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Capacitance type acceleration sensor

  • US 5,616,844 A
  • Filed: 12/27/1994
  • Issued: 04/01/1997
  • Est. Priority Date: 12/27/1993
  • Status: Expired due to Fees
First Claim
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1. A capacitance acceleration sensor comprising:

  • a movable electrode which is movable in response to acceleration,a first static electrode facing the movable electrode;

    and a first solid dielectric member disposed between the movable electrode and the first static electrode.

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