Alignment of a shadow frame and large flat substrates on a heated support
First Claim
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1. A substrate processing system comprising:
- a) a processing chamber for processing a substrate inserted therein upon a blade horizontally movable into a processing area of said chamber;
b) a vertically movable centering support;
c) a plurality of centering members attached to said support and extending vertically therefrom, each said centering member havingi) an inner vertically extending side, andii) a centering feature disposed on a top of said centering member and having an inner inclined surface extending inwardly and downwardly to said vertically extending side; and
d) a substrate support vertically movable with respect to said centering support for supporting said substrate centered by said centering features.
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Abstract
Centering pins mounted to a susceptor in a vacuum chamber align a glass substrate with respect to the susceptor on which it is supported, and with respect to a shadow frame which overlies the periphery of the substrate and protects the edge and underside of the substrate from undesired processing.
Shaped pins loosely mounted in openings in the susceptor so that the pins extend above the upper surface of the susceptor support the centered glass substrate during the transporting stages, but recess into the heated susceptor during processing.
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Citations
4 Claims
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1. A substrate processing system comprising:
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a) a processing chamber for processing a substrate inserted therein upon a blade horizontally movable into a processing area of said chamber; b) a vertically movable centering support; c) a plurality of centering members attached to said support and extending vertically therefrom, each said centering member having i) an inner vertically extending side, and ii) a centering feature disposed on a top of said centering member and having an inner inclined surface extending inwardly and downwardly to said vertically extending side; and d) a substrate support vertically movable with respect to said centering support for supporting said substrate centered by said centering features. - View Dependent Claims (2, 3, 4)
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Specification