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Vacuum process apparatus and vacuum processing method

  • US 5,611,655 A
  • Filed: 01/04/1996
  • Issued: 03/18/1997
  • Est. Priority Date: 04/23/1993
  • Status: Expired due to Term
First Claim
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1. A vacuum process apparatus comprising:

  • a convey chamber having a plurality of loading/unloading ports and an airtight structure kept in a vacuum when a target object is conveyed;

    at least one preliminary vacuum chamber connected to said convey chamber through one of said plurality of loading/unloading ports;

    a plurality of vacuum process chambers each connected to said convey chamber through a respective one of said plurality of loading/unloading ports and each having a vacuum process mechanism;

    a plurality of opening/closing means for opening/closing said plurality of loading/unloading ports;

    convey means, arranged in said convey chamber and having a multi-joint arm member, for conveying the target object between said convey chamber and said vacuum process chambers, and between said convey chamber and said preliminary chamber;

    a plurality of first support frames for independently supporting said plurality of vacuum process chambers;

    a second support frame, arranged independently of said first support frames, for supporting said convey chamber; and

    a base on which said first support frames and said second support frame are mounted.

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