim
1. A circuit coupled to a voltage source and a current source means, said circuit limiting voltage spikes across two input circuit lines of a voltage spike producing circuit, said circuit comprising:
- a capacitor having a first end connected to said first input circuit line, said first lead of said voltage source and a first lead of said current source means;
a resistor having a first end connected to a second end of said capacitor and having a second end connected to a second lead of said voltage source and a second lead of said current source means; and
a diode having an anode connected to said second end of said capacitor and having a cathode connected to said second input circuit line and a third lead of said current source means, wherein excess current flow is from said first input circuit line through said capacitor and diode to said second input circuit line and wherein voltage across the two circuit lines is clamped to approximately the voltage of said voltage source.
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Accused Products
Abstract
A high power, solid state power supply is described for producing a controllable, constant high voltage output under varying and arcing loads suitable for powering an electron beam gun or other ion source. The present power supply is most useful for outputs in a range of about 100-400 kW or more. The power supply is comprised of a plurality of discrete switching type dc-dc converter modules, each comprising a voltage regulator, an inductor, an inverter for producing a high frequency square wave current of alternating polarity, an improved inverter voltage clamping circuit, a step up transformer, and an output rectifier for producing a dc voltage at the output of each module. The inputs to the converter modules are fed from a common dc rectifier/filter and are linked together in parallel through decoupling networks to suppress high frequency input interactions. The outputs of the converter modules are linked together in series and connected to the input of the transmission line to the load through a decoupling and line matching network. The dc-dc converter modules are phase activated such that for n modules, each module is activated equally 360°/n out of phase with respect to a successive module. The phased activation of the converter modules, combined with the square current waveforms out of the step up transformers, allows the power supply to operate with greatly reduced output capacitance values which minimizes the stored energy available for discharge into an electron beam gun or the like during arcing. The present power supply also provides dynamic response to varying loads by controlling the voltage regulator duty cycle using simulated voltage feedback signals and voltage feedback loops. Circuitry is also provided for sensing incipient arc currents reflected at the output of the power supply and for simultaneously decoupling the power supply circuitry from the arcing load.
151 Citations
11 Claims
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1. A circuit coupled to a voltage source and a current source means, said circuit limiting voltage spikes across two input circuit lines of a voltage spike producing circuit, said circuit comprising:
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a capacitor having a first end connected to said first input circuit line, said first lead of said voltage source and a first lead of said current source means; a resistor having a first end connected to a second end of said capacitor and having a second end connected to a second lead of said voltage source and a second lead of said current source means; and a diode having an anode connected to said second end of said capacitor and having a cathode connected to said second input circuit line and a third lead of said current source means, wherein excess current flow is from said first input circuit line through said capacitor and diode to said second input circuit line and wherein voltage across the two circuit lines is clamped to approximately the voltage of said voltage source. - View Dependent Claims (2, 3, 4)
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5. An input decoupling network between a voltage source and a plurality of dc-dc converter modules connected in parallel across said voltage source, each dc-dc converter module having a switching circuit with a rapid and repetitive operation that causes a current ripple on a first input line of said voltage source, said input decoupling network comprising:
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a plurality of current limiting means for limiting current rate of change each having an input end connected to said first input line of said voltage source and an output end connected to a respective one of said plurality of dc-dc converter modules; a plurality of charge storing means for storing charge each connected across said output side of a respective one of said current limiting means and a second input line of said voltage source, wherein a line current on the input end of the respective current limiting means increases at a small rate from a first value to a higher value when said switching circuit conducts current, and the line current on the input end of said respective current limiting means decreases back to said first level at a small rate when said switching circuit is non-conductive, each of said charge storing means acting to absorb all current flow through said respective current limiting means when the switching circuit is nonconductive, and each of said charge storing means adding to current through said respective current limiting means to meet the current requirements of said switching circuit when said switching circuit is conducting; and a plurality of damping means each connected in parallel with said respective current limiting means for suppressing oscillation in current in said first and second input lines of said voltage source.
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6. A network means for decoupling a power supply output from load generated arcs, said means for decoupling comprising:
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a plurality of dc-dc converter modules having their outputs connected in series to form a dc-dc converter modules output lead and a power supply ground; a filter capacitor having a first end connected to said power supply output and a second end connected to said power supply ground; inductor means for limiting current rate of change having a first end connected to said dc-dc converter modules output lead and said power supply output, wherein said inductor means limits a rate of change of current passing through said filter capacitor during initiation and recovery of said load generated arc and thus preventing shorting out of an output transmission line matching resistance; and resistor damping means connected in parallel with said inductor means, said resistor damping means for reducing oscillation caused by resonance between said inductor means and said filter capacitor. - View Dependent Claims (7, 8)
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9. A network means for decoupling a power supply output of a power supply from load generated arcs, said power supply having a plurality of dc-dc converter modules connected in series and a filter capacitor having a first end connected to said power supply output and a second end connected to a power supply ground, each dc-dc converter module having a switching means for producing a pulsating voltage of controlled duty cycle, an inductor means for converting said pulsating voltage into a smooth direct current, an inverter means for producing from said direct current an alternating current through a primary of a transformer, said transformer having at least one secondary winding inductively coupled to said primary winding and connected to output rectifier means for producing an output voltage of said dc-dc converter module, said means for decoupling comprising:
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a plurality of inductor means for limiting current rate of change each having a first end connected to an output of a respective dc-dc converter module and a second end connected to said power supply output, wherein said plurality of inductor means limits a rate of change of current passing through said filter capacitor during initiation and recovery of said load generated arc and thus prevents shorting out of an output transmission line matching resistance; and a plurality of resistor damping means each connected in parallel with a respective inductor means for reducing oscillation caused by resonance between said respective inductor means and said filter capacitor. - View Dependent Claims (10)
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11. A means for decoupling a power supply output of a power supply from load generated arcs, said power supply having a plurality of dc-dc converter modules connected in parallel and a filter capacitor having a first end connected to said power supply output and a second end connected to a power supply ground, each dc-dc converter module having a switching means for producing a pulsating voltage of controlled duty cycle, an inductor means for converting said pulsating voltage into a smooth direct current, an inverter means for producing from said direct current an alternating current through a primary of a transformer, said transformer having at least one secondary winding inductively coupled to said primary winding and connected to output rectifier means for producing an output voltage of said dc-dc converter module, said means for decoupling comprising:
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a plurality of inductor means for limiting current rate of change each having a first end connected to an output of a respective dc-dc converter module and a second end connected to said power supply output, wherein said plurality of inductor means limits a rate of change of current passing through said filter capacitor during initiation and recovery of said load generated arc and thus prevents shorting out of an output transmission line matching resistance; and a plurality of resistor damping means each connected in parallel with a respective inductor means for reducing oscillation caused by resonance between said respective inductor means and said filter capacitor.
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Specification