Device for suppressing flashovers in cathode sputtering installations

• US 5,611,899 A
• Filed: 11/20/1995
• Issued: 03/18/1997
• Est. Priority Date: 11/19/1994
• Status: Expired due to Term

• Current Assignee: Vertex Fasterners Incorporated
• Original Assignee: Leybold Aktiengesellschaft
• Inventors: Maass, Wolfram
• Primary Examiner(s): Breneman, R. Bruce
• Assistant Examiner(s): MCDONALD, RODNEY GLENN
• Application Number:
  US08/560,845
• Time in Patent Office: 484 Days
• Field of Search: 204/298.03, 204/298.06, 204/298.08, 204/298.26, 204/298.32, 204/192.12, 204/298.14
• US Class Current: 204/298.08
• CPC Class Codes: H01J 2237/0206 Extinguishing, preventing or controlling unwanted discharges
• CPC Class Codes: H01J 37/34 operating with cathodic sputtering H01J37/36 takes precedence ; methods of cathodic sputtering C23C14/34
• CPC Class Codes: H01J 37/3444 Associated circuits

Abstract

An AC voltage source connected to at least one cathode is switched off rapidly upon the occurrence of a critical number of so-called "microarcs" which precede a "large arc". In order to be able to differentiate between large arcs and microarcs, a special counting and evaluation device is provided.

Claims

1. Apparatus for suppressing arcs in a cathode sputtering installation having at least one cathode to which a target is mounted and at least one anode to which a substrate is mounted, said apparatus comprising

an AC voltage source having an output connected to said at least one cathode, said AC voltage source having a frequency of 200 Hz to 300 kHz,

microarc detection means for detecting microarcs at said at least one cathode,

microarc counting means for counting the number of microarcs detected by said detection means, and

means for suppressing arcs when the number of microarcs counted by said counting means exceeds a threshold.

2. Apparatus as in claim 1 wherein said arc detection means monitors the voltage on said cathode and determines that a microarc has occurred when said voltage falls below a threshold value.

3. Apparatus as in claim 1 further comprising

means for determining the frequency of microarc detected by said detection means;

and

means for temporarily shutting off the voltage source when the frequency exceeds a threshold frequency.

4. Apparatus for suppressing arcs in a cathode sputtering installation having at least one cathode to which a target is mounted and at least one anode to which a substrate is mounted, said apparatus comprising

an AC voltage source having an output connected to said at least one cathode, said output providing voltage as a series of halfwaves,

halfwave counting means for counting said halfwaves,

arc detection means for detecting arcs at said at least one cathode,

arc counting means for counting the number of arcs detected by said detection means,

means for determining the ratio of counted halfwaves to counted arcs, and

switch off means for switching off the connection between the AC voltage source and the cathode means for a switch off time t_a when said ratio reaches a threshold ratio.

5. Apparatus as in claim 4 wherein said time t_a is between 25 and 400 μ

s.

6. Apparatus as in claim 4 wherein said halfwave counting means and said arc counting means are synchronized to the frequency of the AC voltage source.

7. Apparatus as in claim 4 further comprising deactivating means for deactivating the switch off means for a deactivation time t_i immediately following the switch off time t_a.

8. Apparatus as in claim 7 wherein said time t_i is between 50 and 300 μ

s.

9. Apparatus as in claim 7 wherein said switch off means and said deactivation means are digital counters which determine the respective times t_a and t_i as integer multiples of one half the fundamental period of the frequency of the AC voltage source.

10. Apparatus as in claim 9 wherein said times t_a and t_i are determined as integer multiples of the fundamental period of the frequency of the AC voltage source.

11. Apparatus as in claim 7 wherein said switch off means and said deactivation means are analog timers.

12. Apparatus as in claim 7 further comprising an internal frequency generator for synchronizing said halfwave counting means, said arc counting means, said switch off means, and said deactivating means.

13. Apparatus as in claim 4 further comprising a fiber optic line which provides a signal from said switch off means to said AC voltage source.

14. Apparatus as in claim 4 wherein said cathode means comprises a pair of cathodes connected to said AC voltage source so that said cathodes are 180°

out of phase.

15. Apparatus as in claim 13 wherein said halfwave counting means and said arc counting means comprise means for determining whether a single arc is present over several halfwaves at either cathode.

16. Apparatus as in claim 4 wherein said halfwave counting means and said arc counting duration.

17. Apparatus as in claim 4 wherein said AC voltage source has a frequency of 200 Hz to 300 kHz.

18. Apparatus as in claim 4 wherein said arc detection means detects microarcs, said arc counting means counts microarcs detected by said arc detection means, and said means for determining the ratio of counted halfwaves to counted arcs determines the ratio of counted halfwaves to counted microarcs.