Micropump
First Claim
1. A micropump including an input port, an output port, a fluid channel space located between the input and the output port, a first oscillating member for opening or closing a communication between the fluid channel space and the input port, a second oscillating member for opening or closing a communication between the fluid channel space and the output port, and at least one third oscillating member for reducing/enlarging the fluid channel space;
- characterized by pressure correcting means located outside the fluid channel space for applying a pressure, which is substantially equal to a fluid pressure at the input port, to a space in which the first oscillating member oscillates.
1 Assignment
0 Petitions
Accused Products
Abstract
A micropump is disclosed including an input port, an output port, a fluid channel space located therebetween, a first oscillating member for opening or closing between the fluid channel space and the input port, a second oscillating member for opening or closing between the fluid channel space and the output port, and at least one third oscillating member for reducing/enlarging the volume of the fluid channel space. The micropump is provided with pressure correcting means which applies a pressure, substantially equal to a fluid pressure at the input port, to a space located outside the fluid channel space and in which the first oscillating member oscillates.
39 Citations
10 Claims
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1. A micropump including an input port, an output port, a fluid channel space located between the input and the output port, a first oscillating member for opening or closing a communication between the fluid channel space and the input port, a second oscillating member for opening or closing a communication between the fluid channel space and the output port, and at least one third oscillating member for reducing/enlarging the fluid channel space;
characterized by pressure correcting means located outside the fluid channel space for applying a pressure, which is substantially equal to a fluid pressure at the input port, to a space in which the first oscillating member oscillates. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A micropump comprising:
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an intermediate plate including an input port and an output port which are spaced apart from each other and which extend through the plate in the direction of the thickness thereof, a suction opening located adjacent to the input port and extending through the plate in the direction of the thickness thereof and a suction valve seat which surrounds the opening, and a discharge opening located adjacent to the output port and extending through the plate in the direction of the thickness thereof and a discharge valve seat which surrounds the discharge opening; a first oscillating member disposed in a space located on the side of the intermediate plate into which the suction valve seat projects, and including a thin sheet disposed opposite to the input port and the suction valve seat, and an oscillator to which the sheet is secured; a second oscillating member disposed in a space located on the side of the intermediate plate into which the discharge valve seat projects, and including a thin sheet disposed opposite to the output port and the discharge valve seat, and an oscillator to which the sheet is secured; a third oscillating member which faces the intermediate plate on the opposite side from the first oscillating member, and including a thin sheet which defines a fluid channel space communicating with the suction opening and the discharge opening together with the intermediate plate, and an oscillator to which the thin sheet is secured; a cover member for forming a space in which the first oscillating member oscillates on the opposite side of the thin sheet of the first oscillating member from the intermediate plate; and pressure correcting means for applying a pressure, which is substantially equal to a fluid pressure at the input port, to the space in which the first oscillating member oscillates. - View Dependent Claims (8, 9, 10)
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Specification