Substrate system for optoelectronic/microwave circuits
First Claim
1. A substrate system for carrying and interconnecting an optoelectronic/microwave circuit with the aid of a plurality of solder bumps, said optoelectronic/microwave circuit including an optical fiber, an optoelectronic integrated circuit which has an optical port and a plurality of bonding pads, and a microwave integrated circuit which has a plurality of bonding pads, said microwave integrated circuit adapted for communication with said optoelectronic integrated circuit through a first microwave signal and adapted for communication externally from said optoelectronic/microwave circuit through a second microwave signal, said substrate system comprising:
- a substrate;
a groove formed in said substrate;
a dielectric layer positioned over at least a portion of said substrate;
a plurality of microwave transmission members carried on said dielectric layer and configured to carry microwave signals;
a plurality of first bonding pads formed on said dielectric layer; and
a plurality of second bonding pads formed on said dielectric layer;
wherein;
said groove is configured to receive said fiber;
said first bonding pads are positioned to align with said bonding pads of said optoelectronic integrated circuit and configured to be connected to said bonding pads of said optoelectronic integrated circuit with a plurality of said solder bumps;
said second bonding pads are positioned to align with said bonding pads of said microwave integrated circuit and configured to be connected to said bonding pads of said microwave integrated circuit with a plurality of said solder bumps;
said groove and said first bonding pads are arranged to optically align said optical fiber and said optical port; and
one of said microwave transmission members is arranged to couple said first microwave signal between said optoelectronic integrated circuit and said microwave integrated circuit.
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Accused Products
Abstract
A low-loss substrate system is provided for carrying and interconnecting optoelectronic/microwave circuits. The system includes a high-resistivity substrate, e.g., silicon of resistivity >1×103 ohm-centimeter. A dielectric layer, e.g., silicon dioxide, is preferably deposited over at least a portion of the substrate. Low-loss microwave transmission members and passive microwave components, e.g., capacitors and spiral inductors, can be fabricated directly on the dielectric layer with thin-film techniques. Optoelectronic and microwave integrated circuits are preferably mounted on the substrate system with solder bumps and bonding pads. Other portions of the substrate can define grooves for receiving optical fibers. To enhance optical alignment, the grooves and bonding pads are preferably located with photolithographic techniques. The substrate system is especially suited for optoelectronic/microwave circuits that are realized with hybrid integration structures.
114 Citations
31 Claims
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1. A substrate system for carrying and interconnecting an optoelectronic/microwave circuit with the aid of a plurality of solder bumps, said optoelectronic/microwave circuit including an optical fiber, an optoelectronic integrated circuit which has an optical port and a plurality of bonding pads, and a microwave integrated circuit which has a plurality of bonding pads, said microwave integrated circuit adapted for communication with said optoelectronic integrated circuit through a first microwave signal and adapted for communication externally from said optoelectronic/microwave circuit through a second microwave signal, said substrate system comprising:
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a substrate; a groove formed in said substrate; a dielectric layer positioned over at least a portion of said substrate; a plurality of microwave transmission members carried on said dielectric layer and configured to carry microwave signals; a plurality of first bonding pads formed on said dielectric layer; and a plurality of second bonding pads formed on said dielectric layer; wherein; said groove is configured to receive said fiber; said first bonding pads are positioned to align with said bonding pads of said optoelectronic integrated circuit and configured to be connected to said bonding pads of said optoelectronic integrated circuit with a plurality of said solder bumps; said second bonding pads are positioned to align with said bonding pads of said microwave integrated circuit and configured to be connected to said bonding pads of said microwave integrated circuit with a plurality of said solder bumps; said groove and said first bonding pads are arranged to optically align said optical fiber and said optical port; and one of said microwave transmission members is arranged to couple said first microwave signal between said optoelectronic integrated circuit and said microwave integrated circuit. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A substrate system for carrying and interconnecting an optoelectronic/microwave circuit with the aid of a plurality of solder bumps, said optoelectronic/microwave circuit including an optical fiber, an optoelectronic integrated circuit which has an optical port and a plurality of bonding pads, and a microwave integrated circuit which has a plurality of bonding pads, said microwave integrated circuit adapted for communication with said optoelectronic integrated circuit through a first microwave signal and adapted for communication externally from said optoelectronic/microwave circuit through a second microwave signal, said substrate system comprising:
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a substrate having an impedance greater than 1×
103 ohm-centimeter;a groove formed in said substrate; a plurality of microwave transmission members carried on said substrate and configured to carry microwave signals; a plurality of first bonding pads formed on said substrate; and a plurality of second bonding pads formed on said substrate; wherein; said groove is configured to receive said fiber; said first bonding pads are positioned to align with said bonding pads of said optoelectronic integrated circuit and configured to be connected to said bonding pads of said optoelectronic integrated circuit with a plurality of said solder bumps; said second bonding pads are positioned to align with said bonding pads of said microwave integrated circuit and configured to be connected to said bonding pads of said microwave integrated circuit with a plurality of said solder bumps; said groove and said first bonding pads are arranged to optically align said optical fiber and said optical port; and one of said microwave transmission members is arranged to couple said first microwave signal between said optoelectronic integrated circuit and said microwave integrated circuit. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31)
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Specification