Capacitance-type electrostatic servo acceleration sensor

• US 5,612,494 A
• Filed: 12/20/1995
• Issued: 03/18/1997
• Est. Priority Date: 12/22/1994
• Status: Expired due to Term

• Current Assignee: Murata Manufacturing Co Limited
• Original Assignee: Murata Manufacturing Co Limited
• Inventors: Shibano, Tomio
• Primary Examiner(s): Williams, Hezron E.
• Assistant Examiner(s): MOLLER, RICHARD ALAN
• Application Number:
  US08/575,884
• Time in Patent Office: 454 Days
• Field of Search: 73/514.32, 73/514.18, 73/862.626, 73/862.61, 361/280, 361/283.3
• US Class Current: 73/514.32
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 15/131 with electrostatic counterbalancing means
• CPC Class Codes: G01P 2015/0828 the mass being of the paddle type being suspended at one of its longitudinal ends
• CPC Class Codes: G01R 27/2605 Measuring capacitance capacitive sensors G01D5/24

Abstract

A capacitance-type electrostatic servo acceleration sensor capable of detecting applied acceleration with high sensitivity and with low error without needing an accurate oscillator. The sensor makes use of a PAM (pulse amplitude-modulation) circuit for performing pulse amplitude-modulation in proportion to the acceleration. The sensor is equipped with a capacitance-detecting portion having a movable electrode and a pair of fixed electrodes located on opposite sides of the movable electrode. The movable electrode is displaced in response to the acceleration. A comparator is formed by an operational amplifier, and a servomechanism is formed. The electrically obtained open gain of this operational amplifier is set sufficiently greater than the mechanically obtained gain of the capacitance-detecting portion. A measurement mode period and a force-balanced mode period are repeated alternately. During the measurement mode period, the movable electrode is not constrained by the servomechanism, and a voltage corresponding to the acceleration is applied to a sample-and-hold amplifier. During the force-balanced mode period, the movable electrode is constrained by the servomechanism according to the output from the sample-and-hold amplifier which corresponds to the acceleration, and the movable electrode is short-circuited to ground.

Claims

1. A capacitance-type electrostatic servo acceleration sensor comprising:

a capacitance-detecting portion having a movable electrode and a pair of fixed electrodes located on opposite sides of said movable electrode, said movable electrode being capable of being displaced in response to an acceleration;

a switched capacitor circuit for converting variations in capacitances in said capacitance-detecting portion into an output voltage;

a comparator for producing a comparator output voltage so that a difference between said output voltage from said switched capacitor circuit and a given reference voltage becomes 0;

a feedback circuit for feeding servo signals back to said fixed electrodes, respectively, of said capacitance-detecting portion, said servo signals being pulse amplitude-modulated according to said comparator output voltage;

an output signal-generating circuit for generating an output signal according to said output voltage from said switched capacitor circuit;

wherein an operational amplifier forms said comparator and has an inverting input terminal to which said output voltage from said switched capacitor circuit is applied, a non-inverting input terminal to which said reference voltage is applied, and an output terminal, said operational amplifier having an open gain and a voltage feedback ratio; and

a feedback circuit connected between said inverting input terminal and said output terminal of said operational amplifier, said feedback circuit providing said voltage feedback ratio so that said electrically obtained open gain is sufficiently greater than a mechanically obtained gain of the capacitance-detecting portion.

2. A capacitance-type electrostatic servo acceleration sensor comprising:

a capacitance-detecting portion having a movable electrode and a pair of fixed electrodes located on opposite sides of said movable electrode, said movable electrode being capable of being displaced in response to an acceleration;

a switched capacitor circuit for converting variations in capacitances in said capacitance-detecting portion into an output voltage;

a sample-and-hold amplifier for sampling and holding said output voltage from said switched capacitor circuit only during a measurement mode period;

a comparator for producing a comparator output voltage so that a difference between an output voltage from said sample-and-hold amplifier and a given reference voltage becomes 0;

a feedback circuit for feeding servo signals back to said fixed electrodes, respectively, of said capacitance-detecting portion only during a force-balanced mode period, said servo signals being pulse amplitude-modulated according to said comparator output voltage;

an output signal-generating circuit for generating an output signal according to an output voltage from said sample-and-hold amplifier; and

said switched capacitor circuit, said sample-and-hold amplifier, said comparator, said feedback circuit and said output signal-generating circuit having control switches which are controllable for repeating said measurement mode period and said force-balanced mode period alternately and periodically.

3. The capacitance-type electrostatic servo acceleration sensor of claim 2, further comprising a shorting switch circuit for short-circuiting said movable electrode to circuit ground or to a constant-voltage source only during said force-balanced mode period.

4. The capacitance-type electrostatic servo acceleration sensor of claim 2, wherein said feedback circuit comprises a mode-switching circuit which alternately passes said comparator output voltage to a pulse amplitude modulator circuit for pulse amplitude-modulating said servo signals.

5. The capacitance-type electrostatic servo acceleration sensor of claim 2, wherein said comparator comprises an operational amplifier having an inverting input terminal to which said output voltage from said switched capacitor circuit is applied, a non-inverting input terminal to which said reference voltage is applied, and an output terminal, said comparator having a feedback circuit connected between said inverting input terminal and said output terminal of said operational amplifier, said operational amplifier having an electrically obtained open gain, and wherein said feedback circuit provides said open gain which is sufficiently greater than a mechanically obtained gain of the capacitance-detecting portion.

6. The capacitance-type electrostatic servo acceleration sensor of claim 5, further comprising a shorting switch circuit for short-circuiting said movable electrode to circuit ground or to a constant-voltage source only during said force-balanced mode period.

7. The capacitance-type electrostatic servo acceleration sensor of claim 5, wherein said feedback circuit comprises a mode-switching circuit which alternately passes said comparator output voltage to a pulse amplitude modulator circuit for pulse amplitude-modulating said servo signals.