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Piezoelectric actuator

  • US 5,616,982 A
  • Filed: 03/25/1996
  • Issued: 04/01/1997
  • Est. Priority Date: 11/01/1989
  • Status: Expired due to Term
First Claim
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1. An apparatus for tilting the plane of an object comprising:

  • a substrate;

    a pair of members, each of said members fabricated from a piezoelectric material, each of said members having a top surface, a bottom surface, a first side surface and a second side surface, said bottom surface being directly mounted to said substrate, and said first side surface of each of said members being affixed to each other and electrically connected in common, a first one of said members further having a polarization selected so that a voltage of a first polarity applied between said first side surface and said second side surface thereof causes said first one of said members to contract between said top surface and said bottom surface, and further wherein said object is mounted to said top surface of each of said members so that when a voltage is applied to said second side surface of said first one of said members said object tilts toward said first one of said members;

    a reflective surface, said reflective surface being mounted on said top surface of said members and perpendicular to said side surfaces; and

    a metallization, said metallization being disposed on each of said second side surfaces of said members.

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